The Moscone Center
San Francisco, California, United States
1 - 6 February 2020
Conference 11293
MOEMS and Miniaturized Systems XIX
Saturday - Monday 1 - 3 February 2020
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Abstract Due:
24 July 2019

Author Notification:
30 September 2019

Manuscript Due Date:
8 January 2020

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Conference Chairs
Program Committee
Program Committee continued...
  • David G. Lishan, Plasma-Therm LLC (United States)
  • Veljko Milanović, Mirrorcle Technologies, Inc. (United States)
  • Yves-Alain Peter, Ecole Polytechnique de Montréal (Canada)
  • Zhen Qiu, Michigan State Univ. (United States)
  • Niels Quack, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
  • Anna Rissanen, Outsight Oy (Finland)
  • Stefan Richter, Carl Zeiss AG (Germany)
  • Hamdi Torun, Northumbria Univ. (United Kingdom)
  • Frédéric Zamkotsian, Lab. d'Astrophysique de Marseille (France)
  • Guangya Zhou, National Univ. of Singapore (Singapore)

Saturday 1 February Show All Abstracts
Session 1:
Saturday 1 February 2020
8:10 AM - 10:00 AM
Session Chair:
Çağlar Ataman, Univ. of Freiburg (Germany)
Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform (Invited Paper)
Paper 11293-1
Author(s): Andreas Gehner, Peter Dürr, Detlef Kunze, Dirk Rudloff, Andreas Elgner, Sara Francés González, Jörg Heber, Hannes Torlee, Mark Eckert, Martin Friedrichs, Jan-Uwe Schmidt, Wolfram Pufe, Sebastian Döring, Christoph Hohle, Matthias Schulze, Michael Wagner, Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany)
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A multi-ring concentric micromirror array for high-speed random-access axial focusing
Paper 11293-2
Author(s): Nathan Tessema Ersumo, Cem Yalcin, Univ. of California, Berkeley (United States); Nicolas Pegard, The Univ. of North Carolina at Chapel Hill (United States); Laura Waller, Rikky Muller, Univ. of California, Berkeley (United States)
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A triple-wafer-bonded AlScN driven quasi-static MEMS mirror with high linearity and large tilt angles
Paper 11293-3
Author(s): Shanshan Gu-Stoppel, Thomas Lisec, Maria Claus, Nico Funck, Saskia Schröder, Simon Fichtner, Bernhard Wagner, Fabian Lofink, Fraunhofer-Institut für Siliziumtechnologie ISIT (Germany)
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A bi-axial vacuum-packaged piezoelectric MEMS mirror for smart headlights
Paper 11293-4
Author(s): Gundula Piechotta, Fraunhofer-Institut für Siliziumtechnologie ISIT (Germany); Ulrich Hofmann, OQmented GmbH (Germany); Frank Senger, Jörg Albers, Fraunhofer-Institut für Siliziumtechnologie ISIT (Germany); Thomas von Wantoch, OQmented GmbH (Germany); Shanshan Gu-Stoppel, Fraunhofer-Institut für Siliziumtechnologie ISIT (Germany)
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A two-axis water-immersible micro scanning mirror using hybrid polymer hinges
Paper 11293-5
Author(s): Xiaoyu Duan, Anthony Medellin, Chao Ma, Jun Zou, Texas A&M Univ. (United States)
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Session 2:
Saturday 1 February 2020
10:30 AM - 12:30 PM
Session Chair:
Veljko Milanović, Mirrorcle Technologies, Inc. (United States)
MOEMS enabled agile LiDAR (Invited Paper)
Paper 11293-6
Author(s): James Jung, AEye, Inc. (United States)
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Vibration analysis of micro mirrors for LIDAR, using on-chip piezoresistive sensors (Invited Paper)
Paper 11293-7
Author(s): Jan Grahmann, Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany); Richard Schroedter, Technische Univ. Wien (Austria); Oliver Kiethe, Ulrich Todt, Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany); Klaus Janschek, TU Dresden (Germany)
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Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR
Paper 11293-8
Author(s): Fabian Schwarz, OQmented GmbH (Germany); Frank Senger, Jörg Albers, Pauline Malaurie, Fraunhofer-Institut für Siliziumtechnologie ISIT (Germany); Christian Janicke, Leon Pohl, OQmented GmbH (Germany); Felix Heinrich, Dirk Kaden, Hans-Joachim Quenzer, Fabian Lofink, Fraunhofer-Institut für Siliziumtechnologie ISIT (Germany); Thomas von Wantoch, Ulrich Hofmann, OQmented GmbH (Germany)
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A laser scanning based 3D object sensing method using multiple frequencies modulation
Paper 11293-9
Author(s): InGyu Jang, Yong-Hwa Park, KAIST (Korea, Republic of)
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Comparison of MEMS mirror LiDAR architectures
Paper 11293-31
Author(s): Abhishek Kasturi, Mirrorcle Technologies Inc (United States); Veljko Milanovic, Daniel B. Lovell, Frank Hu, Derek Ho, Yu Su, Lj. Ristic, Mirrorcle Technologies, Inc. (United States)
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Lunch/BiOS Expo Break 12:30 PM - 2:00 PM
Session 3:
Novel Optical Devices I
Saturday 1 February 2020
2:00 PM - 3:30 PM
Session Chair:
David G. Lishan, Plasma-Therm LLC (United States)
