2012
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Two U.S. scientists have developed a simple algorithm that looks set to revolutionise the way autofocus works, allowing for greater speed and accuracy in digital photography. Later this month, they will be presenting their work at the IS&T/SPIE Electronic Imaging conference near San Francisco.
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Despite the weak global recovery, financial strains in Europe and North America, and concerns about the Chinese market, corporate earnings for lasers have fared well -- but the road ahead is looking bumpy and uncertain. On 23 January, in conjunction with SPIE Photonics West, Laser Focus World will host the 2012 Lasers & Photonics Marketplace Seminar to navigate what lies ahead.
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The first rule of Laser Camp: Do not look into a laser. The second rule of Laser Camp: Revel in the scientific wonders of nanotechnology, spectroscopy and other disciplines featured at the sixth annual Three Rivers Community College Laser Camp. Contributions from organizations such as SPIE, the international society for optics and photonics, pay to purchase material and supplies.
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Edmund Optics is recognizing 70 years of optical innovation with an anniversary celebration starting at SPIE Photonics West.
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Weilin "Will" Hou and Bob Arnone, both oceanographers in the Oceanography Division at NRL Stennis Space Center, will chair the SPIE Defense, Security, and Sensing's fourth Ocean Sensing and Monitoring conference 23-27 April 23-27.
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It's nearly time for Photonics West again, and with both this year's main event and the BiOS showcase for biophotonics technologies now officially sold out there will be more than 1200 companies showing off their photonics wares. Among those will be the usual suspects, of course. But there will also be plenty of companies that you may not have come across before, whether they are new start-ups, exhibitors making their debut or simply ones that have stayed "under the radar".
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2011
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The small business innovation research (SBIR) program in the US, which had been in danger of collapsing amid a political impasse, will now be extended for a six-year term after a compromise on its finer details was finally agreed. Washington representatives of SPIE, the international society for optics and photonics, welcomed the resolution of the SBIR issue, which comes after a remarkable 14 continuing but short-term resolutions over the past few years.
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For nearly five decades, Eustace L. Dereniak has explored the frontiers of optics and engineering to help create 21st century breakthroughs in medicine, military hardware, astronomy and many other fields. Dereniak will become president of SPIE, the world's largest professional organization dedicated to optics and photonics, in January.
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After outgrowing the San Jose convention center and moving to San Francisco in 2010, SPIE Photonics West 2012 will grow yet again, both in terms of number of attendees as well as technical content and exhibition size.
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Jacob Scheuer and others at Tel-Aviv University presented a paper at a recent conference of SPIE, the international society for optics and photonics, describing the properties and showing the potential of nano-scale antennae that can transmit optical light. Among the applications of the technology is harvesting of radiated energy for solar panels use semiconductors like silicon to capture some energy from the sun. However, they are usually very inefficient. Scheuer showed that his array of antennae captured 95 percent of the energy radiated onto it.
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From high-profile spats like Apple versus Samsung, to more parochial matters like the recent IMRA America vs IPG Photonics case, there's no denying the influence and impact of a strong intellectual property portfolio. In September, President Obama's signature on the America Invents Act (link to full text) set in motion what the White House has described as the most significant reform of the US patent system for more than half a century. But what will all this actually mean in practice for photonics companies and budding entrepreneurs? Paul Davis, a partner in the business law department at Goodwin Procter in Menlo Park, California -- and previously at the laser company Spectra Physics -- will focus on the implications in a presentation at the Photonics West 2012 conference and trade show early next year.
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The next James Bond flick could very likely feature a situation where the baddies get bashed up by an invisible Bond. Yup, Bond film writers may soon borrow an idea from the latest scientific development: the 'invisibility strands'. So the next time you see Bond, rather don't see Bond, it could be because he's wearing a new gadget that makes him invisible. The invisibility strands created by Texas-based scientist could soon result in a cloak. NASA scientists working along the same lines reported at the SPIE Optics and Photonics conference talked about success in creating the darkest substance on Earth, virtually invisible to the human eye.
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Organizers SPIE and Photonics Media have revealed the short-list of finalists for the 2011 Prism Awards, the annual international competition for companies working on photonics technologies and applications.
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Supplying enough power to meet all our daily needs would require enormous solar panels. And solar-powered energy collected by panels made of silicon, a semiconductor material, is limited -- contemporary panel technology can only convert approximately seven percent of optical solar waves into electric current. Professors at Tel Aviv Universityand its innovative new Renewable Energy Center are now developing a solar panel composed of nano-antennas instead of semiconductors. By adapting classic metallic antennas to absorb light waves at optical frequencies, a much higher conversion rate from light into useable energy could be achieved. The technology was recently presented at SPIE Photonics West in San Francisco and published in the conference proceedings.
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NASA engineers have produced a material that absorbs on average more than 99 percent of the ultraviolet, visible, infrared, and far-infrared light that hits it -- a development that promises to open new frontiers in space technology. The team of engineers at NASA's Goddard Space Flight Center in Greenbelt, Maryland, reported their findings recently at the SPIE Optics + Photonics conference, the largest interdisciplinary technical meeting in this discipline.
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A Q&A with Eugene Arthurs, CEO, SPIE: Photonics Online had the privilege of asking Dr. Arthurs for his view of the optics and photonics landscape, SPIE's present and future activities and goals, the status of the update to the Harnessing Light study, and the interesting new technologies and trends highlighted at SPIE shows this year.
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In April and May 2011, SPIE (the international society for optics and photonics) conducted what is probably the largest and most comprehensive salary survey of the optics sector to date. Calling on its members from more than 170 countries around the globe to answer a series of questions by e-mail, the society collected more than 7,300 responses. The results, which are now live on the SPIE website, make for interesting reading.
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Ah, who can forget the 2010 50th anniversary celebration of the laser? Our normally docile and academic-minded photonics industry was jumping in 2010, with jubilant celebrations ... But wait, the celebration continues into 2012, which is the official 50th anniversary of the diode laser -- those little solid-state beacons of light that have found their way into our lives in countless ways. At the 2012 Lasers & Photonics Marketplace Seminar, held during Photonics West 2012, David Welch, executive VP and chief strategy officer of Infinera, will present "Celebrating 50 Years of Laser Diodes."
