SPIE Home
SPIE is an international society
advancing light-based research.
Home
Conferences + Exhibitions
Publications
Courses
Membership
Resources
Newsroom
About SPIE Contact Us Help Shopping Cart
Create an account Sign in
SEARCH:
Print PageEmail Page

Journal of Micro/Nanolithography, MEMS, and MOEMS

The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) (formerly the Journal of Microlithography, Microfabrication, and Microsystems, 2002-2006) publishes peer-reviewed papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, micro-optoelectromechanical systems, and photonics industries.

View the JM3 Editorial Schedule to see a list of upcoming and previous special sections.

Journal of Micro/Nanolithography, MEMS, and MOEMS
Editor-in-Chief
Burn J. Lin
tel: 886 3 505 5858
Managing Editor
Karolyn S. Labes
tel: +1 360 676 3290

Papers can be purchased:


Top 10 Downloads


Journals Feature Multimedia

Audio and video display is fully supported for all SPIE Journals through standard multimedia platforms. Click below for more information.

Publish Your Work

Thousands of people from academia, industry, and national labs publish their work with SPIE every year. Get the recognition you deserve.

About SPIE|SPIEWorksSPIEWorks Job Site|Privacy Policy|Sitemap
Copyright © SPIE