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Journal of Micro/Nanolithography, MEMS, and MOEMS

Chris A. Mack, Lithoguru.com

Editorial Board

The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, microelectromechanical systems, micro-optoelectromechanical systems, and photonics industries. The wide range of such devices also includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal.

View full journal scope

JM3 Video Intro Introduction to the Journal of Micro/Nanolithography, MEMS, and MOEMS from the Editor-in-Chief, Chris Mack.

Special Section Calls for Papers

Facts and Figures

ISSN: 1932-5150
E-ISSN: 1932-5134
Publisher: SPIE
Frequency: Quarterly (4 issue/year)
Format: Print and Online
Impact Factor: 1.205*
5-Year Impact Factor: 1.008*
Subject Category Rankings: 46th out of 82 journals in Optics; 57th out of 73 journals in Nanoscience & Nanotechnology; 127th out of 247 journals in Electrical & Electronic Engineering; 144th out of 251 journals in Multidisciplinary Materials Science*
h5-index: 19

* 2014 Release of Journal Citation Reports with "Source: 2013 Web of Science data." Journal Citation Reports is a registered trademark of Thomson Reuters. All rights reserved.
h5-index is the h-index for articles published in the last 5 complete years. It is the largest number h such that h articles published in 2009-2013 have at least h citations each (from Google Scholar)

Abstracting and Indexing

  • Science Citation Index Expanded
  • Materials Science Citation Index
  • Current Contents - Physical, Chemical & Earth Sciences
  • Current Contents - Engineering, Computing & Technology
  • Inspec
  • Scopus
  • Ei Compendex
  • Chemical Abstracts
  • Astrophysics Data System

Editorial Office

Contact the JM3 staff at:

P.O. Box 10
Bellingham, WA 98227-0010 USA
tel: +1 360 676 3290
fax: +1 360 647 1445


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