Author(s): Kenji Tanibe, Kazuya Yamamoto, Nalux Co., Ltd. (Japan); Hiroshi Owari, Seichro Kitagawa, Nalux Co. (Japan)
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Lately, anti-reflection effect by sub-wavelength structure on optical lens surface is studied widely. This is called ARS, Anti-Reflective Structure. ARS has low dependence on incident angle of light.
We tried to fabricate ARS on plastic lens surface by Reactive Ion Etching. Controlling plasma condition at each etching process cleverly, we successfully obtained fine ARS on optical lens surface. The structure has high aspect and narrow pitch which is about 0.1μm, and show good anti-reflective property.