Top 10 Downloads by Technology
Updated 13 January 2010 Updated monthly, each list includes a cross-disciplinary sampling of the most frequently downloaded papers from SPIE Conference Proceedings and SPIE Journal papers. Each title is linked to the abstract page for that paper on the SPIE Digital Library.
Top 10 Overall Astronomy Biomedical Optics & Medical Imaging Defense & Security Electronic Imaging & Signal Processing Illumination & Displays Industrial Sensing & Measurement Lasers & Sources Micro/Nano Lithography Nanotechnology Optical Design & Engineering Optoelectronics & Communications Remote Sensing Solar & Alternative Energy Astronomy Biomedical Optics & Medical Imaging Electronic Imaging & Signal Processing Industrial Sensing & Measurement - Challenges for the 28nm half node: Is the optical shrink dead? (Proceedings of SPIE)
- Development progress of optics for extreme ultraviolet lithography at Nikon (J. Micro/Nanolithography, MEMS, and MOEMS)
- Double-patterning requirements for optical lithography and prospects for optical extension without double patterning (J. Micro/Nanolithography, MEMS, and MOEMS)
- Estimating the out-of-band radiation flare levels for extreme ultraviolet lithography (J. Micro/Nanolithography, MEMS, and MOEMS)
- Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process (Proceedings of SPIE)
- Imaging budgets for extreme ultraviolet optics: ready for 22-nm node and beyond (J. Micro/Nanolithography, MEMS, and MOEMS)
- Intensive optimization of masks and sources for 22nm lithography (Proceedings of SPIE)
- On the uniqueness of optical images and solutions of inverse lithographical problems (J. Micro/Nanolithography, MEMS, and MOEMS)
- Overcoming the challenges of 22-nm node patterning through litho-design co-optimization (Proceedings of SPIE)
- SMO photomask inspection in the lithographic plane (Proceedings of SPI)
Optical Design & Engineering Optoelectronics & Communications Solar & Alternative Energy
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