Wide and fast mode-hop free MEMS tunable ECDL concept and realization in the NIR and MIR spectral regime (Invited Paper)
Paper 11293-10
Author(s): Morten Hoppe, Hanna Rohling, Sacher Lasertechnik GmbH (Germany); Sebastian Schmidtmann, Martin Honsberg, Sensor Photonics GmbH (Germany); Hervé Tatenguem Fankem, Tobias Milde, Sacher Lasertechnik GmbH (Germany); Jan Grahmann, Fraunhofer Institute for Photonic Microsystems IPMS (Germany); Joachim R. Sacher, Sacher Lasertechnik GmbH (Germany), Sensor Photonics GmbH (Germany)
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Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation
Paper 11293-11
Author(s): Anton Melnikov, Hermann Schenk, Barbara Spitz, Franziska Wall, Lutz Ehrig, Sergiu Langa, Michael Stolz, Bert Kaiser, Holger Conrad, Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany); Harald Schenk, Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany), Brandenburg Univ. of Technology Cottbus-Senftenberg (Germany)
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Engineering the glass waveguide surface for uniform light refraction inside an optofluidic photoreactor
Paper 11293-12
Author(s): Xiangkun Cao, Tao Hong, Tingwei Liu, David Erickson, Cornell Univ. (United States)
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Dynamic pattern generation by singlemode fibers for endoscopic 3D measurement systems
Paper 11293-13
Author(s): Silvio Pulwer, Technische Hochschule Wildau (Germany); Daniel Jahns, Technische Hochschule Wildau (Germany), INDI-Jahns (Germany); Claus Villringer, Sigurd Schrader, Technische Hochschule Wildau (Germany)
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Session 4:
Novel Optical Devices II
Saturday 1 February 2020
4:00 PM - 5:40 PM
Session Chair:
Hans Zappe, Univ. of Freiburg (Germany)
Foveated display by laser scanning
Paper 11293-14
Author(s): Ran Gabai, Gady Yearim, Gil Cahana, Meni Yehiel, Adi Baram, Matan Naftali, Maradin Ltd. (Israel)
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MEMS-integrated metasurface lens with tunable focus
Paper 11293-15
Author(s): Zheyi Han, Shane Colburn, Arka Majumdar, Karl F. Böhringer, Univ. of Washington (United States)
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Large-dynamic-range displacement sensing using a nanomechanical photonic integrated circuit
Paper 11293-16
Author(s): Tianran Liu, Technische Univ. Eindhoven (Netherlands); Francesco M. Pagliano, Technische Univ. Eindhoven (Netherlands), nanoPHAB (Netherlands); René van Veldhoven, Vadim Pogoretskiy, Yuqing Jiao, Andrea Fiore, Technische Univ. Eindhoven (Netherlands)
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Miniaturization of the Hanbury Brown-Twiss configuration
Paper 11293-18
Author(s): Martin Jahn, Dominik Karolewski, Julia Baldauf, Geert Brokmann, Thomas Ortlepp, CiS Forschungsinstitut für Mikrosensorik GmbH (Germany)
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Combined MEMS spectrometer based on Michelson interferometer and tunable filter for wideband selective operation
Paper 11293-19
Author(s): Amir Shaheen, Yasser M. Sabry, Diaa A. M. Khalil, Ain Shams Univ. (Egypt), Si-Ware Systems (Egypt)
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Sunday 2 February Show All Abstracts
Session 5:
Sunday 2 February 2020
8:00 AM - 10:20 AM
Session Chair:
Zhen Qiu, Michigan State Univ. (United States)
Portable spectroscopy and hyperspectral imaging in 2020 (Invited Paper)
Paper 11293-20
Author(s): Richard A. Crocombe, Crocombe Spectroscopic Consulting (United States)
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Light-sheet microscopy using MEMS and active optics for 3D image acquisition control (Invited Paper)
Paper 11293-21
Author(s): Spyridon Bakas, Deepak Uttamchandani, Ralf Bauer, Univ. of Strathclyde (United Kingdom)
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Bioinspired ultrathin arrayed camera for multi-view plane imaging
Paper 11293-22
Author(s): Kisoo Kim, Kyung-Won Jang, Sang-In Bae, Ki-Hun Jeong, KAIST (Korea, Republic of)
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Single-pixel hyperspectral imaging using Hadamard transformation
Paper 11293-23
Author(s): Yi Qi, Guangya Zhou, Zi Heng Lim, Liang Li, Guangcan Zhou, Fook Siong Chau, National Univ. of Singapore (Singapore)
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Highly enhanced signal-to-noise ratio and spectral resolution in micro-spectrometer using spreading coded light excitation
Paper 11293-24
Author(s): Park JungWoo, Ki-Beom Kim, Won-Kyung Lee, Ki-Hun Jeong, KAIST (Korea, Republic of)
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Near range imaging using fully integrated bioinspired ultrathin camera
Paper 11293-25
Author(s): Kyung-Won Jang, Kisoo Kim, Ki-Hun Jeong, KAIST (Korea, Republic of)
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MOEMS and Miniaturized Systems Best Paper Awards Ceremony
Sunday 2 February 2020
10:20 AM - 10:30 AM
Session Chair:
Yong-Hwa Park, KAIST (Korea, Republic of)

