Chris A. Mack, Lithoguru.com
The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, microelectromechanical systems, micro-optoelectromechanical systems, and photonics industries. The wide range of such devices also includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal. Topical areas covered include:
Lithography: tools, materials, and processes associated with the patterning of structures that have submicrometer and nanometer-scale features. Included are imaging and nonimaging approaches using optics, electron and other particle beams, nanoimprint, molecular self-assembly, and their hybrids. Applications include semiconductor fabrication, but also patterning for other micro/nanodevices.
Microelectromechanical systems (MEMS): the design, fabrication, operation, reliability, and testing of microdevices that contain both electrical and mechanical elements.
Micro-optoelectromechanical systems (MOEMS): the design, fabrication, operation, reliability, and testing of microdevices that contain electrical, mechanical, and optical elements (that is, the merging of micro-optics and MEMS).
Microfabrication: technologies to shape three-dimensional structures leading to the fabrication of active and passive electronics, photonics, MEMS, MOEMS, micro/nano-optics, and other micro/nanodevices.
Metrology: metrology and process control for the above devices and their fabrication processes.
If you are interested in submitting a manuscript to the Journal of Micro/Nanolithography, MEMS, and MOEMS, please read our guidelines for authors.
Special Section Calls for Papers
||Introduction to the Journal of Micro/Nanolithography, MEMS, and MOEMS from the Editor-in-Chief, Chris Mack.
Abstracting and Indexing
- Science Citation Index Expanded
- Materials Science Citation Index
- Current Contents - Physical, Chemical & Earth Sciences
- Current Contents - Engineering, Computing & Technology
- Ei Compendex
- Chemical Abstracts
- Astrophysics Data System
Contact the JM3 staff at:
P.O. Box 10
Bellingham, WA 98227-0010 USA
tel: +1 360 676 3290
fax: +1 360 647 1445