Hotel Alimara
Barcelona, Spain
8 - 10 May 2017
Conference 10246
Smart Sensors, Actuators, and MEMS VIII
Monday - Thursday 8 - 11 May 2017
Conference
Committee
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Monday 8 May Show All Abstracts
Session Plen:
Monday Plenary Session
Monday 8 May 2017
8:50 AM - 10:00 AM

8:50:
Opening Remarks: Ulrich Schmid, Technische Univ. Wien (Austria)

8:55:
Welcome: Carles Cané, Ctr. Nacional de Microelectronica (Spain)
Smart integrated microsystems: the energy efficiency challenge (Plenary Presentation) (Plenary Presentation)
Paper 10248-501
Time: 9:00 AM - 10:00 AM
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Coffee Break 10:00 AM - 10:30 AM
Session 1:
Modeling and Simulation I
Monday 8 May 2017
10:30 AM - 12:10 PM
Multiscale numerical study on ferroelectric nonlinear response of PZT thin films (Conference Presentation)
Paper 10246-1
Time: 10:30 AM - 10:50 AM
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Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators
Paper 10246-2
Time: 10:50 AM - 11:10 AM
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Optimization of a Piezo-fiber scanning architecture
(Canceled)
Paper 10246-3
Time: 11:10 AM - 11:30 AM
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Optimal design of a microgripper-type actuator based on AlN/Si heterogeneous bimorph
Paper 10246-4
Time: 11:30 AM - 11:50 AM
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Topologically optimised flexure hinge based XY stage
Paper 10246-5
Time: 11:50 AM - 12:10 PM
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Lunch Break 12:10 PM - 1:40 PM
Session 2:
Modeling and Simulation II
Monday 8 May 2017
1:40 PM - 3:00 PM
Modeling high signal-to-noise ratio in a novel silicon MEMS microphone with comb readout
Paper 10246-6
Time: 1:40 PM - 2:00 PM
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An FE model of a cellular polypropylene: exploring mechanical properties
Paper 10246-8
Time: 2:20 PM - 2:40 PM
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Efficient fluid transport by a bionically inspired micro-flapper: fluidic investigations using fully coupled finite element simulation
Paper 10246-9
Time: 2:40 PM - 3:00 PM
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Coffee Break 3:00 PM - 3:30 PM
Session 3:
Chemical and Biochemical Sensors I
Monday 8 May 2017
3:30 PM - 4:30 PM
Development of a lab-on-chip electrochemical immunosensor for detection of Polycyclic Aromatic Hydrocarbons (PAH) in environmental water
Paper 10246-10
Time: 3:30 PM - 3:50 PM
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Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever
Paper 10246-11
Time: 3:50 PM - 4:10 PM
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MEMS-based array for hydrogen sulfide detection employing a phase transition
Paper 10246-12
Time: 4:10 PM - 4:30 PM
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Session 4:
Chemical and Biochemical Sensors II
Monday 8 May 2017
4:30 PM - 5:50 PM
Direct measurement for organic solvents diffusion using ultra-sensitive optical resonator
Paper 10246-13
Time: 4:30 PM - 4:50 PM
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Inkjet-printed dissolved oxygen and pH sensors on flexible plastic substrates
Paper 10246-14
Time: 4:50 PM - 5:10 PM
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Wax microfluidics light-addressable valve with multiple actuation
Paper 10246-15
Time: 5:10 PM - 5:30 PM
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Development of biosensors for non-invasive measurements of heart failure biomarkers in saliva
Paper 10246-16
Time: 5:30 PM - 5:50 PM
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Tuesday 9 May Show All Abstracts
Session Plen:
Tuesday Plenary Session
Tuesday 9 May 2017
9:00 AM - 10:00 AM
MEMS microphone innovations towards high signal to noise ratios (Plenary Presentation) (Plenary Presentation)
Paper 10246-500
Time: 9:00 AM - 10:00 AM
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Coffee Break 10:00 AM - 10:30 AM
Session 5:
Physical Sensors I
Tuesday 9 May 2017
10:30 AM - 11:50 AM
MEMS direction finding acoustic sensor
Paper 10246-17
Time: 10:30 AM - 10:50 AM
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A multi-functional MEMS-SPM for quantitative characterization of nano-objects
Paper 10246-18
Time: 10:50 AM - 11:10 AM
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Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection
Paper 10246-19
Time: 11:10 AM - 11:30 AM
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Thermoelectric bolometers based on silicon membranes
Paper 10246-20
Time: 11:30 AM - 11:50 AM
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Lunch Break 11:50 AM - 1:30 PM
Session 6:
Physical Sensors II
Tuesday 9 May 2017
1:30 PM - 2:30 PM
Oscillator circuit for monitoring the gas damping effect of piezoelectric microresonators
Paper 10246-22
Time: 1:30 PM - 1:50 PM
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Comparative assessment of PVDF and PVDF-TrFE piezoelectric polymers for flexible actuators applications
Paper 10246-23
Time: 1:50 PM - 2:10 PM
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Thin film system with integrated load and temperature sensors for the technical application in deep drawing process
Paper 10246-24
Time: 2:10 PM - 2:30 PM
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Session PTue:
Poster Session
Tuesday 9 May 2017
2:30 PM - 4:30 PM