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Preliminary results from the largest optics and photonics salary survey are in. The median salary for photonics worker is $75,000. The global survey of over 7000 optics and photonics professionals was conducted by SPIE, the international society of optics and photonics. The survey found a large range of salaries, depending on an employee's location and the field of employment. THE SPIE salary survey website has many more detail.
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Hyperspectral imaging separates visible and invisible light into a series of small bands. This data can then be processed to identify materials based on their spectral fingerprints. The technology has many applications in mineralogy (to help find oil fields, for example), surveillance and agriculture. Its materials characterisation capabilities can also be applied to disease detection. However, the technology as it exists today requires the use of complex, bulky systems and is expensive to deploy. At the imec Technology Forum, Francesco Pessolano of imec's NVision programme, explained how the technology could find broader applications if the glass components of a vision system were replaced with a chip. A prototype of the digital optical system will be shown at SPIE Photonics West in January.
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The French infrared detector specialist Sofradir will supply the high-resolution focal plane arrays used in a new constellation of Earth observation military satellites being built by a European consortium. Handling the huge amounts of data created by high-resolution aerial and satellite imaging at a speed that can benefit forces on the ground was identified by Regina Dugan, director of the US Defense Advanced Research Projects Agency (DARPA) as a major bottleneck earlier this year in a plenary talk at the SPIE Defense, Security and Sensing (DSS) conference.
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A team from the IOI-Malta Operational Centre has statistically compared ocean colour values from satellites with in situ values collected in the field, to gauge the productivity of a marine area, assessing surface runoff from land as well as identifying phenomena such as upwelling. The outcome of this research was presented last month at the SPIE Remote Sensing congress in Prague and has been published as part of the congress proceedings.
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A promising new approach to achieving the goal of efficiently generating electricity from sunlight is being developed by Arizona State University engineers Cun-Zheng Ning and Derek Caselli. Details of the project, which is supported by the U.S. Army Research Office, are presented in a recent article by Ning and Caselli posted on the website of SPIE, the international society for optics and photonics.
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If you want to tour the world of photonics, flip through the technical program and exhibitor list for SPIE Photonics West. The annual trade fair brings together a wide-ranging conference program, a professional development program with 50 courses, two exhibitions, and numerous networking and special events, all focused tightly on photonics, lasers and biomedical optics. Each year, more than 19,000 people from all sectors of the photonics industry -- researchers, exhibitors, technologists, students and industry leaders -- flock to California from more than 50 countries to attend the event.
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The eBeam Initiative held its second annual BACUS event on Tuesday, September 20, to continue to promote greater education and focus on eBeam technologies.
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It could be a great tag line for the industry: "Photonics, for a Better World." In reality, "Photonics for a Better World" is the name of a special pavilion at SPIE Optics & Photonics, which was held in August in San Diego.
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Researchers at Northwestern University have developed a simpler way to generate single-chip terahertz radiation, a discovery that could soon allow for more rapid security screening, border protection, high-sensitivity biological/chemical analysis, agricultural inspection, and astronomical applications. The work, headed by Manijeh Razeghi, Walter P. Murphy Professor of Electrical Engineering and Computer Science in the McCormick School of Engineering and Applied Science, was presented in August at the SPIE Optics + Photonics conference in San Diego.
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The first Britton Chance Biomedical Optics Award -- which honors optical imaging researcher Britton Chance, who passed away in November 2010 at the age of 97 -- will be presented at the upcoming SPIE Photonics West in 2012. Deadline for award nominations is 1 October 1.
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A doctoral student at the University of Texas, Austin, who has been detained for months in his native Iran on espionage charges will go on trial on 4 October. Omid Kokabee, who was working toward a Ph.D. in optics, was arrested at a Tehran airport while on vacation in Iran in late January or early February. News of the new trial date comes as a number of scientific groups including SPIE, the international society for optics and photonics, the International Commission for Optics, and others have signed open letters to the supreme leader of Iran, Ayatollah Ali Khamenei, requesting clemency for Kokabee.
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At the 2011 SPIE masking conference, known as BACUS, we had a chance to meet with and talk to Aki Fujimura of D2S, Inc., about his company's new product offering. The new platform is an interactive masking workstation that allows for simultaneous optimization of lithographic patterning for BOTH mask and the resulting wafer image.
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D2S announced a mask-wafer double simulation accelerated workstation, TrueMask DS, for R&D exploration, bit-cell design, hot-spot analysis and mask defect categorization at the SPIE Photomask Technology conference.
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The March 11, 2011, Tohuku earthquake and tsunami caused many deaths and much property destruction, bringing parts of Japan to a virtual standstill. One casualty was Photomask Japan 2011 (PMJ), which was originally scheduled to take place in Yokohama in April but was cancelled after the horrific events. PMJ has a sister conference, SPIE Photomask Technology (known in the vernacular as BACUS), annually staged in Monterey, California, in September, and this year BACUS has been extended by one-half day to allow the "10 best" PMJ papers to be presented in a special kick-off session.
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Applied Materials unveiled its Centura Tetra EUV advanced reticle etch system at the SPIE Photomask (BACUS) conference. The system addresses changing requirements from transmission photomasks used in optical lithography to reflection photomasks needed for extreme ultraviolet lithography (EUVL).
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The eBeam Initiative, a forum dedicated to the education and promotion of new semiconductor manufacturing approaches based on electron beam (eBeam) technologies, today announced that several of its members will present the latest eBeam breakthroughs in mask and direct-write technologies at the SPIE/BACUS Photomask Symposium 2011 in Monterey, California. The eBeam Initiative also announced today that five additional companies have joined its ranks.
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Preliminary findings from a global survey of more than 7,000 people working in various areas of optics and photonics show that the average (median) salary for those employed in the field is $75,000. The survey, conducted by SPIE and the largest of its kind yet undertaken, found a very wide distribution of salaries, dependent largely on the location of an employee and whether they are working in industry or academia.
