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Sensing & Measurement

Interferometric optical profiler


Zemetrics, an optical metrology product company founded last year to provide new concept surface metrology systems, has brought its first system, ZeMapper, to the precision engineering and R+D market.

The ZeMapper interferometric optical profiler provides three-dimensional surface maps with the highest lateral and vertical resolution in a user-friendly automated process. Its large image sensor of 4 mega-pixels combines a large field of view with high resolution, unmatched in any commercial profiler. Advanced processing of the interferometric data leads to rapid precision measurements with sub-Angstrom repeatability. Designed for ultra-precision metrology, the instrument has been beta-tested by research customers, and is now in production. ZeMapper is expected to fill unmet needs in surface mapping among users that need non-destructive, non-contact areal measurements with high resolution and repeatability in applications such as defect review, surface characterization and volume displacement for data storage, optics, MEMS, tribology, material and biological sciences.

The ZeMapsTM acquisition and analysis software, included with ZeMapper, is optimized for the most powerful multiple processors, operating in 64-bit address space computing environment. Built-in reporting, animated 3D mapping, and zooming plots provide volumetric calculations, line profile cross-sections, and tabular 3D surface measurement parameters such as peak-to-valley, roughness (Sa), and area step heights.