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Journal of Micro/Nanolithography, MEMS, and MOEMS Editorial Board


Editor-in-Chief

Burn Lin

Burn J. Lin
TSMC, Ltd.
Taiwan


Senior Editors

William Arnold

William H. Arnold
ASML
USA

Yu-Cheng Lin

Yu-Cheng Lin
National Cheng Kung Univ.
Taiwan

Edward Motamedi

M. Edward Motamedi
Revoltech Microsystems
USA

Thomas J. Suleski

Thomas J. Suleski
Univ. of North Carolina at Charlotte
USA


Associate Editors

Jos Benschop

Jos Benschop
ASML
Netherlands

Franco Cerrina

Franco Cerrina
Boston University
USA

Will Conley

Will Conley
Freescale Semiconductor Inc.
USA

Kevin Cummings

Kevin Cummings
ASML
USA

Ralph Dammel

Ralph Dammel
AZ Electronic Materials
USA

David L. Dickensheets

David L. Dickensheets
Montana State Univ.
USA

Weileun Fang

Weileun Fang
National Tsing Hua Univ.
Taiwan

Gary Fedder

Gary K. Fedder
Carnegie Mellon University
USA

Donis Flagello

Donis Flagello
Nikon Research Corp. of America
USA

John Hartley

John Hartley
State Univ. of New York, Albany
USA

Greg Hughes

Greg Hughes
SEMATECH, Inc.
USA

Winfried Kaiser

Winfried Kaiser
Carl Zeiss
Germany

Stephen M. Kuebler

Stephen M. Kuebler
Univ. of Central Florida
USA

Randall L. Kubena

Randall L. Kubena
HRL
USA

Timothy P. Kurzweg

Timothy P. Kurzweg
Drexel Univ.
USA

Robin Liu

Robin Liu
CombiMatrix Corp.
USA

Roya Maboudian

Roya Maboudian
Univ. of California, Berkley
USA

Chris Mack

Chris Mack
USA

Katsuhiko Murakami

Katsuhiko Murakami
Nikon Corporation
Japan

Shinji Okazaki

Shinji Okazaki
EUVA
Japan

Soichi Owa

Soichi Owa
Nikon
Japan

Ian Papautsky

Ian Papautsky
Univ. of Cincinnati
USA

Moshe Preil

Moshe Preil
ASML
USA

Chris Progler

Chris Progler
Photronics, Inc.
USA

Rajeshuni Ramesham

Rajeshuni Ramesham
Jet Propulsion Lab.
USA

Douglas J. Resnick

Douglas J. Resnick
Imprints, Inc.
USA

John Rogers

John Rogers
Univ. of Illinois at Urbana-Champaign
USA

Kurt Ronse

Kurt Ronse
IMEC
Belgium

Frank Schellenberg

Frank Schellenberg
Mentor Graphics
USA

Harald Schenk

Harald Schenk
Fraunhofer Inst. für Photonische Mikrosysteme
Germany

Stefan Sinzinger

Stefan Sinzinger
Technische Univ. Ilmenau
Germany

Jeffry Sniegowski

Jeffry Sniegowski
MEMX, Inc.
USA

Srinivas Tadigadapa

Srinivas Tadigadapa
Pennsylvania State Univ.
USA

Vijay K. Varadan

Vijay K. Varadan
Univ. of Arkansas
USA

Wanjun Wang

Wanjun Wang
Louisiana State Univ.
USA

Alfred Wong

Alfred Wong
Magma Design Automation
USA

Anthony Yen

Anthony Yen
Taiwan Semiconductor Manufacturing Co., Ltd.
Taiwan

Hans Zappe

Hans Zappe
Univ. of Freiburg
Germany

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