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Micro/Nano Lithography

Laser micromachining platform


Electro Scientific Industries, Inc. has announced a revolutionary laser micromachining platform that provides component and original equipment manufacturers (OEM) with greater yields, enhanced cost-of-ownership, and enables them to break new ground in the manufacturing of micro-electronics, automotive and other consumer products.

The ML5900 is an advanced, high-precision system that is optimized for industrial-production. The system gives customers real-time process control while providing them with a modular framework for maximum flexibility and rapid redeployment. Featuring a high-power, interchangeable diode pumped IR, Green or UV laser, the system enables component and OEM manufacturers to drill, route, and nanostructure a wide range of materials including metals, organics, dielectrics, semiconductors and hybrid-engineered parts. The platform's integrated metrology and rotary stage allow for fully parallel processing, thereby increasing the system's overall speed and handling capabilities.

"By working closely with our customers we were able to identify and solve their key manufacturing challenges," said ESI Interconnect and Micromachining general manager Jeff Albelo. "They were looking for a micromachining solution that has unparalleled placement accuracy, has high yields, and reduces scrap of incorrectly processed parts, while maintaining high throughput. We developed a platform that not only addresses all these issues, but is fully field-upgradable, delivers automated inspection and processing of parts, and is able to handle upwards of 10,000 parts per day."