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Taiwan Semiconductor Manufacturing Co. will switch on its first extreme ultraviolet (EUV) machine in two weeks. The milestone marks the next step in the foundry's goal of evaluating three competing lithography machines for making next-generation chips. Early this year, the industry was concerned with how much power EUV lithography will would need. Keynote speakers at the SPIE Advanced Lithography conference have admitted that while lithography is making headway, the technology's power source continues to lag behind.
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As the dust settles on Solyndra's high-profile failure to crack the photovoltaics market -- at least in the company's current guise, ahead of any potential restructure -- the ability of novel PV technologies to compete with the entrenched silicon and CdTe approaches that dominate the scene is in question. At last month's SPIE-hosted Optics + Photonics conference in San Diego, California, many of the hottest photonics research topics were under discussion, with world-leading groups describing their advances in technologies ranging from hyperspectral imaging to the potential optoelectronic applications of silk.
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Scientists from Opto-Knowledge Systems, Pacific Northwest National Lab, and Rutgers University have developed a new type of hollow-core optical fiber that can deliver mid-infrared (mid-IR) as well as long-wavelength infrared (LWIR) laser light. The fibers, detailed in "Fiber delivery of mid-IR lasers" from the SPIE Newsroom (24 August 2011), are important for mid-IR light delivery from quantum-cascade lasers (QCLs) and other mid-IR sources in instruments that can detect trace molecular species in such applications as explosives detection, environmental pollutant monitoring, and in analysis of biomarkers in a patient's breath.
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Solar and optoelectronics technology firm OPEL Solar International has changed its corporate identity in a move designed to reflect its expertise in two distinct photonics sectors. According to CEO Leon Pierhal, OPEL Solar's CEO, both business units are now looking for investment. "We need more capital," he told optics.org at the recent SPIE Optics + Photonics conference in San Diego ...."
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A special edition of Light Matters, broadcast from the exhibition floor at SPIE Optics + Photonics
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Synopsys Inc. has announced the winners of the 2011 Robert S. Hilbert Memorial Optical Design Competition, two University of Rochester students who were recognized for their achievements in optical design. Samples of their projects were on display this week at SPIE Optics + Photonics at the San Diego Convention Center.
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Radhakrishna Sureshkumar, professor and chair of biomedical and chemical engineering in Syracuse University's L.C. Smith College of Engineering and Computer Science, and professor of physics, has developed a patent-pending robust process to manufacture stable suspensions of metal nanoparticles capable of capturing sunlight. His work is was presented at the SPIE Optics + Photonics conference on August 23.
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A new 5 MW concentrating photovoltaics (CPV) project recently completed by market-leading CPV system company Amonix is the largest yet built in the U.S. Amonix founder Vahan Garboushian showed details of the New Mexico installation during a plenary talk at SPIE’s Optics + Photonics show in San Diego, describing the 10 kW “megamodule” building blocks on which the systems are based. According to a Greentech Media article, the project has been built and is being operated by NextEra Energy Resources, with the electricity generated sold to El Paso Electric.
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SPIE CEO Eugene Arthurs is among those providing perspective on consideration by Congress to cut funding for NASA's James Webb Space Telescope.
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The specialty optical components manufacturer Schott announced at SPIE Optics + Photonics that it is now making products based on chalcogenide glass in Pennsylvania, in a move that will enable the company's US subsidiary to target the domestic defense sector more effectively.
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Last year's SPIE Optics + Photonics conference was particularly memorable, mostly for the awesome PennWell customer-appreciation catamaran cruise and the typically warm and breezy weather we all enjoyed.
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NASA will showcase and discuss a wealth of projects, technologies and science at the 2011 SPIE Optics and Photonics conference.
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As semiconductor devices push into the 20nm process node and beyond, new techniques are needed to extend the viability of 193nm immersion (193i) optical lithography. ... concerns about the thermal effects of overlapping shots were laid to rest in the paper published at the 2011 SPIE Advanced Lithography Symposium by eBeam Initiative members.
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A novel retinal imaging system developed by Jane You Jia of Hong Kong Polytechnic University performs computer-aided, non-intrusive diabetic retinopathy screening and monitoring and affords privacy protection ... took second place in the SPIE Medical Imaging 2009 international competition Retinopathy Online Challenge.
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Vahan Garboushian on a breakthrough year for concentrated PV, and why the technology promises to be much more than a niche solution ... A central message from Garboushian’s plenary talk at SPIE Optics + Photonics will be that CPV has more headroom to improve LCOE than any other PV technology, and could get very close to the DOE’s solar electricity target cost of $0.06-0.07 per kWh.
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Like many in the industry, Rochester optics companies are faced with a shortage of skilled technicians. To address this problem, the Rochester Regional Optics Cluster, Monroe Community College, and local high schools are collaborating to broaden inner-city high-school students' career opportunities and create a workforce pipeline. ... In fact, this problem was discussed earlier this year at SPIE Optifab 2011 in a panel discussion called "The Future of Optical Manufacturing in North America."
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While module developers work to perfect 4x25-Gbps transmission over singlemode fiber for 100GBase-LR4 and -ER4 applications, technologists have already begun work on enabling similar transmission over multimode fiber. Recent demonstrations have shown progress on both the transmission and reception ends of the spectrum. ... more information in a paper at the subsequent "Enabling Photonics Technologies for Defense, Security, and Aerospace Applications" conference sponsored by the SPIE.
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The SPIE chapter hosted 16 female students from a STEM interest group at Arcadia High School for a day of optics ....
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Photonics technologies underpin at least 10% of the European economy, and that reliance will increase as those technologies are further developed in the next decade. That is just one of the headline conclusions from a new study on the leveraging impact of photonics that has been prepared for the European Commission (EC) by a team working closely with the Photonics21 industry group. ... The photonics sector member organization SPIE has applauded that aim ...
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Some 6,000 members of the military, security, and environmental industries gathered in Orlando from April 25-29 for SPIE Defense, Security, and Sensing (DSS) 2011. Perhaps the week's biggest attraction was the DSS exhibition, featuring the latest imaging and sensing technologies from 500 companies.
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... some 1,700 optics industry representatives from around the globe are in Rochester this week for presentations on such topics as part of Optifab 2011, a North American optics manufacturing convention and technical trade show that takes place every two years.
