Photonics West 2022 in San Francisco
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Highly miniaturized optical and photonic systems are at the heart of an increasingly wide spectrum of applications and coalesce a rich expanse of diverse technologies into components and assemblies with exceptionally high functionality yet very compact dimensions.

In fields as diverse as medicine, telecommunications, transportation or consumer electronics, optical and photonic microsystems play an essential enabling role and are poised to become a key technology for areas ranging from LIDAR to medical imaging and diagnostics to advanced displays.

This conference addresses all aspects of optical and photonic microsystems, from materials and fabrication of micro-optical and photonic components, through assembly and packaging, to systems and applications. We invite papers on novel materials as well as new and unconventional fabrication processes for optical and photonic devices; innovative passive optical and active photonic components; and wide-ranging cutting-edge applications for hybrid and integrated optical microsystems.

Typical areas of interest include, but are not limited to:

SYSTEMS AND APPLICATIONS
OPTICAL AND PHOTONIC COMPONENTS AND SUBSYSTEMS
MATERIALS AND FABRICATION FOR MICRO-OPTICAL COMPONENTS
JOINT SESSION with OE402 and OE403
TOPIC: Spatial Light Modulators

Various technologies including MEMS, LCD, lasers, LED, and OLED are under development to build high-performance projection and flat panel display systems. They are needed to provide large display sizes or high light efficiency in comparison to integrated displays for mobile phones, digital cameras, biomedical instruments, and personal digital assistants with ever decreasing size. This special session will give a comprehensive overview about recent development activities and results of the various light modulating technologies from modulating devices to module/system integration for novel applications.

JOINT SESSION with OE402 and BiOS BO103
TOPIC: Endoscopic Microscopy

This special joint session is in conjunction with BiOS conference BO103: Endoscopic Microscopy. Papers are solicited that address the unique challenges to deliver high-fidelity microscopic imaging of tissue with a miniaturized instrument platform. Example topics include mechanisms for distal beam scanning, focus control and aberration correction using MOEMS devices, MEMS actuators or electrowetting optics; proximal scanning based on DMD or other SLM technologies; novel optical assembly and alignment techniques; highly corrected miniature optical systems.

BEST PAPER AWARDS
We are pleased to announce that a cash prize, sponsored by Mirrorcle Technologies, Inc., will be awarded to the best paper and best student paper in MOEMS and Miniaturized Systems. Qualifying papers will be evaluated by the awards committee. Manuscripts will be judged based on scientific merit, impact, and clarity. The winners will be announced during the conference and the presenting authors will be awarded a cash prize.

To be eligible for the Best Paper Award, you must:
  • be listed as an author on an accepted paper within this conference
  • have conducted the majority of the work to be presented
  • submit your manuscript online by the deadline
  • present your paper as scheduled.

To be eligible for the Best Student Paper Award, you must:
  • be a student without a doctoral degree (undergraduate, graduate, or PhD student)
  • submit your abstract online, and select “Yes” when asked if you are a full-time student, and select yourself as the speaker
  • when submitting your abstract, under TOPIC selection, choose “Consider for Best Student Paper Award”
  • be the presenting author on an accepted paper within this conference
  • have conducted the majority of the work to be presented
  • submit your manuscript online by the deadline
  • present your paper as scheduled.
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In progress – view active session
Conference 12013

MOEMS and Miniaturized Systems XXI

24 - 25 January 2022 | Room 307 (Level 3 South)
All sponsors
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View Session ∨
  • OPTO Plenary Session
  • 1: Micro-cameras
  • 2: LIDAR and 3D Imaging
  • 3: Micro-mirrors
  • 4: Scanners
  • 5: Spectrometers
  • 6: Micro-optical components
  • Posters-Wednesday
Information

Presentation times are finalized; please adhere to the schedule

OPTO Plenary Session
24 January 2022 • 8:00 AM - 10:10 AM PST | Room 207/215 (Level 2 South)
8:00 AM: Welcome and Opening Remarks
Ali Adibi, Georgia Institute of Technology (United States)

