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Micro/Nano Lithography

NIST SBIR solicitation closes 2 March

SPIE Newsroom
16 February 2012

The National Institute of Standards and Technology (NIST) Small Business Innovation Research (SBIR) Program FY 2012 Solicitation is open. The Phase I solicitation will close on March 2, 2012. SBIR is a competitive program that encourages domestic small businesses to engage in federally funded R&D opportunities that have the potential for commercialization.

The solicitation describes 12 specific technologies for development. In the category of Manufacturing, they include:

  •         Development of a Microcompressor for Miniaturized Cryocooling
  •         High-Precision, Random Profile Roughness Specimens
  •         Low-cost Stabilized Diode Lasers for Displacement Measurements
  •         Non-contact Microwave Measurement of Electrical Properties of Nanofiber Materials
  •         Power Meter for EUV Lithography Sources
  •         Query-based Geometric Interoperability for Advanced Manufacturing
  •         Silicon Ion Source for Isotopically Enriched Deposition
  •         X-ray Chemical Shift Mapping for Industrial Materials Analysis

In the category of Information Technology and Cybersecurity:

  •         High-Power, High-Speed Photodiodes
  •         Microfabricated High-Frequency Connectors for Millimeter-Wave Technology
  •         Ultrafast Photodetector for Probing Coplanar Waveguide Electrical Circuits
  •         Web Services-Biometric Devices (WS-BD) Conformant Handheld Fingerprint Sensor

View the solicitation

More information about the NIST SBIR Program