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The head of the US defence research agency, DARPA, says industry must find better ways of using the data garnered by ISR systems. Dr Regina Dugan, director of DARPA, said she was concerned that some on the front line in Afghanistan had lost faith in the S&T community, which was not delivering solutions on time.
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Video: Military & Aerospace Electronics editor John Keller visits the SPIE Defense, Security & Sensing 2011 show in Orlando, Florida.
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A US company pioneering the use of lasers to recharge the batteries of UAVs in flight says such a system could be potentially fielded as early as next year. LaserMotive is demonstrating the ability to 'power beam' via laser several UAV aircraft, including rotary-wing vehicles, at the 2011 SPIE Defence Security, and Sensing exposition ....
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According to a report from SPIE, the Security, Defense,+ Sensing symposium in Orlando, Florida, is attracting a strong audience for sessions on infrared technologies and applications, with papers from Sofradir, The Aerospace Corp., SCD Semicondcutor Devices, Thales Optronics, and others.
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If asked to consider the environmental credentials of photonics technology, the chances are that you will think first of clean energy generation through solar photovoltaics, or perhaps the energy-saving potential of solid-state lighting. But those increasingly valuable applications are by no means the limit of the possibilities. As Trumpf's Michael Lang noted at SPIE's first Eco-Photonics conference in Strasbourg, France, this week, one highly evident trend is the way in which high-power lasers used in materials production have become dramatically smaller and more energy-efficient in recent years.
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At the SPIE Advanced Lithography event in San Jose, Synopsys presented their current mask making solutions.
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Our solar system's star continues to be very active: The Solar Dynamics Observatory has released a new video of a very active Sun.... Some of the SDO team will be in San Diego August 21-25th for the SPIE Optics + Photonics symposium.
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Evolutionary cognitive scientist Mark Changizi argues that "3D movie" makers have been missing out on most of their creative space, because they have not recognized the full range of powers their binocular movies can harness: "At the end of January I was in San Francisco at the SPIE conference on Electronic Imaging, and attended a two-hour session demonstrating samples of state-of-the-art 3D videos from upcoming movies, video games, advertisements and artistic pieces. The general reaction of the several hundred people there was positive."
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After decades in development and years behind schedule, it looks like extreme UV lithography is finally closing in on commercialization. ... And the EUV question took center stage at SPIE's Advanced Lithography conference and exhibition, held in San Jose in late February and early March.
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The 2011 SPIE Advanced Lithography Symposium was noticeably different from previous meeting which highlighted new tools and methods. This year few hardware or software tools were innovative enough to be news worthy, rather it was all about materials and the remarkable things they could be made to do -- or not do.
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Synopsys introduced the Proteus LRC for lithography verification at the SPIE Advanced Lithography conference ... George Bailey, director, technical marketing at Synopsys, describes the data flow process in a podcast interview.
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A new laser device created at the University of Central Florida could make high-speed computing faster and more reliable, opening the door to a new age of the Internet. ... Dennis Deppe and Sabine Freisem presented their findings in January at the SPIE Photonics West conference in San Francisco.
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A pair of Wall Street analysts and a litho exec describe their key takeaways from this year's SPIE Advanced Lithography symposium: How far from HVM are the latest EUV results, how are the competitive source vendors faring, and why some work in improving EUV is falling short.
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For decades, lithography has been the key chip-production technology to scale or shrink a chip. That still holds true. But at the recent SPIE Advanced Lithography conference, there were signs that the lithography community -- and their customers --literally needed a shrink, the slang term for a psychiatrist.
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Among the topics covered at KLA-Tencor's annual Lithography Users Forum at the SPIE Advanced Lithography conference was extension of KLAC's Teron 600 platform for inspection of EUV blanks at the 16nm half pitch node. ... In a podcast interview recorded at the event, Brian Trafas, chief marketing officer at KLA-Tencor, discusses the process control needs facing the semiconductor industry.
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Aki Fujimura, chairman & CEO of D2S, provides an update of the eBeam Initiative roadmap in a podcast interview held at the SPIE Advanced Lithography conference.
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A pair of university professors say they have developed a radio transmission protocol and diagnostic algorithm for wireless sensor networks that enables the real-time streaming of sensor data to measure the local structural deterioration of highway bridges. The protocol is described in a scientific paper posted on the SPIE Newsroom titled "Wireless vibration sensors track condition of highway bridges," authored by Matthew Whelan, Univ. of North Carolina, Charlotte, and Kerop Janoyan, Clarkson Univ.
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Luc Van den hove, president/CEO of IMEC, summarizes key themes from his keynote presentation at the SPIE Advanced Lithography symposium in a podcast interview with SST senior technical editor Debra Vogler.
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At SPIE Advanced Lithography, David Lam, chairman of Multibeam Corp. and the founder and former CEO of Lam Research, presented the concept of complementary e-beam lithography -- a technology that is being used to complement and extend optical lithography for advanced logic ICs. ... In the podcast interview with Debra Vogler, Lam discusses the technology in detail, and also cites the inspiration for his paper: a presentation on complementary lithography by Intel Senior Fellow Yan Borodovsky, at last year's SPIE Advanced Lithography conference.
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During the SPIE Advanced Lithography conference, Applied Materials and Magma Design Automation announced that Magma's CAD-based navigation and yield analysis software has been integrated with Applied Materials' inspection systems; it's called Excalibur Litho and targets designs at 2xnm and below. The companies claim that, without the ability to overcome litho qualification roadblocks rapidly, 22nm designs will be extremely time-consuming and expensive to bring to volume production.
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For imprint watchers, SPIE's Advanced Microlithography in February was very interesting, in that there were several presentations that appeared to be linked, but the presenters denied that there were links ... which makes me think!
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If anything in the litho world is certain, it's that 193nm ArF immersion lithography (193i) is being extended. Nikon's Masato Hamatani opened the Nikon LithoVision conference at this year's SPIE Advanced Lithography symposium, describing concrete efforts in improving overlay to less than 2nm and throughput to 4000 wafers per day.
