The Moscone Center
San Francisco, California, United States
2 - 7 February 2019
Conference 10905
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
Monday - Wednesday 4 - 6 February 2019
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Program Committee continued...
Monday 4 February Show All Abstracts
Session 1:
Laser Processing Based on Pulse Width and Pulse Train Arrangement Techniques
Monday 4 February 2019
9:00 AM - 10:10 AM
Location: Room 104 (Lower Level South)
Session Chair:
Gediminas Račiukaitis, Ctr. for Physical Sciences and Technology (Lithuania)
Laser material processing in the ablation-cooled regime: Ablation efficiency and quality using single fs-, bursts of fs-, and single ns-pulses (Invited Paper)
Paper 10905-1
Time: 9:00 AM - 9:30 AM
Author(s): Matthias Domke, Sandra Stroj, FH Vorarlberg (Austria); Victor Matylitsky, Spectra-Physics Rankweil (Austria)
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Laser machining of silicon with bursts of ultra-short laser pulses: Factors influencing the process efficiency and surface quality
Paper 10905-2
Time: 9:30 AM - 9:50 AM
Author(s): Beat Neuenschwander, Stefan M. Remund, Thorsten Kramer, Berner Fachhochschule Technik und Informatik (Switzerland)
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Influence of pulse duration in the pico- and femtosecond regime on the absorptance and specific removal rate
Paper 10905-3
Time: 9:50 AM - 10:10 AM
Author(s): Stefan M. Remund, Berner Fachhochschule Technik und Informatik (Switzerland); Andreas Michalowski, Franziska Bauer, Robert Bosch GmbH (Germany); Yiming Zhang, Beat Neuenschwander, Berner Fachhochschule Technik und Informatik (Switzerland)
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Coffee Break 10:10 AM - 10:40 AM
Session 2:
Direct Writing
Monday 4 February 2019
10:40 AM - 12:10 PM
Location: Room 104 (Lower Level South)
Session Chair:
Craig B. Arnold, Princeton Univ. (United States)
Integrating soft materials and metal microstructures by femtosecond laser processing (Invited Paper)
Paper 10905-4
Time: 10:40 AM - 11:10 AM
Author(s): Mitsuhiro Terakawa, Yasutaka Nakajima, Manan Machida, Shuichiro Hayashi, Akito Katayama, Keio Univ. (Japan); Oliver Suttmann, Laser Zentrum Hannover e.V. (Germany); Nikolay Nedyalkov, Bulgarian Academy of Sciences (Bulgaria); Alexander Heisterkamp, Leibniz Univ. Hannover (Germany)
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Direct laser writing of photonic crystal spatial filters using Gaussian and Bessel beams
Paper 10905-5
Time: 11:10 AM - 11:30 AM
Author(s): Vytautas Purlys, Darius Gailevičius, Vilnius Univ. (Lithuania), Femtika (Lithuania); Martynas Peckus, Roaldas Gadonas, Vilnius Univ. (Lithuania); Kestutis Staliunas, Univ. Politècnica de Catalunya (Spain), Institució Catalana de Recerca i Estudis Avançats (Spain)
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Femtosecond laser writing of multi-level binary DOE in fused silica by slicing simulated phase distribution
Paper 10905-6
Time: 11:30 AM - 11:50 AM
Author(s): Valdemar Stankevič, Ctr. for Physical Sciences and Technology (Lithuania), ELAS, Ltd. (Lithuania); Mindaugas Gedvilas, Jonas Karosas, Gediminas Račiukaitis, Ctr. for Physical Sciences and Technology (Lithuania)
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Acousto-optofluidics for high-throughput laser processing
Paper 10905-7
Time: 11:50 AM - 12:10 PM
Author(s): Marti Duocastella, Salvatore Surdo, Alberto Diaspro, Istituto Italiano di Tecnologia (Italy)