8:05 AM: Announcement of the IBM-SPIE HBCU Faculty Accelerator Award in Quantum Optics and Photonics
Kayla Lee, IBM Research (USA)
12001-501
Author(s): Hiroshi Amano, Nagoya Univ. (Japan)
24 January 2022 • 8:10 AM - 8:50 AM PST | Room 207/215 (Level 2 South)
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ISAMU AKASAKI, special distinguished professor of Meijo University, and distinguished university professor and emeritus professor of Nagoya University, the pioneer of blue LEDs, and the Nobel Laureate in physics, passed away from pneumonia on Thursday, April 1, 2021 at the age of 92. He was always a real pioneer. He started nitride research in 1967. At that time, blue LED research was an undeveloped area. When he moved from Matsushita Giken Co., Ltd. to Nagoya University in 1981, almost no other organizations attempted to continue with the topic. At that time, the majority of researchers determined that it was very difficult to grow single crystals, and that realizing p-type GaN was impossible. Therefore, many abandoned GaN. According to him, his situation at that time was like “going alone in the wilderness.” Today, the wilderness pioneered by Professor Isamu Akasaki is now a prosperous and fruitful field where many researchers all over the world are gathering and bringing happiness to the people. He liked the term “Frontier Electronics.” In this presentation, in addition to his memorial, today’s frontier electronics will be discussed.
12004-502
Inverse designed integrated photonics (Plenary Presentation)
Author(s): Jelena Vuckovic, Stanford Univ. (United States)
24 January 2022 • 8:50 AM - 9:30 AM PST | Room 207/215 (Level 2 South)
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Despite a great progress in photonics over the past few decades, we are nowhere near the level of integration and complexity in photonic systems that would be comparable to those of electronic circuits, which prevents use of photonics in many applications. This lag in integration scale is in big part a result of how we traditionally design photonics: by combining building blocks from a limited library of known designs, and by manual tuning a few parameters. Unfortunately, the resulting photonic circuits are very sensitive to errors in manufacturing and to environmental instabilities, bulky, and often inefficient. We show how a departure from this old fashioned approach can lead to optimal photonic designs that are much better than state of the art on many metrics (smaller, more efficient, more robust). This departure is enabled by development of inverse design approach and computer software which designs photonic systems by searching through all possible combinations of realistic parameters and geometries. We also show how this inverse design approach can enable new functionalities for photonics, including compact particle accelerators on chip which are 10 thousand times smaller than traditional accelerators, chip-to-chip on on-chip optical interconnects with error free terabit per second communication rates, and quantum technologies.
12017-503
Author(s): Andrea Blanco-Redondo, Nokia Bell Labs. (United States)
24 January 2022 • 9:30 AM - 10:10 AM PST | Room 207/215 (Level 2 South)
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In this talk we will discuss how to engineer the dispersion relation of photonic platforms to provide robust propagation of classical and quantum states of light. In the first part, we will unveil how to leverage the interaction of nonlinearity with higher orders of dispersion to create novel types of solitons, wave packets that propagate unperturbed for long distances. These objects have advantageous energy-width scaling laws with respect to conventional nonlinear Schrodinger solitons and show promise for applications in ultrafast lasers and integrated frequency combs. Subsequently, we will cover recent developments in topological quantum photonics. Topological photonics studies topological phases of light and leverages the appearance of robust topological edge states. We will emphasize our experimental demonstration of nonlinearly generated and topologically protected photon pairs and path-entangled biphoton states in silicon waveguide arrays. Further, we will detail our latest experiments demonstrating entanglement between topologically distinct modes, highlighting topology as an entanglement degree of freedom.
Break
Conference Break 10:10 AM - 1:30 PM
Session 1: Micro-cameras
24 January 2022 • 1:30 PM - 3:20 PM PST | Room 307 (Level 3 South)
Session Chair: David L. Dickensheets, Montana State Univ. (United States)
12013-1
Author(s): Hyun-Kyung Kim, Kisoo Kim, Sang-In Bae, Kyung-Won Jang, Younggil Cha, Ki-Hun Jeong, KAIST (Korea, Republic of)
24 January 2022 • 1:30 PM - 2:00 PM PST | Room 307 (Level 3 South)
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High-speed imaging provides an opportunity to access detailed information in various biomedical fields. However, conventional high-speed cameras still suffer from slow framerates or difficulty to resolve dense information. This study presents a compact ultrafast camera by combining a compound eye camera inspired by the nature insect with an offset array. OFAC is packaged within 10.4 × 8.3 × 1.5 mm3 excluding image sensor boards, and successfully resolves high-temporal image sequences up to 91,200 framerate. The proposed ultrafast compound eye camera will provide new methods to approach miniaturized high-speed biomedical imaging.