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Extreme ultraviolet (EUV) lithography was one of six conference tracks and a major point of discussion at the SPIE Advanced Lithography symposium (Feb. 28-Mar.3, San Jose, CA), with dozens of papers presented on various technology and infrastructure areas of EUV development.
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Lithography is where design meets manufacturing, and so the SPIE Advanced Lithography (AL conference this year was where Applied Materials and Magma Design Automation chose to launch their new collaborative solution to the problem of managing yield data when ramping the most complex ICs in high-volume manufacturing (HVM).
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Electron-beam Direct Write (EbDW) lithography on commercial wafers may sneak in the industry behind the technology developments for mask writing. At SPIE AL this year, Aki Fujimora (CEO of D2S and head of the E-beam Initiative) talked with SemiMD about solving today's mask problems using tricks that will be needed before EbDW can be used in HVM.
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This week in San Jose began cold, but warmed up by Thursday to the kind of weather we all expect from California. So too with the conference, and I think Thursday had some of the most interesting, and surprising, presentations.
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Gigaphoton released the latest developments in its EUV source program at this week's SPIE Advanced Lithography conference. The company reported achieving a conversion efficiency (CE) of 3.3% with tin droplets <20µm in diameter with its plasma-based laser-produced plasma (LPP).
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At the SPIE Advanced Lithography conference, ASML Holding NV disclosed more details about its progress with extreme ultraviolet (EUV) lithography.
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"You can't approach the future by predictions. You approach the future by making it happen," Terry Brewer, founder/president of Brewer Science, says. And this mindset carries over into real-world results for the semiconductor industry, he points out: EUV will happen if we want to make it happen." SST's Debra Vogler caught up with Terry Brewer at the SPIE Advanced Lithography symposium.
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Nigel Farrar, VP, marketing & lithography technology, Cymer, provides an update on extreme ultra violet (EUV) source technology -- including training and next-generation timelines -- in a podcast interview at SPIE Advanced Lithography conference.
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At the SPIE Advanced Lithography symposium this week in San Jose, Kurt Ronse, director of lithography at imec, discussed the research center's new ASML pre-production EUV scanner, EUV readiness with source power (still a concern) and resists (practically there). He also discusses the perhaps overlooked topic of pattern collapse.
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Nano-imprint lithography has made solid progress over the years. "Things are really humming for us on both the technology and tool development front in the CMOS space" and in hard disk drives, said Mark Melliar-Smith, president and CEO of Molecular Imprints Inc. ... At SPIE....
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There are two sure bets at the annual SPIE Advanced Lithography symposium, which convened this week in San Jose. First: about half the presenters will show some rendition of the ITRS Roadmap. Couldn't we just begin each session with a slide of the roadmap relevant to that session so we don't collectively burn eight or ten papers in Roadmap Hades? Second: someone will point out (or complain) that EUV gets all the money (okay, only 90% of the money).
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Directed self-assembly (DSA) -- a technology based on a concept that was virtually unknown outside of research labs a few years ago -- has emerged as a legitimate contender for use in future semiconductor manufacturing. "Directed self-assembly cannot be ignored," said Christopher Bencher, a member of the technical staff at Applied Materials Inc., at the SPIE Advanced Lithography conference.
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It's a clash of the titans in the foundry industry between GlobalFoundries Inc. and Taiwan Semiconductor Manufacturing Co. Ltd. (TSMC). The silicon foundry rivals are separately expanding their process offerings and services for customers, but they have different strategies to knock each other off from their respective perches. GlobalFoundries, TSMC, and, of course, Intel Corp., also have slightly different strategies in lithography, which is a big factor in scaling to bring products to market. At the SPIE event this week ....
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At this week's SPIE Advanced Lithography conference in San Jose, Debra Vogler, senior technical editor, caught up with Franklin Kalk, CTO of Toppan Photomasks, to get his input on how EUV lithography development is shaping up, comparing the pros and cons of EUV lithography vs. e-beam direct write (EBDW), and why there's room for both technologies in leading-edge semiconductor manufacturing.
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At the SPIE Advanced Lithography conference, KLA-Tencor Corp. has outlined its metrology and inspection tool roadmap for extreme ultraviolet (EUV) lithography
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At the SPIE Advanced Lithography conference, Luc Van den hove, president and CEO of IMEC, announced during his keynote speech that IMEC has started the installation of ASML's pre-production extreme ultraviolet lithography (EUVL) scanner, the NXE:3100, in its Leuven, Belgium, facility.
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If you attended SPIE's Photonics West 2011, you no doubt saw numerous caped individuals at the Ocean Optics and Edmund Optics booths in the exhibition hall. And who knows -- you may have donned a cape yourself!
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Extreme ultraviolet (EUV) lithography is making progress, but the power source for the technology is behind schedule, warned keynote speakers at the SPIE Advanced Lithography conference.
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At the SPIE Advanced Lithography conference here, Taiwan Semiconductor Manufacturing Co. Ltd. (TSMC) outlined more details about its 450-mm fab plans.
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Japan has formed a consortium to propel the infrastructure for photomask and inspection gear in extreme ultraviolet (EUV) lithography. The group in Japan is called EDEC, said Shang-Yi Chiang, senior vice president of R&D at Taiwan Semiconductor Manufacturing Co. Ltd. (TSMC), during a keynote at the SPIE Advanced Lithography conference.
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Belgian research institute IMEC has announced it has installed an NXE:3100 pre-production extreme ultra-violet lithography machine from ASML at its Leuven facility. Luc Van den hove, President and CEO of IMEC, is expected to announced the move during his keynote speech at today's SPIE Advanced Lithography conference.
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At the SPIE Advanced Lithography conference here, maskless startup Multibeam Corp. will outline more details about its ongoing efforts to commercialize its so-called Complementary E-Beam Lithography (CEBL) technology in the market.
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At the annual LithoVision event here, an executive from lithography vendor Nikon Corp. outlined the business dynamics in the market. LithoVision is sponsored by Nikon. It runs in conjunction with the SPIE Advanced Lithography conference here.