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Lunch Break 12:10 PM - 1:40 PM
Session 3:
Laser Processing Based on Beam Shaping Techniques
Monday 4 February 2019
1:40 PM - 3:00 PM
Location: Room 104 (Lower Level South)
Session Chair:
Heinz P. Huber, Hochschule für Angewandte Wissenschaften München (Germany)
Simulation of laser micro-machining with tunable acoustic gradient of refractive index lens (TAG lens) as an ultrafast z-scanner
Paper 10905-8
Time: 1:40 PM - 2:00 PM
Author(s): Xiaohan Du, SeungYeon Kang, Craig B. Arnold, Princeton Univ. (United States)
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Exploring the efficiency of laser materials processing with tunable acoustic gradient (TAG) lens
Paper 10905-9
Time: 2:00 PM - 2:20 PM
Author(s): SeungYeon Kang, Xiaohan Du, Craig B. Arnold, Princeton Univ. (United States)
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Flexible femtosecond processing with programmable light modulators
Paper 10905-10
Time: 2:20 PM - 2:40 PM
Author(s): Eric Audouard, Eric Mottay, Martin Delaigue, Axel Chambinaud, Konstantin Mishchik, Clemens Hönninger, Amplitude Systèmes (France); Benjamin Dusser, Yoan Di Maio, Sébastien Landon, QiOVA (France)
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Processing with femtosecond lasers by using multi-plane light conversion beam shaping technique
Paper 10905-11
Time: 2:40 PM - 3:00 PM
Author(s): Konstantin Mishchik, Eric Audouard, Eric Mottay, Clemens Hönninger, Amplitude Systèmes (France); Clément Jacquard, Lionel Garcia, Guillaume Labroille, Jean-François Morizur, CAILabs (France)
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Coffee Break 3:00 PM - 3:30 PM
Session Plen:
LASE Plenary Session
Monday 4 February 2019
3:30 PM - 5:40 PM
Location: Room 207/215 (South Level Two)

3:30 pm: Welcome and Opening Remarks
Beat Neuenschwander, Berner Fachhochschule Technik und Informatik (Switzerland) and Xianfan Xu, Purdue Univ. (United States)

3:35 pm: Announcement of the 3D Printing, Fabrication, and Manufacturing Best Paper Award
Henry Helvajian, The Aerospace Corp. (United States)
Cassini’s Grand Finale: Going Out in a Blaze of Glory (Plenary Presentation)
Paper 10910-101
Time: 3:40 PM - 4:20 PM
Author(s): Earl H. Maize, Jet Propulsion Lab. (United States)
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Quarter Century Development of Laser Peening and Recent Strides toward Expansion of Applications (Plenary Presentation)
Paper 10911-102
Time: 4:20 PM - 5:00 PM
Author(s): Yuji Sano, ImPACT (Japan)
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High Power Laser Diodes: Improvements in Power, Efficiency, and Brilliance (Plenary Presentation)
Paper 10900-103
Time: 5:00 PM - 5:40 PM
Author(s): Günther Tränkle, Ferdinand-Braun-Institut (Germany)
Show Abstract
Tuesday 5 February Show All Abstracts
Session 4:
Frontier in Laser Micromachining
Tuesday 5 February 2019
8:00 AM - 10:20 AM
Location: Room 104 (Lower Level South)
Session Chair:
Andrei V. Rode, The Australian National Univ. (Australia)
Laser grooving of multi stack material modeling: Implementation of a high accuracy tool for laser-grooving and dicing application
Paper 10905-12
Time: 8:00 AM - 8:20 AM
Author(s): Jeff Moussodji, Univ. de Sherbrooke (Canada), IBM Canada Ltd. (Canada), Ctr. de Collaboration MiQro Innovation (C2MI) (Canada); Dominique Drouin, Univ. de Sherbrooke (Canada); Oswaldo Chacon, Francis Santerre, IBM Canada Ltd. (Canada)
