Micro-Optics/Micromechanics and Laser Scanning and Shaping, M. Edward Motamedi; Leo Beiser, Editors, pp.449-459
Date: 12 May 1995
Paper Abstract
This paper analyzes the sources of error which shape the accuracy of a flat field raster scanning engine. It briefly describes the critical characteristics of the optical elements, scanners, electronics, laser, and structural design selected to build an engine with a system of accuracy of 0.35 micron, a 3.5 micron spot, and a telecentric work area of 25 mm diameter.
DOI: 10.1117/12.209049 Current SPIE Digital Library subscribers click here to download this paper.
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