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At the annual LithoVision event here, Japan's Nikon Corp. tipped its lithography roadmap. Nikon disclosed a new 193-nm immersion tool, dubbed the S621D. The company also tipped a separate illuminator product and a metrology technology for extreme ultraviolet (EUV) lithography. LithoVision is sponsored by Nikon. It runs in conjunction with the SPIE Advanced Lithography conference.
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SPIE's Photonics West 2011 saw the launch of new products: including IPG Photonics' (Oxford, MA) quasi-continuous-wave (QCW) fiber laser designed to compete with YAG lasers in materials-processing applications, Horiba's (Edison, NJ) one-shot simultaneous hyperspectral imaging camera that captures spectral information for dynamic events, and Hamamatsu's (Bridgewater, NJ) micro PMT (photomultiplier tube) detector, with the same performance as a regular PMT but in a miniature package.
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The eBeam Initiative has highlighted that several of its members will present the latest breakthroughs in DFEB mask and direct-write technology at the annual SPIE Advanced Lithography symposium 2011 ... four additional companies have joined its ranks.
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At SPIE's Photonics West 2011, research center Imec (Leuven, Belgium) and laser diode manufacturer Opnext (Fremont, CA) described their newest imaging and display technology innovations to the editorial staff of Laser Focus World.
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SEMATECH experts will present world-leading research and development results on extreme ultraviolet (EUV) manufacturability and extendibility, alternative lithography, and related areas of metrology at the SPIE Advanced Lithography 2011 conferences on February 27 - March 3 at the San Jose Convention Center and Marriott in San Jose, CA.
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Researchers are creating a new type of solar cell designed to self-repair like natural photosynthetic systems in plants by using carbon nanotubes and DNA, an approach aimed at increasing service life and reducing cost. ... The concept also was unveiled in an online article featured on the website for SPIE.
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SPIE asked on LinkedIn what our favorite moments from Photonics West 2011 were. Since my answer is lengthy, I am answering on my blog rather than as a comment ... As an exhibitor, it is very easy to answer the question. My favorite moment is always 10AM on Tuesday morning, the moment when a voice announces over the public address system that the show is now open ....
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A video summary of highlights from SPIE Photonics West and the 2010 Prism Awards for Photonics Innovation ....
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Integrated 3-D chips combining logic, memory and optical interconnects are on the horizon, but won't be available for at least 10 years, according to Bert-Jan Offrein, manager of photonics at IBM's Zurich Research Lab. "Things will come together, eventually," Offrein said. Speaking at a panel discussion at the SPIE Photonics West 2011 conference last week, Offrein said the development of optical interconnects is being driven by advances in supercomputing.
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What a difference a year makes. In January 2010, Photonics West was, according to many accounts, a pretty glum affair. Despite the new San Francisco location -- usually enough to lift the spirits of anyone in possession of a soul -- and good attendance, the prevailing mood was one of caution, amid a photonics market that had suffered a major slump in 2009. ... Fast forward to 2011, and the mood could hardly be more different.
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One of several professional development programs at Photonics West this year was "Getting a Job in 2011 and Beyond," a panel discussion held for the benefit of employment seekers of all stripes. Held in conjunction with the SPIE Job Fair, which itself was more successful than any in many years, the discussion provided expertise on job search tactics from people directly involved in the hiring process.
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On the final morning of Photonics West 2011, SPIE hosted a special "Future of Photonics" forum designed to gather industry input for a comprehensive new study of the optics and photonics field. Erik Svedberg, senior program officer with the U.S. National Academies, and Eugene Arthurs, CEO of SPIE, moderated the event, which was attended by hundreds of Photonics West attendees.
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At Photonics West on Monday, as the BiOS part of the week was winding down, SPIE sponsored its first Biophotonics Start-Up Challenge. Based on the concept of the "elevator pitch," 19 researchers -- mostly newly minted PhDs and others at the beginning of their careers -- each offered two-minute descriptions of how their idea was worthy of further development and funding.
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The mood at Photonics West reminded me of a team when it's winning its games. The mood was good and no one wanted to spend too much time second guessing what they are doing. Whatever they are doing, it's working.
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Executives from six laser and optics companies gathered to share their perspectives on the state of the industry Wednesday as part of a SPIE-sponsored panel at Photonics West.
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Because a new market of miniaturized low-cost photonics will soon be created that can leverage the vast scale of CMOS manufacturing to revolutionize industries from computing and communication to biomedicine and imaging, panelists representing different aspects of the industry gathered Tuesday afternoon at SPIE Photonics West to discuss what they have discovered from their positions at the forefront of silicon photonics.
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Interesting tidbit overheard yesterday at the SPIE Photonics West conference in San Francisco. It seems one of the nation's prime defense contractors, in a recent Webcast for its suppliers, is strongly urging its military subcontractors to urge their senators and congressional representatives to preserve current levels of defense spending in the interest of creating and preserving jobs.
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Ocean Optics wants to have fun with their inventions, and so their mesmerizing display at the San Francisco Moscone Center (take a virtual tour) for the world's leading photonics, laser and biomedical optics event -- Photonics West -- is bound to catch your eye.
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Amit Lal envisions a day when tiny wireless sensor networks will be placed throughout the world in areas that can help save lives, prevent disasters, and even help sustain the environment, with a battery-free power supply that will last 100 years. Lal explained how the work of his group could help make that happen in his MOEMS/MEMS symposium plenary talk, "Microsystem Pathways to a Greener World," Monday morning at SPIE Photonics West.
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After expanding by a remarkable 27% in 2010, the global market for lasers is expected to enjoy robust growth in 2011 and into 2012, thanks largely to a sustained recovery in materials processing and communications applications. Speaking at the annual Laser Marketplace Seminar held in parallel with Photonics West in San Francisco, California, the market analysis by Pennwell's Steve Anderson and David Belforte painted a picture of a very healthy industry, following the pain of 2009.
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Research papers on solar cells and LEDs were singled out for their contributions to green photonics by the MOEMS-MEMS (micro-optoelectromechanical systems/microelectromechanical systems) symposium committee at SPIE Photonics West Monday morning.