12013-3
Author(s): Jaemyeong Kwon, Sang-In Bae, Ki-Hun Jeong, KAIST (Korea, Republic of)
24 January 2022 • 2:00 PM - 2:30 PM PST | Room 307 (Level 3 South)
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Focused light field cameras utilize microlens arrays (MLAs) as an imaging system to obtain spatial and angular information. MLAs are efficiently fabricated by thermal reflow whereas MLAs formed by thermal reflow have relatively small f-numbers, resulting in small depth-of-field. Here we report a focused light field camera with large f-number by incorporation solid immersion MLAs. Solid immersion using PDMS spin coating over conventional MLAs facilitates large-area fabrication of large f-number MLAs using refractive index differences. Solid immersion MLAs extend depth-of-field several times. This method can broaden focused light field camera application range.
12013-4
Author(s): Vinayak Pathak, Duke Univ. (United States); Ridwan Fayaz Hossain, Univ. of Minnesota, Twin Cities (United States); Kevin Zhou, Pavan Chandra Konda, Roarke Horstmeyer, Duke Univ. (United States); Suhasa B. Kodandaramaiah, Univ. of Minnesota, Twin Cities (United States)
24 January 2022 • 2:30 PM - 3:00 PM PST | Room 307 (Level 3 South)
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We develop a curvature dependent camera array system from miniature endoscopic probes for imaging curved surfaces at microscopic resolution These system are useful for capturing large curved FOV (1 cm x1cm) at microscopic resolution (10 um) and serve useful for high-throughput microscopy . Here we specifically formulate a theoretical framework for calculating spatial design parameters to build such systems. We also discuss ways to address resolution-overlap trade-off, feature based magnification mismatch and other design and registration challenges when capturing through these systems.
12013-5
Author(s): Younggil Cha, Kyung-Won Jang, Sang-In Bae, Hyun-Kyung Kim, Ki-Hun Jeong, KAIST (Korea, Republic of)
24 January 2022 • 3:00 PM - 3:20 PM PST | Room 307 (Level 3 South)
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The Tabanidae has a unique eye structure that structural color filter in cornea display advantages for color vision system. The combination of color filter layers and ommatidia can provide the advantages of miniaturization, and multispectral imaging. We report an ultrathin multi-spectral camera inspired by the structure of Tabanidae vision system. The ultrathin multi-spectral camera consists of Fabry-Perot color filter arrays, microlens arrays with chrome aperture, and a CMOS image sensor. The fully packaged camera shows a FWHM under 31nm, a total track length of 1mm. This provides new opportunity for point-of-care testing (POCT) and medical applications.
Session 2: LIDAR and 3D Imaging
24 January 2022 • 3:20 PM - 3:40 PM PST | Room 307 (Level 3 South)
Session Chair: David L. Dickensheets, Montana State Univ. (United States)
12013-7
Author(s): Daniel Lovell, Veljko Milanovic, Abhishek Kasturi, Frank Hu, Karan Soni, Derek Ho, Bryan H. Atwood, Lj Ristic, Mirrorcle Technologies, Inc. (United States); Xiaomeng Liu, Sanjeev J. Koppal, Univ. of Florida (United States)
24 January 2022 • 3:20 PM - 3:40 PM PST | Room 307 (Level 3 South)
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Industry 4.0 and the ongoing Transportation Revolution are driving next-generation advancements in robots and drones, but they demand additional performance to achieve desired autonomous functionality. MEMS mirrors-based sensing and interaction systems designed for robots and drones offer solutions with the lowest power consumption, weight, and cost in high volume. We describe and demonstrate MEMS Mirror-based 3D perception sensing (SyMPL 3D Lidar) and animated visual messaging (Vector Graphics Laser Projection with Playzer) systems optimized for robotics platforms. Furthermore, we show that these systems create new capabilities and functionalities that meet the feature and performance demands of robot vision and human-robot interaction.
Break
Coffee Break 3:40 PM - 4:00 PM
Session 3: Micro-mirrors
25 January 2022 • 9:40 AM - 10:20 AM PST | Room 307 (Level 3 South)
Session Chair: Veljko Milanovic, Mirrorcle Technologies, Inc. (United States)
12013-9
Author(s): Nicolò Boni, Roberto Carminati, Gianluca Mendicino, Massimiliano Merli, Davide Terzi, Borka Lazarova, STMicroelectronics (Italy)
25 January 2022 • 9:40 AM - 10:00 AM PST | Room 307 (Level 3 South)
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In this work, two compact MEMS mirrors with piezoelectric actuation are presented: a 27.5kHz resonant mirror with 1.1mm diameter and 56deg FOV and a quasi-static mirror working at 60Hz with 2.45x1.44mm2 reflective area and 32deg FOV. The working voltage is <40V for both mirrors, keeping the power consumption low (<20mW). To enable the mirror control, diffused piezoresistive sensors in Wheatstone bridge configuration are integrated in both mirrors. In this paper it will be described the working principle of the MEMS designs, the manufacturing process, the FEM simulations and the experimental findings obtained on fabricated samples.
12013-13
