Digital Forum
Online Only
6 - 11 March 2021
Conference 11697
MOEMS and Miniaturized Systems XX
Conference Committee
Important Dates
Abstract Due:
26 August 2020

Author Notification:
9 November 2020

Manuscript Due Date:
12 February 2021

Conference Cosponsors
Additional Conference Information
This conference is accepting post-deadline submissions:
Post-Deadline Submission Portal
Monday 18 January Show All Abstracts
Welcome and Introduction
Welcome and Introduction to SPIE Conference 11697
Paper 11697-800
Author(s): Hans Zappe, Univ. of Freiburg (Germany); Wibool Piyawattanametha, King Mongkut's Institute of Technology Ladkrabang (Thailand); Yong-Hwa Park, KAIST (Korea, Republic of)
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Session 1: Micro-mirrors I
Photo-controlled deformable mirror for wavefront shaping (Invited Paper)
Paper 11697-1
Author(s): Frédéric Zamkotsian, Patrick Lanzoni, Lab. d'Astrophysique de Marseille (France); Edoardo Redaelli, INAF – Osservatorio Astronomico di Brera (Italy); Giorgio Pariani, Andrea Bianco, INAF - Osservatorio Astronomico di Brera (Italy)
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A 2D circular-scanning piezoelectric MEMS mirror for laser material processing
Paper 11697-2
Author(s): Shanshan Gu-Stoppel, Jörg Albers, Norman Laske, Marec Timmermann, Frank Senger, Gundula Piechotta, Fraunhofer-Institut für Siliziumtechnologie ISIT (Germany)
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Mechanically-coupled micro-mirror array with large equivalent aperture
Paper 11697-3
Author(s): Qin Zhou, Yufeng Wang, Gary Li, Sergio F. M. Almeida, Sae Won Lee, Youmin Wang, DiDi Research America LLC (United States)
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A novel closed-loop architecture for accurate micromirror trajectory control in linear scanning MEMS-based projectors
Paper 11697-4
Author(s): Paolo Frigerio, Riccardo Tarsi, Giacomo Langfelder, Politecnico di Milano (Italy); Giuseppe Maiocchi, Luca Molinari, Andrea Barbieri, STMicroelectronics (Italy)
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Structure optimization of MEMS mirror with particle swarm optimization algorithm
Paper 11697-5
Author(s): Yufeng Wang, Gary Li, Qin Zhou, Sergio F. M. Almeida, Sae Won Lee, Youmin Wang, DiDi Research America LLC (United States)
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Session 2: Micro-mirrors II
Quasi-static PZT actuated MEMS mirror with 4x3mm reflective area and high robustness (Invited Paper)
Paper 11697-6
Author(s): Nicolò Boni, Roberto Carminati, Gianluca Mendicino, Massimiliano Merli, STMicroelectronics (Italy)
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Innovative ECDL design based on a resonant MEMS scanner for ultra-fast tuning in the MIR range
Paper 11697-7
Author(s): Morten Hoppe, Sacher Lasertechnik GmbH (Germany); Sebastian Schmidtmann, Sensor Photonics GmbH (Germany); Christian Assmann, Sacher Lasertechnik GmbH (Germany); Martin Honsberg, Sensor Photonics GmbH (Germany); Hervé Tatenguem Fankem, Tobias Milde, Sacher Lasertechnik GmbH (Germany); Thomas Schanze, Technische Hochschule Mittelhessen (Germany); Joachim R. Sacher, Sacher Lasertechnik GmbH (Germany), Sensor Photonics GmbH (Germany); Shanshan Gu-Stoppel, Frank Senger, Fraunhofer-Institut für Siliziumtechnologie ISIT (Germany)
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A two-axis water-immersible micro scanning mirror using torsional and bending polymer hinges
Paper 11697-8
Author(s): Xiaoyu Duan, Jun Zou, Texas A&M Univ. (United States)
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Wide-angle wide-spectral range IMI plasmonic MEMS mirror in the MIR for spectroscopic gas sensing applications
Paper 11697-9
Author(s): Hoda Morshed, Ain Shams Univ. (Egypt), German Univ. in Cairo (Egypt); Yasser M. Sabry, Diaa A. M. Khalil, Ain Shams Univ. (Egypt), Si-Ware Systems (Egypt)
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Multiple MEMS mirrors synchronization techniques, modeling, and applications
Paper 11697-10
Author(s): Dadi Sharon, Guy Amor, Nir Gorelik, Elan Roth, Sivan Kinstlich, STMicroelectronics Ltd. (Israel)
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Session 3: LIDAR I
