This paper reports on the development of micromachined pillar arrays for the filtering of terahertz radiation. These pillar
arrays are fabricated using ultraviolet based processing of thick SU8. This micromachining technique enables the array
patterns, dimensions, and consequently the filter characteristics, to be readily defined. In particular, we demonstrate that
by combining individual filter arrays with either different periods or pillar diameters we can isolate individual pass bands
in the 1 to 2 T
DOI: 10.1117/12.712716Current SPIE Digital Library subscribers
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