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The Consumer Electronics Show in Las Vegas in January 2010 was abuzz about a slew of prototype 3D TVs, but if new research from the MIT Media Lab is any indication, holographic TVs could be close behind. At the SPIE Practical Holography conference in San Francisco the weekend of Jan. 23, members of Michael Bove's Object-Based Media Group presented a new system that can capture visual information using off-the-shelf electronics, send it over the internet to a holographic display, and update the image at rates approaching those of feature films.
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A fiber laser that replaces aging flashlamp-pumped solid-state lasers, an analyzer that detects hazardous chemicals in seconds at a distance and spherical and chromatic aberration-free low-cost optical components are among the winners of the 2010 Prism Awards for photonics innovation announced Jan. 26 at a gala ceremony in San Francisco during Photonics West.
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Researchers with Purdue University are creating a type of solar cell capable of self-repair via carbon nanotubes and DNA, according to an article published in the SPIE Newsroom.
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Fluorescent optical ranging systems can rapidly assess and map concentrations of marine oil pollution suspended in the top few meters below the water surface, according to an article authored by researchers at Laser Diagnostic Instruments and PinPoint Environmental published in the SPIE Newsroom.
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UC San Diego environmental engineering professor Jan Kleissl is working on technologies and methods that will better predict how much power we can actually harness from the sun ... Kleissl explains his intensive solar research in a recent video produced by SPIE.
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2010
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According to a recent report from researchers at the Concordia Institute for Information Systems Engineering published in the SPIE Newsroom, infrared-based algorithms offer an alternative for handling variations in face appearance caused by illumination changes, facial expressions, and face poses during facial recognition.
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When Eugene Arthurs, Executive Director of SPIE, visited Singapore for two days in December, the Optics and Photonics Society of Singapore held a welcome party for him.
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After a successful debut in San Francisco last year, SPIE Photonics West is returning to the Golden Gate City for what is shaping up to be a hotbed of industry insights, market trends, the latest technologies and, of course, the ever-popular networking and hobnobbing with some of the finest minds in the photonics and optics industry.
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Knovel, the leading provider of a web-based engineering application integrating technical information with analytical and search tools, today announced new content partnerships with four highly respected publishers and societies, including SPIE.
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Researchers are exploring new user-controlled, efficient lighting systems in an effort to provide better illumination and save energy. The MIT Media Lab aims to build easy-to-control systems that can cut lighting bills by more than half. Preliminary results of the ongoing research of the polychromatic solid-state lighting controlled using a sensor network were published this summer in the Proceedings of SPIE.
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Ebooks are becoming an established and integrated part of research for many people but questions remain about formats and devices ... SPIE Press will have 135 ebooks at the end of 2010.
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The 2011 Photonics West conference and exhibition appears to build on the successful attendance of 2010's show, which moved from San Jose to San Francisco due to record numbers.
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In 1960, Theodore Maiman, a scientist at Hughes Reasearch Laboratories, constructed the world's first working laser. Fifty years later, lasers form an integral part of modern life, with uses in everything from digital video disc players to surgical tools and from bar code scanners to weapons guidance systems.
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The finalists have been named for the 2010 Prism Awards for Photonics Innovation, an international competition sponsored by Photonics Media and SPIE to recognize photonics products that break conventional ideas, solve problems, and improve life through the generation and harnessing of light.
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Vice-chancellors and librarians hope a new report estimating the cost to universities of peer review will help to rein in "excessive" rises in the price of journal subscriptions ... The biggest price rises had come from large publishers, while some smaller ones had frozen or even reduced their prices recently ... The SPIE, an international society for optics and photonics, cut the price of its journal by 10 per cent this year.
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Cue the bats and spooky music. We are about to delve into one of Michigan's most alluring mysteries. It's so alluring, in fact, that it draws a steady stream of pilgrims of the paranormal to the dot-in-the-road town of Paulding all summer long, and into the winter too, just to hang out on the edge of the woods to watch and wait ... A non-scientist might simply conclude that the Paulding Light was no more mysterious than a 1998 pickup truck and call it a day. But the SPIE students wanted to do more.
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SPIE says that its flagship event, Photonics West, will be bigger than ever before in 2011. The exhibition and conference, which takes place at the Moscone Center in San Francisco in late January, is set to attract 18,000 attendees and more than 1200 exhibitors.
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Last January, the French trade mission helped organize a French-American Meeting for Photonics Innovation during the Photonics West trade show. The major clusters and a number of companies working in the sector presented. The trade mission is looking forward to Photonics West 2011, where it hopes to encourage further collaborations between the French and American optics communities.
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IR (infrared) microscopy, which has long played a role in failure analysis and R&D labs, is a relatively new imaging tool in semiconductor fabs, where it is being employed in automated systems for verifying the alignment of wafer-to-wafer bonding in 3-D stacked-IC manufacturing ... presented earlier this year at SPIE Advanced Lithography.
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The study of red rain phenomenon experienced in Kerala may revolutionize research into extraterrestrial life forms. The "blood rain microbes" detected in the red rain experienced in 2001 had "cometic as well as biological" origin, an independent group of astrophysicists have confirmed. Findings were reported at at the recently concluded conference of SPIE in San Diego.
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Using Michael Porter's "The 5 competitive forces that shape strategy" as a template, Franklin Kalk, CTO of Toppan Photomasks, examined the photomask industry structure and how it determines industry profitability at SPIE Photomask Technolocy. Kalk spoke with senior technical editor Debra Vogler in-depth about the photomask industry.
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Brion Technologies, a division of ASML, debuted the Tachyon NXE software to optimize predictive modeling for ASML Extreme Ultraviolet (EUV) scanners, during the SPIE Photomask Technology/BACUS conference.
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Infotrieve, Inc., a developer of business service solutions for information centers, entered into agreements with six leading publishers and content aggregators inlcuding SPIE.
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The eBeam Initiative, a forum dedicated to the education and promotion of a new design-to-manufacturing approach known as design for e-beam (DFEB), today announced that several of its members will jointly present the latest breakthroughs in DFEB mask technology at the annual SPIE/BACUS Photomask Technology symposium -- a worldwide technical conference and exhibition and premier event for the photomask industry.