Wide-angle LiDAR demonstrator based on a single resonantly operated 1D automotive grade MEMS mirror capable of scanning 180° (Invited Paper)
Paper 11697-11
Author(s): Leon Pohl, Fabian Schwarz, Peter Blicharski, Kenny Tam, Christian Janicke, Thomas von Wantoch, Ulrich Hofmann, OQmented GmbH (Germany)
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A miniature LiDAR with a movable MEMS scanner for micro-robotics
(Canceled)
Paper 11697-12
Author(s):
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A designing and manufacturing platform for AlScN based highly linear quasi-static MEMS mirrors with large optical apertures
Paper 11697-13
Author(s): Shanshan Gu-Stoppel, Frank Senger, Erdem Yarar, Gunnar Wille, Jörg Albers, Fraunhofer-Institut für Siliziumtechnologie ISIT (Germany)
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Efficient driver and high accuracy sense ASICs for piezoelectric micro-mirrors
Paper 11697-14
Author(s): Marco Zamprogno, Luca Molinari, Andrea Barbieri, STMicroelectronics (Italy)
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Session 4: LIDAR II
Amplitude-modulated continuous wave scanning lidar based on parallel demodulation process (Invited Paper)
Paper 11697-15
Author(s): Sung Hyun Lee, Wook-Hyeon Kwon, Yong-Hwa Park, KAIST (Korea, Republic of)
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Beam-steering MOEMS system based on a resonant piezoMEMS mirror and a phase-locked loop controller
Paper 11697-16
Author(s): Konsta Ruotsalainen, Dmitry Morits, Jukka Kyynäräinen, Oili Ylivaara, VTT Technical Research Ctr. of Finland Ltd. (Finland)
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Reflex optical phased array for autonomous vehicles using new scheme of LiDAR design
Paper 11697-17
Author(s): Chia-Ming Liu, Chun-Nine Liu, Hsing-Kun Shih, National Chung Hsing Univ. (Taiwan); Tien-Tsorng Shih, National Kaohsiung Univ. of Science and Technology (Taiwan); Charles W. Tu, Wood-Hi Cheng, National Chung Hsing Univ. (Taiwan)
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A hybrid approach of damping modeling and simulation for MEMS micro mirrors in LiDAR systems
Paper 11697-18
Author(s): Gary Li, Yufeng Wang, Qin Zhou, Sergio F. M. Almeida, Sae Won Lee, Youmin Wang, DiDi Research America LLC (United States)
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Session 5: Novel Optical Components I
Gravity-compensated and miniaturized optofluidic wavefront modulator (Invited Paper)
Paper 11697-19
Author(s): Martin Sauther, Univ. of Freiburg (Germany); Pouya Rajaeipour, Univ. of Freiburg (Germany), Phaseform GmbH (Germany); Nitish Satya Murthy, Univ. of Freiburg (Germany); Kaustubh Banerjee, Univ. of Freiburg (Germany), Phaseform GmbH (Germany); Hans Zappe, Çaglar Ataman, Univ. of Freiburg (Germany)
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Photonic crystal MEMS emitter for chemical gas sensing
Paper 11697-20
Author(s): Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Qingxin Zhang, Hong Cai, A*STAR Institute of Microelectronics (Singapore); Daohua Zhang, Qi Jie Wang, Nanyang Technological Univ. (Singapore); Lennon Y. T. Lee, A*STAR Institute of Microelectronics (Singapore)
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CMOS compatible MEMS pyroelectric infrared detectors: From AlN to ScAlN
Paper 11697-21
Author(s): Doris K. T. Ng, Chong Pei Ho, Tantan Zhang, Linfang Xu, Li Yan Siow, Wing Wai Chung, Hong Cai, Lennon Y. T. Lee, Qingxin Zhang, Navab Singh, A*STAR Institute of Microelectronics (Singapore)
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Tunable optical filters with hybrid plasmonic-dielectric thin-films for fluorescence sensing
Paper 11697-22
Author(s): Ahmed Abdelghfar, Zewail City of Science and Technology (Egypt); Noha Anous, Ain Shams Univ. (Egypt); Noha Gaber Ali Aboulela, Zewail City of Science and Technology (Egypt)
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Session 6: Novel Optical Components II
Smart slit assembly employing continuously tunable MEMS shutter (Invited Paper)
Paper 11697-23