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Modifications of surface topography by acoustic resonance induced by laser ablation with ultrashort laser pulses
Paper 10905-13
Time: 8:20 AM - 8:40 AM
Author(s): Gerhard Kunz, Alexander Kroschel, Tobias Menold, Andreas Michalowski, Mawuli Ametowobla, Robert Bosch GmbH (Germany)
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Selective etching of ultrafast laser modified sapphire
Paper 10905-14
Time: 8:40 AM - 9:00 AM
Author(s): Myriam Kaiser, Malte Kumkar, Roman Priester, Jonas Kleiner, Michael Jenne, Daniel Flamm, Felix Zimmermann, TRUMPF Laser- und Systemtechnik GmbH (Germany)
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Glass processing techniques: Mechanical versus laser-based
Paper 10905-15
Time: 9:00 AM - 9:20 AM
Author(s): Juozas Dudutis, Rokas Stonys, Eimantas Daknys, Gediminas Račiukaitis, Paulius Gečys, Ctr. for Physical Sciences and Technology (Lithuania)
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Glass drilling using ultrafast pulses with variable delay in the femtosecond and picosecond range
Paper 10905-16
Time: 9:20 AM - 9:40 AM
Author(s): Kevin Gaudfrin, ALPhANOV (France), Univ. Bordeaux (France), Ctr. Lasers Intenses et Applications (France); John Lopez, Guillaume Duchateau, Univ. de Bordeaux (France), Ctr. Lasers Intenses et Applications (France); Rainer Kling, ALPhANOV (France); Konstantin Mishchik, Amplitude Systèmes (France)
Show Abstract
Ultrafast lasers for advanced manufacturing of flat panel displays
Paper 10905-17
Time: 9:40 AM - 10:00 AM
Author(s): Jim Bovatsek, Terence Hollister, Spectra-Physics, a division of MKS Instruments (United States); Herman Chui, Spectra-Physics, a division of MKS Instruments (United States)
Show Abstract
Micro-processing in the ultraviolet: UV laser applications in manufacturing consumer electronics
Paper 10905-18
Time: 10:00 AM - 10:20 AM
Author(s): Ulf Quentin, Florian Kanal, TRUMPF Laser- und Systemtechnik GmbH (Germany); Dirk Sutter, Christian Stolzenburg, TRUMPF Laser GmbH (Germany)
Show Abstract
Coffee Break 10:20 AM - 10:50 AM
Session 5:
Laser-Induced Forward Transfer
Tuesday 5 February 2019
10:50 AM - 12:10 PM
Location: Room 104 (Lower Level South)
Session Chair:
Jie Qiao, Rochester Institute of Technology (United States)
Reusable laser-absorbing layers for LIFT
Paper 10905-19
Time: 10:50 AM - 11:10 AM
Author(s): Alberto Piqué, Kristin M. Charipar, U.S. Naval Research Lab. (United States); Rubén E. Diaz-Rivera, Nerida H. De Jesus-Villanueva, Univ. de Puerto Rico Mayagüez (United States); Raymond C. Y. Auyeung, Nicholas A. Charipar, U.S. Naval Research Lab. (United States)
Show Abstract
Increasing the resolution of the Laser-Induced Forward Transfer using flow-focusing
Paper 10905-20
Time: 11:10 AM - 11:30 AM
Author(s): Emre Turkoz, SeungYeon Kang, Xiaohan Du, Luc Deike, Craig B. Arnold, Princeton Univ. (United States)
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Laser-Induced Forward Transfer of silver based pastes for metallization of photovoltaic devices
Paper 10905-21
Time: 11:30 AM - 11:50 AM
Author(s): David Canteli, David Munoz-Martin, Miguel Morales, Sara Lauzurica, Juan Jose Moreno, Andrés Márquez, Miguel Gómez-Fontela, Carlos Molpeceres, Univ. Politécnica de Madrid (Spain)
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Laser-Induced Forward Transfer of bioactive apatite immobilizing proteins
Paper 10905-22
Time: 11:50 AM - 12:10 PM