Awards Sponsor:
Session 6:
Endoscopic Microscopy: Joint Session with 11214 and 11293
Sunday 2 February 2020
3:30 PM - 4:50 PM
Session Chair:
Wibool Piyawattanametha, King Mongkut's Institute of Technology Ladkrabang (Thailand), Michigan State Univ. (United States)
Low-voltage magnetic actuated fiber scanning endoscope for 3D optical coherence tomography
Paper 11214-31
Author(s): Hinnerk Schulz-Hildebrandt, Univ. zu Lübeck (Germany); Tim Eixmann, Malte vom Endt, Medizinisches Laserzentrum Lübeck GmbH (Germany); Gereon M. Hüttmann, Univ. zu Lübeck (Germany)
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Dual modality multiphoton-OCT flexible endomicroscope with an integrated electromagnetic z-actuator for optical field-of-view switching and a piezo-fiber-scanner for image acquisition
Paper 11214-32
Author(s): Bernhard Messerschmidt, Gregor Matz, Sven Flämig, Karl Reichwald, Ekaterina Pshenay-Severin, Grintech GmbH (Germany); Andreas Kamm, Claudia Reinlein, Beatrice Korn, Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF (Germany); Karsten Kühnert, David Vasquez, Marianne Heilmann, piezosystem jena GmbH (Germany); Thomas Frank, Thomas Sattel, Tom Ströhla, Technische Univ. Ilmenau (Germany); Xiang Lu, Herbert Gross, Friedrich-Schiller-Univ. Jena (Germany)
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Multimodal two-photon and three-photon endomicroscopy for 3D tissue imaging
Paper 11214-33
Author(s): Qihao Liu, Mukhlasur Rahman Tanvir, Lin Huang, Shuo Tang, The Univ. of British Columbia (Canada)
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A 3D actuator for laser scanning endoscopy
Paper 11293-26
Author(s): Oguz Gurcuoglu, Irem D. Derman, Istanbul Technical Univ. (Turkey); Melisa Altinsoy, Politecnico di Milano (Italy); Ramin Khayatzadeh, Ahmet C. Erten, Istanbul Technical Univ. (Turkey); Fehmi Civitci, Oregon Health and Science Univ. (United States); Onur Ferhanoglu, Istanbul Technical Univ. (Turkey)
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Monday 3 February Show All Abstracts
Session Plen:
OPTO Plenary Session
Monday 3 February 2020
8:00 AM - 10:05 AM

