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Micro/Nano Lithography

The problem with quantum lithography

Technology Review arXiv blog
15 June 2010

Entangled photons can dramatically reduce the feature sizes possible with lithography. At least, that's what physicists had hoped.

Christian Kothe at the Royal Institute of Technology in Sweden and a few pals have shown that there is a fundamental problem with quantum lithography: it just doesn't work very well. The question is one of efficiency: how long would you need to expose a sample to achieve the desired improvement in resolution. This is related to how far the entangled photos spread out. Lithography only takes place when the photons all strike in the same place so the important question is how likely they are to all land together.

Full story from Technology Review arXiv blog