The Moscone Center
San Francisco, California, United States
2 - 7 February 2013
Conference 8616
MOEMS and Miniaturized Systems XII
Monday - Wednesday 4 - 6 February 2013
Important
Dates
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Abstract Due:
23 July 2012

Author Notification:
1 October 2012

Manuscript Due Date:
7 January 2013

Conference
Committee
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Monday 4 February Show All Abstracts
MOEMS-MEMS Plenary Session
Monday 4 February 2013
9:00 AM - 12:00 PM
Location: 307 (Esplanade)

Welcome and Announcement of MOEMS-MEMS Best Paper Award and Best Student Paper Award
Harald Schenk, Fraunhofer Institute for Photonic Microsystems (Germany); David L. Dickensheets, Montana State Univ. (USA)
Towards future systems with nano-optics contributions (Plenary Presentation)
Paper 8616-101
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MOEMS pressure sensors for geothermal well monitoring (Plenary Presentation)
Paper 8616-102
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Superaligned Carbon Nanotubes: A Road Toward Real Applications (Plenary Presentation)
Paper 8614-103
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Session 1:
Microscopy: Joint Session with Conferences 8616 and 8575
Monday 4 February 2013
1:30 PM - 4:40 PM
Location: 304 (Esplanade)
Achromatic surgical MEMS-based dual-axis confocal microscope for delineation of brain tumor margins
Paper 8575-28
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Handheld multispectral dual-axis confocal microscope for cervical cancer screening
Paper 8575-30
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Vertical cross-sectional imaging by multi-color handheld dual-axes confocal microscope
Paper 8575-31
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Optical probe design with extended depth-of-focus for optical coherence microscopy and optical coherence tomography
Paper 8616-1
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3D micro-optical lens scanner made by multi-wafer bonding technology
Paper 8616-2
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Electrostatic MEMS resonating micro-polygonal scanner for circumferential endoscopic bio-imaging
Paper 8616-3
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A water-immersible two-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications
Paper 8616-4
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Tuesday 5 February Show All Abstracts
Session 2:
Microscanner I
Tuesday 5 February 2013
8:20 AM - 10:10 AM
Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera (Invited Paper)
Paper 8616-5
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Close-loop controlled stainless steel scanner based hyperspectral confocal laser scanning imaging with scanning status monitoring
Paper 8616-6
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Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode
Paper 8616-7
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Thin-film PZT actuated vertical translational microscanner stage
Paper 8616-8
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Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
Paper 8616-9
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Session 3:
Microscanner II
Tuesday 5 February 2013
10:40 AM - 12:10 PM
Position sensing and tracking with quasistatic MEMS mirrors (Invited Paper)
Paper 8616-11
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Aluminum nitride supported 1D micromirror with static rotation angle >11°
Paper 8616-12
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Wide steering angle microscanner based on curved surface
Paper 8616-13
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SOI based electromagnetic MEMS scanners and applications in laser systems
Paper 8616-14
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Session 4:
Spatial Light Modulator: Joint Session with Conferences 8616 and 8618
Tuesday 5 February 2013
1:30 PM - 3:20 PM
Location: 307 (Esplanade)
Arrayed beam steering device for advanced 3D displays (Invited Paper)
Paper 8616-15
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2D electrostatic micromirror array with high field factor for high-power application
Paper 8616-16
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Fabrication of vertical moving micro-optical switch for display applications
Paper 8616-17
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Development of a fully programmable MEMS diffraction grating
Paper 8616-18
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Additive manufacturing of photopolymers using the Texas Instruments DLP lightcrafter
Paper 8618-9
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Session 5:
Microspectrometer and Optical Filters
Tuesday 5 February 2013
3:50 PM - 6:10 PM
Design and characterization of a hybrid-integrated MEMS scanning grating spectrometer (Invited Paper)
Paper 8616-19
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SWIFTS: a groundbreaking integrated technology for high-performance spectroscopy and optical sensors (Invited Paper)
Paper 8616-20
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Fabrication and evaluation of a 500 W cladding-light stripper
Paper 8616-21
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Spatial beam splitting for fully integrated MEMS interferometer
Paper 8616-22
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In-plane diffraction loss free optical cavity using coated optical fiber and silicon micromachined spherical mirror
Paper 8616-23
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A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator
Paper 8616-24
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Session PTue:
Poster Session
Tuesday 5 February 2013
6:00 PM - 8:00 PM
Location: 103 (Exhibit Hall)

Conference attendees are invited to attend the MOEMS-MEMS poster session on Tuesday evening. Come view the posters, enjoy light refreshments, ask questions, and network with colleagues in your field. Authors of poster papers will be present to answer questions concerning their papers. Attendees are required to wear their conference registration badges to the poster sessions. Poster authors, view poster presentation guidelines and set-up instructions at http://spie.org/PWPosterGuidelines.
Closed-loop control driver for quasi-static MOEMS mirrors
Paper 8616-45
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Wednesday 6 February Show All Abstracts
Session 6:
MOEMS Components and Systems I
Wednesday 6 February 2013
8:20 AM - 10:10 AM
Compact holographic printer using RGB waveguide holographic optical elements (Invited Paper)
Paper 8616-25
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Design and simulation techniques for shaping light using diffractive diffusers and grating cells arrays
Paper 8616-26
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Innovative approach to high stroke electrostatic actuators
Paper 8616-27
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Tunable MEMS diffraction gratings with improved displacement profile of the fixed-fixed beams
Paper 8616-28
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Optimization of biogas production using MEMS based near infrared inline-sensor
Paper 8616-30
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Session 7:
MOEMS Components and Systems II
Wednesday 6 February 2013
10:40 AM - 12:10 PM
Integrated photonic and plasmonic MEMS and NEMS with high optomechanical coupling (Invited Paper)
Paper 8616-31
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InGaAsP optical device integration on SOI platform by Ar/O2 plasma assisted bonding
Paper 8616-32
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A new fabrication method for nano-gratings based on the high flexibility of PDMS
Paper 8616-33
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Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology
Paper 8616-34
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Session 8:
Microlenses and Microlens Arrays
Wednesday 6 February 2013
2:00 PM - 3:30 PM
Development of adaptive liquid microlenses and microlens arrays
Paper 8616-35
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Tunable cylindrical microlenses based on aluminum nitride membranes
Paper 8616-37
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Liquid lens based on electrowetting: actual developments on larger aperture and multiple electrodes design for image stabilization or beam steering
Paper 8616-38
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The fabrication of out of plane aspherical microlens arrays
Paper 8616-39
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Session 9:
Imaging
Wednesday 6 February 2013
4:00 PM - 5:50 PM
MOEMS-based time-of-flight camera for 3D video capturing (Invited Paper)
Paper 8616-40
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Simultaneous multispectral imaging using lenslet arrays
Paper 8616-41
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Batch fabrication of micro-optical sensing and imaging devices
Paper 8616-42
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Diffraction and photometric limits in today's miniature digital camera systems
Paper 8616-43
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Optical MEMS in space instruments for Earth observation and astronomy
Paper 8616-44
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