8:00 am: Welcome and Opening Remarks
Sailing He, KTH Royal Institute of Technology (Sweden) and Zhejiang Univ. (China); Yasuhiro Koike, Keio Univ. (Japan)
The future of optical components and materials in the fibre (Plenary Presentation)
Paper 11285-201
Author(s): David N. Payne, Optoelectronics Research Ctr., Univ. of Southampton (United Kingdom)
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Efficient light emission from hexagonal SiGe (Plenary Presentation)
Paper 11284-202
Author(s): Erik P. A. M. Bakkers, Eindhoven Univ. of Technology (Netherlands)
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Product design for the next wave of computing (Plenary Presentation)
Paper 11283-203
Author(s): Trond Wuellner, Google (United States)
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Session PWed:
Monday 3 February 2020
5:30 PM - 7:00 PM

Conference attendees are invited to attend the poster session on Monday evening. Come view the posters, enjoy light refreshments, ask questions, and network with colleagues in your field.

Poster Setup: Monday 10:00 AM – 5:00 PM
View poster presentation guidelines and set-up instructions at
Effects of optically absorbent coatings on parallel optical control of levitating milli-robots
Paper 11293-17
Author(s): Jared Young, Srija Makkapati, Steven Yee, Hatem ElBidweihy, Charles Nelson, U.S. Naval Academy (United States)
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Compressive sensing MEMS FTIR spectrometer
Paper 11293-27
Author(s): Karim S. Hedayet, Yasser M. Sabry, Diaa A. M. Khalil, Si-Ware Systems (Egypt)
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Multi-walled carbon nanotubes based near-infrared radiation source
Paper 11293-28
Author(s): Ahmed Saeed, Electronics Research Institute (Egypt); Ahmed A. Elsayed, Ain Shams Univ. (Egypt), Si-Ware Systems (Egypt); Frédéric Marty, ESIEE Paris (France); Elyes Nefzaoui, Tarik Bourouina, ESIEE Paris (France); H. A. Shawkey, Electronics Research Institute (Egypt); Yasser M. Sabry, Diaa A. M. Khalil, Ain Shams Univ. (Egypt), Si-Ware Systems (Egypt)
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Modeling and characterization of the reflectance of vertical metal-coated micromirrors in deeply-etched optical benches
Paper 11293-29
Author(s): Moez El-Massry, Yasser M. Sabry, Ain Shams Univ. (Egypt), Si-Ware Systems (Egypt); Ahmed Shebl, Si-Ware Systems (Egypt); Sébastien Nazeer, Si-Ware Systems (France); Diaa A. M. Khalil, Ain Shams Univ. (Egypt), Si-Ware Systems (Egypt)
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Attenuated total reflection (ATR) MEMS FTIR spectrometer
Paper 11293-30
Author(s): Amr O. Ghoname, Ain Shams Univ. (Egypt); Yasser M. Sabry, Ain Shams Univ. (Egypt), Si-Ware Systems (Egypt); Momen Anwar, Si-Ware Systems (Egypt); Diaa A. M. Khalil, Ain Shams Univ. (Egypt), Si-Ware Systems (Egypt)
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Coupled MOEMS membranes for enhanced sensing purposes
Paper 11293-32
Author(s): Andreas Naesby Rasmussen, DFM A/S (Denmark), Aarhus Univ. (Denmark); Sepideh Naserbakht, Aurelien Dantan, Aarhus Univ. (Denmark)
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Molybdenum silicide in infrared emitting devices
Paper 11293-33
Author(s): Julia Baldauf, CiS Forschungsinstitut für Mikrosensorik GmbH (Germany); Rüdiger Schmidt-Grund, Technische Univ. Ilmenau (Germany); Manfred Reiche, Thomas Ortlepp, CiS Forschungsinstitut für Mikrosensorik GmbH (Germany)
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