About the Journal of Micro/Nanolithography, MEMS, and MOEMS
The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) is a print and online journal that publishes papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, micro-optoelectromechanical systems, and photonics industries.
In addition to contributed research papers, JM3 occasionally publishes special sections in key areas of technology. Special sections are assembled by guest editors. See the Editorial Schedule for a list of forthcoming special section topics and dates.
Why publish in this journal?
The scope of JM3 is broad to facilitate synergy and interest between the communities served by the journal. JM3 is abstracted in leading scientific databases and provides rapid online publication and timely delivery of research. JM3 is published online as part of the SPIE Digital Library, accessible by researchers at many of the world's leading universities, laboratories, and corporations as well as thousands of individual subscribers.
- Online-first publication of articles
- Professional copyediting and typesetting
- Free online color figures
- Multimedia integration
- 5 free downloads for authors from the SPIE Digital Library
- Open access publication at a low competitive cost
- Voluntary page charges
- Abstracting and indexing in leading scientific databases, including Science Citation Index Expanded; Materials Science Citation Index; Current Contents/Physical, Chemical & Earth Science; Current Contents/Engineering, Computing & Technology; Inspec; Scopus; Ei Compendex; and Chemical Abstracts.
Submit a manuscript
JM3 uses an online submission system.
Authors should read and follow the instructions on how to prepare and format a manuscript prior to submission.
Authors should also read the journal policies prior to submission to ensure their manuscript meets the journal requirements. This page also provides information about submitting a proceedings manuscript to the journal.
Authors are required to include a cover letter with their submission explaining the significance and novelty of the work, the problem that is being addressed, and why the manuscript belongs in this journal.
To ensure consistent use of acronyms within the journal, authors should refer to the JM3 acronym list when preparing their manuscripts.
JM3 typically allows only one round of major revision. Authors should carefully address all reviewer comments when submitting a revised manuscript.
Types of Manuscripts
Letter: A short technical communication of significant interest intended for rapid publication in the Letters section of the journal. The manuscript length may not exceed three printed journal pages. Further details below.
JM3 Letters: The purpose of this section of the Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) is to provide rapid publication of short technical communications of significant interest. Submissions should be prepared in the same manner as a regular paper, except that there are no author biographies. The manuscript length may not exceed three printed journal pages. This corresponds to approximately 3000 words (excluding title, abstract, and author information); figures will further reduce the maximum word content. A brief cover letter setting forth the significance of the paper must accompany the manuscript. If accepted, letters will be scheduled for publication in the next available issue of JM3. Regular page charges apply to letters.
Regular Paper: A full-length manuscript presenting original work intended as a regular contribution to the journal.
Special Section Paper: A full-length manuscript presenting original work intended for submission to a special topical section organized by a guest editor.
Communication: A short technical communication on original work, a comment on a recent paper, or an erratum.