A test system for performance verification of diffractive optical components was designed. The principle of the test methods is to measure the light intensity distribution in the near-field by scanning it with a pinhole detector while illuminating the element with a plane wave. Contrary to other performance verification methods, the scanning method allows high flexibility in the characterization of diffractive optical elements and allows also the determination of the diffraction efficiency.
DOI: 10.1117/12.188117Current SPIE Digital Library subscribers
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