Author(s): Yufeng Wang, Gary Li, Qin Zhou, Sergio F. Almeida Loya, Sae Won Lee, Derek Ho, Youmin Wang, DiDi Labs. (United States)
25 January 2022 • 10:00 AM - 10:20 AM PST | Room 307 (Level 3 South)
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Micro-mirror which is capable of steering light at a reasonably high speed, is an important component in MEMS solid-state LiDAR systems. Longer detection range and larger field of view (FOV) are often ideal in many applications, such as autonomous driving, and those aspects can be achieved by increasing the mechanical angle of the micro-mirror as well as the size of the aperture. However, as the aperture and rotational angle (θopt⋅D) get bigger, the dynamic deformation inevitably becomes larger, thus affecting the collimation performance. One potential solution is to add a backside rib support to the mirror which can reduce the dynamic deformation while keeping its moment of inertia low. Conventional backside rib designs are primarily based on intuitive structural patterns, and the design process is time-consuming. Also, the performance improvement is based on trial and error which does not guarantee success in the end. To shed light on an optimized pattern with the focus of large θopt⋅D and low dynamic deformation, in this paper, we propose a piezoelectrically-driven micro-mirror with an optimized backside rib enabled by a particle swarm optimization (PSO) algorithm and iterative FEA modeling. Experimental results show that compared with an intuitive pattern, the automatically-generated pattern can reduce the beam divergence by 30% while keeping the same moment of inertia.
Break
Coffee Break 10:20 AM - 10:50 AM
Session 4: Scanners
25 January 2022 • 10:50 AM - 12:00 PM PST | Room 307 (Level 3 South)
Session Chair: Veljko Milanović, Mirrorcle Technologies, Inc. (United States)
12013-16
Author(s): Andrew D. Oliver, Montana State Univ. (United States); Adam X. Eichhorn, Iowa State Univ. of Science and Technology (United States); Samantha J. Hampshire, David L. Dickensheets, Montana State Univ. (United States)
25 January 2022 • 10:50 AM - 11:10 AM PST | Room 307 (Level 3 South)
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We report a backscanning MEMS mirror that works in conjunction with a conventional galvanometer for use in coherent lidar applications. The backscanning mirror cause the transmitted and reflected pulse to dwell on a target of interest, thus increasing the signal to noise ratio and distance resolution. The mirror has a resonant frequency of 61 kHz and a diameter of 2 mm with angular scan range equivalent to 10 resolvable spots at 780 nm.
12013-17
Author(s): Shuangliang Li, Xiaoyu Duan, Jun Zou, Texas A&M Univ. (United States)
25 January 2022 • 11:10 AM - 11:30 AM PST | Room 307 (Level 3 South)
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This paper reports a new two-axis water-immersible micro scanning mirror (WIMSM) using torsional and bending BoPET (biaxially-oriented polyethylene terephthalate) hinges. A micromachining-based fabrication process is developed to enable high patterning resolution and alignment accuracy and to reduce the amount of manual assembly. With a torsional hinge, the fast axis has a resonance frequency of ~300 Hz in air and ~200 Hz in water. With a bending hinge, the slow axis has a resonance frequency of 60~70 Hz in air and 20~40 Hz in water. 2D B-scan and 3D volumetric ultrasound microscopy are demonstrated by using the hybrid-hinge scanning mirror. The ability of scanning the slow axis at DC or very low frequencies allows a dense raster scanning pattern to be formed for improving both the imaging resolution and field of view.
12013-15
Author(s): Hitesh Gowda Bettaswamy Gowda, Tobias Gräf, Ulrike Wallrabe, Institut für Mikrosystemtechnik, Univ. of Freiburg (Germany)
25 January 2022 • 11:30 AM - 12:00 PM PST | Room 307 (Level 3 South)
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We present a unique approach for 3D scanners using a single optomechanical component, the tunable prism-lens. We co-integrated piezoelectric actuators with a fluid chamber bounded by a movable glass window at the top and a flexible membrane at the bottom. We assembled the four bending actuators in perpendicular orientation to achieve a small footprint and attached their free ends to the top glass window with thin beam plates. Thereby, we gain a large clear aperture of 18 mm at a small footprint of only 20x20x2.5 mm3. The actuators can independently pull or push the glass window at the four corners, leading to a fluid displacement and correspondingly deforming the membrane. A symmetric actuation of all the actuators results in a lens effect, with a tunable focal power range of + 12.5 dpt to -10.5 dpt at a response time of 3.5 ms. Conversely, asymmetric actuation results in a prism effect, with a tunable bi-directional scan angle of ± 1.5° at a response time of 2 ms. Hence, both modes can be combined to achieve a 3-dimensional scan by selective actuation. Our unique single component 3D scanner reduces the size and complexity compared to a conventional mirror-lens setup. In the paper, we present the design, fabrication process, analytical model, and optomechanical characterization.
Break
Lunch/Exhibition Break 12:00 PM - 1:30 PM
Session 5: Spectrometers
25 January 2022 • 1:30 PM - 2:40 PM PST | Room 307 (Level 3 South)
Session Chair: Pei-Yu Eric Chiou, Univ. of California, Los Angeles (United States)