Conference attendees are invited to attend the Poster Session on Tuesday afternoon. Come view posters, enjoy light refreshments, ask questions, and network with colleagues in your field. Authors of poster papers will be present to answer questions concerning their papers. Attendees are required to wear their conference badges to the poster session.
Anti-collision radio-frequency identification system using passive SAW tags
Paper 10246-40
Time: 2:30 PM - 4:30 PM
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Mini- and microgenerators applicable in the MEMS technology
Paper 10246-41
Time: 2:30 PM - 4:30 PM
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Design and development of microfluidic pH sensor created using RF sputtering technique
Paper 10246-42
Time: 2:30 PM - 4:30 PM
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Modeling the microstructure of surface by applying BRDF function
Paper 10246-43
Time: 2:30 PM - 4:30 PM
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Actuation control of a PiezoMEMS biomimetic robotic jellyfish
Paper 10246-44
Time: 2:30 PM - 4:30 PM
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MEMS-based seed generator applied to a chaotic stream cipher
Paper 10246-45
Time: 2:30 PM - 4:30 PM
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Analyses of electromagnetic and piezoelectric systems for efficient vibration energy harvesting
Paper 10246-46
Time: 2:30 PM - 4:30 PM
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Gold/polypyrrole nanorods for gas sensing application
Paper 10246-47
Time: 2:30 PM - 4:30 PM
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Four segment piezo based micropump
Paper 10246-48
Time: 2:30 PM - 4:30 PM
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Computational model and simulation for the whispering gallery modes inside micro-optical cavity
Paper 10246-49
Time: 2:30 PM - 4:30 PM
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Influence of binding material of PZT coating on microresonator's electrical and mechanical properties
Paper 10246-51
Time: 2:30 PM - 4:30 PM
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Colorimetric sensor for bad odor detection using automated color correction
Paper 10246-52
Time: 2:30 PM - 4:30 PM
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Temperature simulation at ZnO surface processed by laser interference lithography
Paper 10246-53
Time: 2:30 PM - 4:30 PM
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Innovative metal thermo-compression wafer bonding for microelectronics and MEMS devices
Paper 10246-54
Time: 2:30 PM - 4:30 PM
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Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators
Paper 10246-55
Time: 2:30 PM - 4:30 PM
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Radio link design framework for WSN deployment and performance prediction
Paper 10246-56
Time: 2:30 PM - 4:30 PM
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User centered integration of Internet of Things devices
Paper 10246-57
Time: 2:30 PM - 4:30 PM
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Identification of squid species by melting temperature shifts on fluorescence melting curve analysis (FMCA) using single dual-labeled probe
Paper 10246-58
Time: 2:30 PM - 4:30 PM
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Session 7:
Materials and Processes
Tuesday 9 May 2017
4:30 PM - 5:30 PM
Low cost nanomechanical surfaces stress based sensors fabricated by hybrid materials
Paper 10246-25
Time: 4:30 PM - 4:50 PM
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Zirconium diboride thin films for use in high temperature sensors and MEMS devices
Paper 10246-27
Time: 4:50 PM - 5:10 PM
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FT-IR analysis of high temperature annealing effects in a-SiC:H thin films
Paper 10246-28
Time: 5:10 PM - 5:30 PM
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Wednesday 10 May Show All Abstracts
Session Plen:
Wednesday Plenary Session
Wednesday 10 May 2017
9:00 AM - 10:00 AM
Graphene technologies for bioelectronics and neuroprosthetics (Plenary Presentation)
Paper 10248-500
Time: 9:00 AM - 10:00 AM
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Coffee Break 10:00 AM - 10:30 AM
Session 8:
Energy Devices I
Wednesday 10 May 2017
10:30 AM - 12:10 PM
Micro solid oxide fuel cells: a new generation of micro-power sources for portable applications (Invited Paper)
Paper 10246-29
Time: 10:30 AM - 11:10 AM
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Alkaline fuel cell with nitride membrane
Paper 10246-30
Time: 11:10 AM - 11:30 AM
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Parameter identification from frequency response of MEMS energy harvesters
Paper 10246-31
Time: 11:30 AM - 11:50 AM
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Powering a leadless pacemaker using a PiezoMEMS energy harvester
Paper 10246-32
Time: 11:50 AM - 12:10 PM
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Lunch Break 12:10 PM - 1:40 PM
Session 9:
Energy Devices II
Wednesday 10 May 2017
1:40 PM - 3:00 PM
Designing, modelling and testing of vibration energy harvester with nonlinear stiffness
Paper 10246-33
Time: 1:40 PM - 2:00 PM
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Comparison of methods for static charge energy harvesting on aircraft
Paper 10246-34
Time: 2:00 PM - 2:20 PM
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Improved thermal and electrical design for an all-Si thermoelectric micropower source
Paper 10246-35
Time: 2:20 PM - 2:40 PM
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Integrated TiN coated porous silicon supercapacitor with large capacitance per foot print
Paper 10246-36
Time: 2:40 PM - 3:00 PM
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Coffee Break 3:00 PM - 3:30 PM
Session 10:
Interfacing and System Integration
Wednesday 10 May 2017
3:30 PM - 4:30 PM
Programmable differential capacitance-to-voltage converter for MEMS accelerometers
Paper 10246-37
Time: 3:30 PM - 3:50 PM
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Robust design of an inkjet-printed capacitive sensor for position tracking of a MOEMS-mirror in a Michelson interferometer setup
Paper 10246-38
Time: 3:50 PM - 4:10 PM
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Universal and inductorless DC/DC converter for multi-output power supplies in sensor and actuator networks
Paper 10246-39
Time: 4:10 PM - 4:30 PM
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