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Author Information for the Journal of Micro/Nanolithography, MEMS, and MOEMS

About the Journal of Micro/Nanolithography, MEMS, and MOEMS

The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) is a print and online journal that publishes papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, micro-optoelectromechanical systems, and photonics industries.

In addition to contributed research papers, JM3 occasionally publishes special sections in key areas of technology. Special sections are assembled by guest editors. See the Editorial Schedule for a list of forthcoming special section topics and dates.

Why publish in this journal?

The scope of JM3 is broad to facilitate synergy and interest between the communities served by the journal. JM3 is abstracted in leading scientific databases and provides rapid online publication and timely delivery of research. JM3 is published online as part of the SPIE Digital Library, accessible by researchers at many of the world's leading universities, laboratories, and corporations as well as thousands of individual subscribers.

Author benefits:
  • Online-first publication of articles 
  • Professional copyediting and typesetting
  • Free online color figures
  • Multimedia integration 
  • 5 free downloads for authors from the SPIE Digital Library
  • Open access publication at a low cost through payment of voluntary page charges
  • Voluntary page charges
  • Abstracting and indexing in leading scientific databases, including Science Citation Index Expanded; Materials Science Citation Index; Current Contents/Physical, Chemical & Earth Science; Current Contents/Engineering, Computing & Technology; Inspec; Scopus; Ei Compendex; and Chemical Abstracts.

Submit a manuscript

JM3 uses an online submission system.

Authors should read and follow the instructions on how to prepare and format a manuscript prior to submission.

Authors should also read the journal policies prior to submission to ensure their manuscript meets the journal requirements. This page also provides information about submitting a proceedings manuscript to the journal.

Authors are required to include a cover letter with their submission explaining the significance and novelty of the work, the problem that is being addressed, and why the manuscript belongs in this journal. This cover letter sample (.doc) can be used as a template.

To ensure consistent use of acronyms within the journal, authors should refer to the JM3 acronym list when preparing their manuscripts.

JM3 typically allows only one round of major revision. Authors should carefully address all reviewer comments when submitting a revised manuscript. Also note that resubmission of a rejected manuscript is normally not allowed until three months after the decision date.

Types of Manuscripts

Letter: A short technical communication of significant interest intended for rapid publication in the Letters section of the journal. The manuscript length may not exceed three printed journal pages. Further details.

Regular Paper: A full-length manuscript presenting original work intended as a regular contribution to the journal.

Special Section Paper: A full-length manuscript presenting original work intended for submission to a special topical section organized by a guest editor.

Communication: A short technical communication on original work, a comment on a recent paper, or an erratum.

Author Tools

Submit a Manuscript to JM3 
Prepare a Manuscript
Copyright Forms
Calls for Papers
Publication Charges
Journal Policies
Open Access
Related Links

Reviewer Information
Mailing Schedule and Claims
Editorial Board
Staff
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