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Micro/Nano Lithography

Service model offers real-time tool monitoring


KLA-Tencor Corporation has announced the launch of KlearPoint™, a unique new service model that utilizes KLA-Tencor experts to proactively manage tool performance through real-time tool monitoring. KlearPoint can be added to service agreements to improve tool performance and productivity for customers worldwide.

KlearPoint is aimed at maximizing Overall Equipment Effectiveness (OEE) by increasing uptime and recipe success, reducing lost-time due to interrupts and enabling a more predictive and preventive service model. The KlearPoint client-server system resides within the customer site and connects to KLA-Tencor inspection and metrology tools using a customized data interface that collects operational and tool parameter data in real time. With this data-which is obtained and analyzed using algorithms specifically developed for this application-KLA-Tencor experts can conduct drill-down analyses and help determine the root causes of problems-providing a proactive service delivery model that results in improved tool performance and productivity.

"We're seeing customers around the world ramped to capacity and in need of maximizing the productivity of their existing install base of equipment," said Jon Geniesse, KLA-Tencor's senior vice president of Global Service and Support (GSS). "KlearPoint enables KLA-Tencor's global service experts to utilize tool data to improve the OEE of customers' inspection and metrology tools. That, in turn, helps our customers' factories increase their yield of 'good wafers out' so that our customers can better meet their market demands."