Author(s): Anton Lagosh, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Gergely Huszka, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Hamed Sattari, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Berit Ahlers, Benedikt Guldimann, European Space Research and Technology Ctr. (Netherlands); Grégoire Kerr, OHB-System AG (Germany); Mauro Melozzi, Peyman Rahnama, Micos Engineering GmbH (Switzerland); Takeshi Nishizawa, OHB-System AG (Germany); Niels Quack, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
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Compact and innovative laser beam steering optical engine for smart glasses applications
Paper 11697-24
Author(s): Dadi Sharon, Elan Roth, Alex Domnits, Shlomi Erlich, STMicroelectronics Ltd. (Israel)
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Compact detector unit based on the butterfly assembly for trace gas analysis
Paper 11697-25
Author(s): Tobias Milde, Morten Hoppe, Hervé Tatenguem Fankem, Sacher Lasertechnik GmbH (Germany); Sebastian Schmidtmann, Martin Honsberg, Sensor Photonics GmbH (Germany); Christian Assmann, Sacher Lasertechnik GmbH (Germany); Wolfgang Schade, Technische Univ. Clausthal (Germany); Joachim R. Sacher, Sacher Lasertechnik GmbH (Germany), Sensor Photonics GmbH (Germany)
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Development of MOEMS based turbidity sensor for on-line monitoring of suspended particles in engine oil: A portable turbidity sensor
Paper 11697-26
Author(s): Sidharth Sidharth, Supankar Das, Harry Garg, Amitava Das, CSIR - Central Scientific Instruments Organisation (India)
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Session 7: Imaging
Array camera architecture for high resolution smartphone camera modules with low z-height using piezo-electric bending actuators and tunable lenses (Invited Paper)
(Canceled)
Paper 11697-27
Author(s):
Show Abstract
A versatile MOEMS enabled sensing and imaging platform for longitudinal studies of heart organoid
Paper 11697-28
Author(s): Cheng-You Yao, Weiyang Yang, Brett Volmert, Yonatan Israeli, Michigan State Univ. (United States); Wibool Piyawattanametha, Michigan State Univ. (United States), King Mongkut's Institute of Technology Ladkrabang (Thailand); Aitor Aguirre, Wen Li, Zhen Qiu, Michigan State Univ. (United States)
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Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators
Paper 11697-29
Author(s): Christoph K. Hohle, Sebastian Döring, Martin Friedrichs, Andreas Gehner, Dirk Rudloff, Matthias Schulze, Ronald Stübner, Daniela Trenkler, Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany)
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Curved micro-camera-array microscopy
Paper 11697-30
Author(s): Vinayak Pathak, Pavan Chandra Konda, Kevin C. Zhou, Colin Cooke, Duke Univ. (United States); Leila Ghanbari, Suhasa Kodandaramaiah, Univ. of Minnesota, Twin Cities (United States); Roarke W. Horstmeyer, Duke Univ. (United States)
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3D printed MOEMS scanner for multimodality imaging
Paper 11697-31
Author(s): Houduo He, Bo Li, Cheng-You Yao, Michigan State Univ. (United States); Wibool Piyawattanametha, Michigan State Univ. (United States), King Mongkut's Institute of Technology (Thailand); Zhen Qiu, Michigan State Univ. (United States)
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Session 8: Spectrometers
Compact and low power silicon photonic components based on MEMS (Invited Paper)
Paper 11697-32
Author(s): Kristinn B. Gylfason, Pierre Edinger, KTH Royal Institute of Technology (Sweden); Carlos Errando-Herranz, KTH Royal Institute of Technology (Sweden), Massachusetts Institute of Technology (United States); Alain Takabayashi, Hamed Sattari, Niels Quack, Ecole Polytechnique Fédérale de Lausanne (Switzerland); Peter Verheyen, imec (Belgium); Wim Bogaerts, imec (Belgium), Univ. Gent (Belgium)
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Performance tests of MOEMS FPI based cubic-inch hyperspectral camera
Paper 11697-33
Author(s): Roberts Trops, Antti Näsilä, Endija Briede, Christer Holmlund, Hans Toivanen, Rami Mannila, Ingmar Stuns, Martti Blomberg, Heikki Saari, VTT Technical Research Ctr. of Finland Ltd. (Finland)
