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High-precision nanopositioning stage

Physik Instrumente

Physik Instrumente (PI)'s P-563.3CD PIMars stage is a piezo flexure-guided scanning/nanomanipulation system. The unit enables precision motion control with resolution in the sub-nanometer realm and 340x340x340 µm travel in XYZ, significantly more than other capacitive-feedback equipped systems currently provide. Integrated, direct-measuring capacitance sensors and digital closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages.

Applications include micromanufacturing, bio-technology, nanotechnology, scanning microscopy, nano-manipulation, nano-imprint, semiconductor and data-storage test equipment.

PIMars stages incorporate high-force solid state piezo actuator drives, frictionless flexure guiding systems and absolute measuring capacitive position sensors. The high force of the solid state piezo actuators allows for fast response in the millisec range and high scanning frequencies.

PIMars™ stages are based on a different design principle than conventional scanning stages. The XYZ system consists of only one moving part, a single module rather than three individual stacked modules, as common in other XYZ systems. This "parallel-kinematics" mechanical design is complemented by a parallel direct- motion metrology feedback system.

With parallel direct-metrology, all non-contact sensors monitor the moving platform in reference it to ground "from the outside." They can "see" off-axis and runout errors. The controller then eliminates unwanted motion in real-time. Conventional serial-metrology sensors (integrated in each axis) cannot detect off-axis errors. Parallel motion metrology allows for significantly higher overall XYZ precision.