The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) (formerly the Journal of Microlithography, Microfabrication, and Microsystems, 2002–2006) publishes peer-reviewed papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, micro-optoelectromechanical systems, and photonics industries.
View the JM3 Editorial Schedule to see a list of upcoming and previous special sections.
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Journal of Micro/Nanolithography, MEMS, and MOEMS
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