Author(s): Aiko Narazaki, Ryozo Kurosaki, Tomoko Kameyama, Ikuko Sakamaki, Hiroko Araki, Ayako Oyane, National Institute of Advanced Industrial Science and Technology (Japan); Hirofumi Miyaji, Hokkaido Univ. (Japan)
Show Abstract
Lunch/Exhibition Break 12:10 PM - 1:40 PM
Session 6:
Fundamental Aspects of Laser-Materials Interaction I
Tuesday 5 February 2019
1:40 PM - 3:20 PM
Location: Room 104 (Lower Level South)
Session Chair:
Beat Neuenschwander, Berner Fachhochschule Technik und Informatik (Switzerland)
Study of fs laser-induced plasma formation in solid dielectrics with the help of low-order high harmonic emission (Invited Paper)
Paper 10905-23
Time: 1:40 PM - 2:10 PM
Author(s): Alexandre Mermillod-Blondin, Peter Jürgens, Tobias Witting, Mikhail Ivanov, Marc J. J. Vrakking, Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie (Germany)
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Ultrafast dynamics of the photo-induced phase transition in vanadium dioxide (Invited Paper)
Paper 10905-24
Time: 2:10 PM - 2:40 PM
Author(s): Richard F. Haglund, Sharon M. Weiss, Vanderbilt Univ. (United States)
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Advanced oxide thin films produced by excimer laser-assisted metal organic compound (ELAMOD)
Paper 10905-25
Time: 2:40 PM - 3:00 PM
Author(s): Tetsuo Tsuchiya, National Institute of Advanced Industrial Science and Technology (Japan)
Show Abstract
Third-order nonlinear optical characterization of fs-laser micromachined waveguides in Gorilla Glass
Paper 10905-26
Time: 3:00 PM - 3:20 PM
Author(s): Cleber R. Mendonça, Franciele Henrique, Gustavo Almeida, Renato Martins, Ramon Rosa, Jonathas Siqueira, Marcelo Andrade, Instituto de Física de São Carlos (Brazil)
Show Abstract
Coffee Break 3:20 PM - 3:50 PM
Session 7:
Fundamental Aspects of Laser-Materials Interaction II
Tuesday 5 February 2019
3:50 PM - 5:10 PM
Location: Room 104 (Lower Level South)
Session Chair:
Carlos Molpeceres, Univ. Politécnica de Madrid (Spain)
Nonlinear optical dynamics in femtosecond laser processing of silicon waveguides
Paper 10905-27
Time: 3:50 PM - 4:10 PM
Author(s): Jie Qiao, Francisco R. Arteaga-Sierra, Rochester Institute of Technology (United States)
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Dynamics of different ablation regimes during femtosecond laser processing of silicon
Paper 10905-28
Time: 4:10 PM - 4:30 PM
Author(s): Jie Qiao, Tao Feng, Rochester Institute of Technology (United States)
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Silica nano-ablation mechanism under irradiation with nanosecond EUV radiation
Paper 10905-29
Time: 4:30 PM - 4:50 PM
Author(s): Tetsuya Makimura, Shuichi Torii, Univ. of Tsukuba (Japan); Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)
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Surface ablation by soft x-ray laser pulse for EUV nano-scale fabrication
Paper 10905-30
Time: 4:50 PM - 5:10 PM
Author(s): Masaharu Nishikino, Masahiko Ishino, Thanh Hung Dinh, Noboru Hasegawa, National Institutes for Quantum and Radiological Science and Technology (Japan); Kazuyuki Sakaue, Waseda Univ. (Japan); Takeshi Higashiguchi, Utsumomiya Univ. (Japan); Masakazu Washio, Waseda Univ. (Japan); Hiroo Kinoshita, Univ. of Hyogo (Japan)
Show Abstract
Session PTue:
Posters-Tuesday
Tuesday 5 February 2019
6:00 PM - 8:00 PM
Location: Marriott Marquis Hotel, Golden Gate Ballroom

Conference attendees are invited to attend the LASE poster session on Tuesday evening. Come view the posters, enjoy light refreshments, ask questions, and network with colleagues in your field.

