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Spie Press Book

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
Editor(s): P. Rai-Choudhury
Format Member Price Non-Member Price

Book Description

The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

Book Details

Date Published: 14 March 1997
Pages: 776
ISBN: 9780819497864
Volume: PM39

Table of Contents
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Preface vii

Introduction 3
Burn J. Lin, P. Rai-Choudhury

1 Optical lithography 11
Harry J. Levinson, William H. Arnold

2 Electron beam lithography 139
Mark A. McCord, Michael J. Rooks

3 X-ray lithography 251
Franco Cerrina

4 Deep-UV resist technology 321
Robert D. Allen, Willard E. Conley, Roderick R. Kunz

5 Photomask fabrication procedures and limitations 377
John G. Skinner, Timothy R. Groves, Anthony Novembre, Hans Pfeiffer, Rajeev Singh

6 Metrology methods in photolithography 475
Laurie J. Lauchlan, Diana Nyyssonen, Neal Sullivan

7 Optical lithography modeling 597
Andrew R. Neureuther, Chris A. Mack

8 Issues in nanolithography for quantum effect device manufacture 681
Martin C. Peckerar, F. Keith Perkins, Elizabeth A. Dobisz, Orest J. Glembocki

Index 765

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