Design and fabrication of inverted rib waveguide Bragg grating
A polymeric SU8 rib waveguide Bragg grating filterfabricated using reactive ion etching (RIE) and solvent assisted
microcontact molding (SAMIM) is presented. SAMIM is one kind of soft lithography. The technique is unique in which
that a composite hPDMS/PDMS stamp was used to transfer the grating pattern onto an inverted SU8 rib waveguide
system. The composite grating stamp can be used repeatedly several times with degradation. Using this stamp and
inverter rib waveguide structure, the Bragg grating filter fabrication can be significantly simplified.
This paper was published in SPIE Proceedings Vol. 7291
Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009, Vijay K. Varadan, Editors, 72910R