Poster Setup: Tuesday 10:00 AM – 5:00 PM
View poster presentation guidelines and set-up instructions at
http://spie.org/PWPosterGuidelines
Femtosecond laser direct writing of SiC on PDMS for strain sensing
Paper 10905-43
Time: 6:00 PM - 8:00 PM
Author(s): Shuichiro Hayashi, Yasutaka Nakajima, Mitsuhiro Terakawa, Keio Univ. (Japan)
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Enhanced ablation using GHz-pulsed fsec laser
Paper 10905-44
Time: 6:00 PM - 8:00 PM
Author(s): Hidetomo Takahashi, Mariko Yamaguchi, Jingzhou Xu, Sami T. Hendow, IMRA America, Inc. (United States)
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Evaluation of surface processing efficiency with powerful ultrashort pulse lasers for large-scale industrial applications
Paper 10905-45
Time: 6:00 PM - 8:00 PM
Author(s): Victoria Zinnecker, Christopher Stokes-Griffin, Paul Compston, Stephen Madden, Andrei V. Rode, The Australian National Univ. (Australia)
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Development of soft x-ray laser irradiation beamline for ablation and damage study
Paper 10905-46
Time: 6:00 PM - 8:00 PM
Author(s): Masahiko Ishino, Thanh Hung Dinh, Noboru Hasegawa, National Institutes for Quantum and Radiological Science and Technology (Japan); Kazuyuki Sakaue, Waseda Univ. (Japan); Takeshi Higashiguchi, Utsunomiya Univ. (Japan); Satoshi Ichimaru, Masatoshi Hatayama, NTT Advanced Technology Corp. (Japan); Masakazu Washio, Waseda Univ. (Japan); Masaharu Nishikino, National Institutes for Quantum and Radiological Science and Technology (Japan)
Show Abstract
Study of the dynamics of the femto-second laser ablation by using the soft x-ray laser probe in QST
Paper 10905-47
Time: 6:00 PM - 8:00 PM
Author(s): Noboru Hasegawa, National Institutes for Quantum and Radiological Science and Technology (Japan)
Show Abstract
Wednesday 6 February Show All Abstracts
Session 8:
Materials Synthesis and Fabrication I
Wednesday 6 February 2019
8:30 AM - 10:10 AM
Location: Room 104 (Lower Level South)
Session Chair:
Costas P. Grigoropoulos, Univ. of California, Berkeley (United States)
Laser micro-processing of ceramic glasses by ultra-short laser pulses (Invited Paper)
Paper 10905-31
Time: 8:30 AM - 9:00 AM
Author(s): Florian Senn, Ronald Holtz, Institute for Product and Production Engineering (Switzerland); Sonja-Michaela Gross-Barsnick, Forschungszentrum Jülich GmbH (Germany); Uwe Reisgen, RWTH Aachen Univ. (Germany)
Show Abstract
Laser induced crystal defects in monocrystalline silicon
Paper 10905-32
Time: 9:00 AM - 9:20 AM
Author(s): Tobias Menold, Mawuli Ametowobla, Robert Bosch GmbH (Germany); Kathrin Ohmer , Univ. Stuttgart (Germany); Jürgen Köhler , Univ. of Stuttgart (Germany); Jürgen Werner, Univ. Stuttgart (Germany)
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Laser-induced local activation of Mg-doped GaN and AlGaN for high power vertical devices (Invited Paper)
Paper 10905-33
Time: 9:20 AM - 9:50 AM
Author(s): Noriko Kurose, Ritsumeikan Univ. (Japan); Naotaka Iwata, Itaru Kamiya, Toyota Technological Institute (Japan); Yoshinobu Aoyagi, Ritsumeikan Univ. (Japan)
Show Abstract
Low-temperature, high-concentration laser doping of 4H-SiC for low contact resistance
Paper 10905-34
Time: 9:50 AM - 10:10 AM
Author(s): Kikuchi Toshifumi, Kaname Imokawa, Kyushu Univ. (Japan); Akihiro Ikeda, Sojo Univ. (Japan); Daisuke Nakamura, Tanemasa Asano, Hiroshi Ikenoue, Kyushu Univ. (Japan)
Show Abstract
Coffee Break 10:10 AM - 10:40 AM
Session 9:
Materials Synthesis and Fabrication II