12013-18
Author(s): Don M. J. van Elst, Anne van Klinken, Technische Univ. Eindhoven (Netherlands); Fang Ou, Maurangelo Petruzzella, Technische Univ. Eindhoven (Netherlands), MantiSpectra B.V. (Netherlands); Kaylee D. Hakkel, Francesco Pagliano, René P. J. van Veldhoven, Andrea Fiore, Technische Univ. Eindhoven (Netherlands)
25 January 2022 • 1:30 PM - 2:00 PM PST | Room 307 (Level 3 South)
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We demonstrate a near-infrared (900-1650nm) spectral sensor based on an array of 16 pixels for classifying and quantifying materials and their composition. These pixels consist of resonant-cavity enhanced photodetectors containing a thin absorbing layer, tuning element and cavity. Using a wafer-scale optical lithography process, we achieve a tunable, wavelength-specific response with narrow linewidths of 50nm and high responsivity (R>0.1A/W). The customizability of the response, small-size and robustness make it suitable for portable spectroscopic solutions in a wide variety of applications. The sensing performance is demonstrated on the prediction of moisture in rice with a coefficient of determination of R^2=0.95.
12013-21
Author(s): Jung-Woo Park, Jaehun Jeon, Gi Beom Kim, Ki-Hun Jeong, KAIST (Korea, Republic of)
25 January 2022 • 2:00 PM - 2:20 PM PST | Room 307 (Level 3 South)
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Handheld spectrometers have been reduced in size due to advanced microfabrication processes, but have significantly poor spectral resolution compared to conventional spectrometers. Here we report compact and ultrathin spectrometer that improves optical performances in visible region. Designed spectrometer improves low spectral resolution and high optical sensitivity through the back-reflection grating structure. Spectrometer is fabricated with the ultrathin structure with the overall thickness of 6 mm. With these simple internal optical elements, this compact and ultrathin spectrometer can be utilized in non-invasive biomonitoring sensor.
12013-20
Author(s): Jaehun Jeon, Myeong-Su Ahn, Jung-Woo Park, Gi Beom Kim, Ki-Hun Jeong, KAIST (Korea, Republic of)
25 January 2022 • 2:20 PM - 2:40 PM PST | Room 307 (Level 3 South)
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This paper reports a miniaturized spectrometer with enhanced spectral resolution using electrothermal MEMS grating. The MEMS (Micro-electromechanical systems) grating is fabricated on SOI (Silicon on Insulator) wafer and consists of Aluminum/Silicon bimorph, reflective diffraction grating, entrance and exit slit. The MEMS grating scans and single pixel photodiode detects the diffracted spectral signal. The electrothermal actuation and higly dispersive optics of the MEMS grating provides large stroke with low operation voltage to widen the spectral range, and facilitates enhaced spectral resolution in small volume, respectively. This miniaturized spectrometer will deliver diverse application in various fields by providing accurate on-filed molecular analysis.
Break
Coffee Break 2:40 PM - 3:10 PM
Session 6: Micro-optical components
25 January 2022 • 3:10 PM - 3:50 PM PST | Room 307 (Level 3 South)
Session Chair: David G. Lishan, Plasma-Therm LLC (United States)
12013-22
Author(s): Jay L. Christopher, Peter W. Tinning, Deepak Uttamchandani, Ralf Bauer, Univ. of Strathclyde (United Kingdom)
25 January 2022 • 3:10 PM - 3:30 PM PST | Room 307 (Level 3 South)
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The application of 3D printing in biomedical optical systems has the potential to reduce system costs and deliver state-of-the-art imaging systems in low resource settings. We will present the results of using a commercially available stereolithography printer for the fabrication of optical components and microlenses, which will be used in a custom miniaturized structured illumination microscopy (SIM) setup incorporating additional active optical MEMS devices for control of the optical beam paths. We show the full characterization of the 3D-printed elements and evaluate their performance in the overall microscopy system.
12013-31
Author(s): Wioletta Trzpil, Roman Rousseau, Diba Ayache, Julien Charensol, Aurore Vicet, Michael Bahriz, Institut d'Électronique et des Systèmes (France)
25 January 2022 • 3:30 PM - 3:50 PM PST | Room 307 (Level 3 South)
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Quartz-enhanced photoacoustic spectroscopy (QEPAS) is one of the most efficient ways to obtain sensitive, selective, robust gas sensors, where the signal can be given with a fast response and measured continuously. The main drawback of QEPAS comes from using a quartz tuning fork (QTF) as a mechanical transducer. QTF is not designed for photoacoustic gas sensing, and its further integration is limited. We propose a silicon resonant MEMS based on a capacitive transduction mechanism with a limit of detection comparable to that of a QTF. This sensor is potentially an efficient sound wave transducer that can advantageously replace a QTF
Posters-Wednesday
26 January 2022 • 6:00 PM - 8:00 PM PST | Moscone West, Lobby (Level 3)
Conference attendees are invited to attend the OPTO poster session on Wednesday evening. Come view the posters, enjoy light refreshments, ask questions, and network with colleagues in your field.