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Cavity optomechanics for trace gas detection
Paper 11697-34
Author(s): Joris Baraillon, Pierre R. Labeye, Laurent Duraffourg, CEA-LETI (France)
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Open path air pollution monitoring in Sense-City using MEMS-based FTIR spectral sensor
Paper 11697-35
Author(s): Alaa Fathy, Univ. Gustave Eiffel (France); Yasser M. Sabry, Momen Anwar, Amr O. Ghoname, Ahmed Saeed, Si-Ware Systems (Egypt); Yamin Leprince-Wang, Univ. Gustave Eiffel (France); Diaa A. M. Khalil, Si-Ware Systems (Egypt); Tarik Bourouina, Lab. d'Electronique, Systèmes de Communications et Microsystèmes (France)
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Session 9: Endoscopic Microscopy: Joint session with 11620 and 11697
Miniaturized multiphoton microscope for precision imaging of oral lesion
Paper 11697-36
Author(s): Lin Huang, Bo Li, Cheng-You Yao, Michigan State Univ. (United States); Wibool Piyawattanametha, Michigan State Univ. (United States), King Mongkut's Institute of Technology Ladkrabang (Thailand); Zhen Qiu, Michigan State Univ. (United States)
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Miniaturized multi-color wide-field imaging guided MOEMS based confocal microscope for the next generation gut-microbiome (GuMI) physiome platform
Paper 11697-37
Author(s): Cheng-You Yao, Michigan State Univ. (United States); Duncan O'Boyle, Jianbo Zhang, Massachusetts Institute of Technology (United States); Bo Li, Aniwat Juhong, Michigan State Univ. (United States); Wibool Piyawattanametha, Michigan State Univ. (United States), King Mongkut's Institute of Technology Ladkrabang (Thailand); Rebecca Carrier, Northeastern Univ. (United States); Linda G. Griffith, David L. Trumper, Massachusetts Institute of Technology (United States); Zhen Qiu, Michigan State Univ. (United States)
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Session PS: Poster Session
MEMS-based polarized FTIR spectrometer for polymer quality control
Paper 11697-38
Author(s): Yomna M. Eltagoury, Yasser M. Sabry, Diaa A. M. Khalil, Ain Shams Univ. (Egypt), Si-Ware Systems (Egypt)
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Electro-mechanical validation of a resonant MEMS mirror with PZT actuation and PZR sensing
Paper 11697-39
Author(s): Gianluca Mendicino, Massimiliano Merli, Nicolò Boni, Roberto Carminati, STMicroelectronics SRL (Italy); Attilio Frangi, Andrea Opreni, Politecnico di Milano (Italy)
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Modeling and experimental verification of the impact of noise sources on projection accuracy of MEMS linear micromirrors for raster scanning applications
Paper 11697-40
Author(s): Paolo Frigerio, Giacomo Langfelder, Politecnico di Milano (Italy); Marco Zamprogno, Andrea Barbieri, STMicroelectronics (Italy)
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On-chip structure for optofluidic sensing using stable Fabry-Pérot resonator
Paper 11697-41
Author(s): Abdelrahman Toraya, Zewail City of Science and Technology (Egypt); Noha Gaber Ali Aboulela, Zewail City of Science and Technology (Egypt), ESIEE Paris (France); Frédéric Marty, Tarik Bourouina, ESIEE Paris (France)
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A 2D electrothermal micromirror with feedback based on Hall-effect of Piezoresistive sensors
Paper 11697-42
Author(s): Yue Tang, Jian Hua Li, Li Xin Xu, Huikai Xie, Beijing Institute of Technology (China)
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Conference Committee
Conference Chairs
Program Committee
Program Committee continued...
  • David G. Lishan, Plasma-Therm LLC (United States)
  • Veljko Milanović, Mirrorcle Technologies, Inc. (United States)
  • Yves-Alain Peter, Polytechnique Montréal (Canada)
  • Zhen Qiu, Michigan State Univ. (United States)
  • Niels Quack, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
  • Stefan Richter, Carl Zeiss AG (Germany)
  • Anna Rissanen, Aalto Univ. (Finland)
  • Hamdi Torun, Northumbria Univ. (United Kingdom)
  • Frédéric Zamkotsian, Lab. d'Astrophysique de Marseille (France)
  • Guangya Zhou, National Univ. of Singapore (Singapore)

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