Journal of Micro/Nanolithography, MEMS, and MOEMS Letters

JM3 Letters

The SPIE Letters Virtual Journal is an open-access, online collection. This table of contents links to free abstracts and free full-text downloads of all letters published in the Journal of Micro/Nanolithography, MEMS, and MOEMS.

2011 | 2009 | 2008 | 2007 | 2006

2011

Analytic form for the power spectral density in one, two, and three dimensions

Volume: 10
Date: 1 October 2011

Fabrication of a needle-type pH sensor by selective electrodeposition

Volume: 10
Date: 1 April 2011

Fabrication of polynomial 3-D nanostructures in Si with a single-step process

Volume: 10
Date: 1 January 2011

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