Poster Setup: Wednesday 10:00 AM – 5:00 PM
View poster presentation guidelines and set-up instructions at
https://spie.org/PW/Poster-Guidelines
Conference Chair
Univ. of Freiburg (Germany)
Conference Chair
King Mongkut's Institute of Technology Ladkrabang (Thailand), Michigan State Univ. (United States)
Conference Chair
KAIST (Korea, Republic of)
Program Committee
Univ. of Freiburg (Germany)
Program Committee
Robert Brunner
Ernst-Abbe-Hochschule Jena (Germany)
Program Committee
Pei-Yu Eric Chiou
Univ. of California, Los Angeles (United States)
Program Committee
Montana State Univ. (United States)
Program Committee
Fraunhofer-Institut für Photonische Mikrosysteme IPMS (Germany)
Program Committee
OQmented GmbH (Germany)
Program Committee
KAIST (Korea, Republic of)
Program Committee
Si-Ware Systems (Egypt)
Program Committee
David G. Lishan
Plasma-Therm LLC (United States)
Program Committee
Mirrorcle Technologies, Inc. (United States)
Program Committee
Polytechnique Montréal (Canada)
Program Committee
Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Program Committee
Aalto Univ. (Finland)
Program Committee
Northumbria Univ. (United Kingdom)
Program Committee
Lab. d'Astrophysique de Marseille (France)
Program Committee
National Univ. of Singapore (Singapore)
Additional Information

POST-DEADLINE ABSTRACT SUBMISSIONS

  • Submissions are accepted through 06-December
  • Notification of acceptance by 20-December

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