Wednesday 6 February 2019
10:40 AM - 12:10 PM
Location: Room 104 (Lower Level South)
Session Chair:
Tetsuya Makimura, Univ. of Tsukuba (Japan)
Fabrication of multicomponent semiconductor microspheres by laser ablation in air
Paper 10905-35
Time: 10:40 AM - 11:00 AM
Author(s): Daisuke Nakamura, Yuichiro Wakiyama, Hiroki Oshima, Mitsuhiro Higashihata, Hiroshi Ikenoue, Kyushu Univ. (Japan); Nilesh J. Vasa, M. S. Ramachandra Rao, Indian Institute of Technology Madras (India)
Show Abstract
Synthesis of Fe@FeOx particles by laser ablation and their phase transition induced by laser irradiation
Paper 10905-36
Time: 11:00 AM - 11:20 AM
Author(s): Dongshi Zhang, Koji Sugioka, RIKEN (Japan)
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Direct writing of Cu-based flexible thermal detectors using femtosecond laser-induced reduction (Invited Paper)
Paper 10905-37
Time: 11:20 AM - 11:50 AM
Author(s): Mizue Mizoshiri, Nagaoka Univ. of Technology (Japan)
Show Abstract
Fabrication of Ni-based transparent flexible conductors by laser direct patterning and its applications
Paper 10905-38
Time: 11:50 AM - 12:10 PM
Author(s): Daeho Lee, Vu Binh Nam, Gachon Univ. (Korea, Republic of); Costas Grigoropoulos, Univ. of California, Berkeley (United States)
Show Abstract
Lunch/Exhibition Break 12:10 PM - 1:40 PM
Session 10:
Nanoscale Processing
Wednesday 6 February 2019
1:40 PM - 3:40 PM
Location: Room 104 (Lower Level South)
Session Chair:
Tetsuya Makimura, Univ. of Tsukuba (Japan)
Focused laser spike (FLaSk) thermocapillary patterning of micro/nanostructures (Invited Paper)
Paper 10905-39
Time: 1:40 PM - 2:10 PM
Author(s): Jonathan P. Singer, Rutgers, The State Univ. of New Jersey (United States)
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Quantum optical lithography at 3 nm resolution
Paper 10905-40
Time: 2:10 PM - 2:30 PM
Author(s): Eugen Pavel, Storex Technologies Inc. (Romania)
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Direct laser writing of liquid metal grids for visually imperceptible stretchable electronics
Paper 10905-41
Time: 2:30 PM - 2:50 PM
Author(s): Kitty Kumar, Chengfeng Pan, Erik J. Markvicka, Carnegie Mellon Univ. (United States); Jianzhao Li, Peter R. Herman, Univ. of Toronto (Canada); Carmel Majidi, Carnegie Mellon Univ. (United States)
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Laser ablation in liquids: Fundamentals and applications (Invited Paper)
Paper 10905-42
Time: 2:50 PM - 3:20 PM
Author(s): Bilal Gökce, René Streubel, Tim Hupfeld, Stephan Barcikowski, Univ. Duisburg-Essen (Germany)
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Sacrificial-layer free laser-induced forward transfer of mammalian cells
Paper 10905-48
Time: 3:20 PM - 3:40 PM
Author(s): Jun Zhang, Hochschule für Angewandte Wissenschaften München (Germany), Univ. of Munich (Germany), Klinik und Poliklinik für Unfallchirurgie (Germany); Bastian Hartmann, Julian Siegel, Gabriele Marchi, Hochschule für Angewandte Wissenschaften München (Germany); Hauke Clausen-Schaumann, Stefanie Sudhop, Hochschule für Angewandte Wissenschaften München (Germany), Univ. of Munich (Germany); Heinz P. Huber, Hochschule für Angewandte Wissenschaften München (Germany)
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Announcement of LAMOM Award Winners
Wednesday 6 February 2019
3:40 PM - 3:50 PM
Location: Room 104 (Lower Level South)

Presented by Tetsuya Makimura, Univ. of Tsukuba (Japan)

Award Sponsors:
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