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2009 Prism Award winners and finalists talk about the value of entering the Prism Awards and receiving a nomination for their innovative photonics-related product. The Prism Awards are presented by Photonics Media and SPIE during Photonics West in January.
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MCA, a global high-tech communications agency, today announced it will be hosting its next online panel discussion in cooperation with SemiNeedle, dubbed the BrightSpots Lithography Forum, which will enable industry professionals to partake in an active discussion exploring the key issues surrounding the future of lithography. On Tuesday, September 14, a live panel event, also available online, will be held during the SPIE/BACUS Photomask Technologies symposium and will kick off an online discussion forum that will begin the next day, September 15.
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A pavilion on the exhibit floor of the recent SPIE conference in San Diego, CA showcased consumer-level applications of photonics technology as well as several projects bringing energy-efficient lighting and cooking capabilities to the developing world. Presented under the rubric of Photonics for a Better World ....
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During SPIE Optics + Photonics, researcher Michael O'Connor of the Mayo Clinic gave a presentation titled "Development of radiation dose reduction techniques for cadmium zinc telluride detectors in molecular breast imaging."
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At the SPIE Optics + Photonics 2010 conference, the Engineering Services team at Optical Research Associates (ORA) demonstrated a prototpye head-worn personal display. ORA envisions a future in which people will transition from handheld cell-phone displays to a more elegant head-worn personal display for mobile information needs.
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Sponsored by SPIE in the "Photonics for a Better World" pavilion at SPIE Optics + Photonics 2010, the One Million Lights exhibitor booth intrigued attendees and spurred donations. One Million Lights is a Palo Alto, Calif., based nonprofit with a goal to distribute 1,000,000 environmentally friendly, re-chargeable solar lights to adults and children in off-the-grid, developing regions around the world to replace toxic and expensive kerosene lanterns.
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The UNESCO program Active Learning in Optics and Photonics (ALOP) -- delivered by an international team of physics educators that includes faculty members of the Physics Department -- has received an award from SPIE, the international society advancing light-based research, honoring its work in promoting optics education around the world.
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More than 4,200 attendees and 233 exhibitors were in San Diego to discuss the impact that photonics can have on clean energy generation and efficient consumption. With a growing focus on solar energy technologies, sunny San Diego is becoming an increasingly appropriate venue for SPIE's annual Optics + Photonics event.
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Scientists from the Magdalena Ridge Observatory -- including several students -- made a big splash at the biennial SPIE Astronomical Telescopes and Instrumentation conference in San Diego in late June.
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Optics and photonics meet solar and nanotechnology at SPIE's Optics + Photonics 2010 conference and exhibition, to be held Aug. 1-5 at the San Diego Convention Center.
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Laser light shows are returning to Flandrau planetarium after 10 years.... Beginning with fall semester, visitors will also have a rare opportunity to explore the history of the laser and the physics behind this amazing and versatile technology in Flandrau's expansive exhibits hall. The story of the laser will be presented through a unique historical laser display created by SPIE, featuring over 130 lasers and backdrops describing their history and many applications.
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The Academy of Natural Sciences' "Seeing Eye-to-Eye" program developed with the help of a grant from SPIE.
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This year marks the laser's 50th birthday, and SPIE is presenting "Advancing the Laser," a series of weekly video interviews with pioneers and experts from the laser sector. TRUMPF celebrates with an anniversary microsite and look at laser history at TRUMPF.
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Researchers at GE Global Research Laser and Metrology Labs have launched a new blog series through which to celebrate the 50th anniversary of the laser, with video interviews, archival video, and more stories.
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During the Executive Panel discussion at Photonics West in January, there was a lively debate about recruitment, and more specifically, about from where the next batch of optical engineers would emerge. There are a number of interesting initiatives around the world, each of which aims to bring industry and academia together to generate interest in photonics, and present it as a genuine career opportunity for budding scientists. ... SPIE is involved in education initiatives worldwide, and engages in different approaches, depending on the age of the student.
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From April 12-16th the whole photonics community met at SPIE Photonics Europe 2010 in Brussels. Recent research, intense networking, and EU initiatives were the focus of the conference. Over 2,000 participants from around the world attended the event. Thus, the event has established itself after only a few years as one of the largest of its kind in Europe.
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I recently had the opportunity to spend a few days at the annual SPIE show in Orlando, Florida, After spending time walking the larger then normal show, I realized that this year there were more exhibitors ...
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William Silfvast is renown for the number of new lasers he discovered. As a doctoral student he produced laser action for the first time in the vapor of nine elements.
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Scientists at the National Institute of Standards and Technology (NIST) announced in a presentation at SPIE Defense, Security, and Sensing that they have developed the world's most efficient single photon detector, able to count individual particles of light traveling through fiber optic cables with roughly 99 percent efficiency. The team's efforts could bring improvements to secure electronic communication, advanced quantum computation and the measurement of optical power.
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French R&D consortium LETI has integrated a laser source with a silicon waveguide in a CMOS flow, an advance toward the goal of fabricating an optical interconnect network on a chip. The work is part of the EU-funded Wadimos project, which will provide a progress report at SPIE Photonics Europe 2010 this week.
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Cameras for use in all environments and lighting conditions exhibited at SPIE conference: The SPIE Defense, Security and Sensing symposium is one of the leading conferences for showcasing optoelectronic and electronic equipment used in the military sector. The latest technologies and applications ininfrared, sensors, image analysis and devices were presented.
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"We are in a period of significant change and uncertainty," said Zachary J. Lemnios during his symposium-wide plenary lecture Tuesday morning at the SPIE Defense, Security & Sensing conference and trade show.
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Whether you're scanning items at the grocery store or watching a movie on a Blu-ray disc, it's likely lasers are a part of your life in more ways than you realize. The CREOL Association of Optics Students is bringing the 50th anniversary celebration of the laser to its Optics Day and SPIE Symposium.
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This year's show is the result of combining the former SPIE Optics East sensing conference with SPIE Defense and Security conference, strengthening the program to bring together scientists and engineers from industry, military, academia and government agencies from around the world.
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Considered the number-one show for infrared (IR) imaging, optics and sensors, and the largest international unclassified defense-related symposium, SPIE Defense, Security, and Sensing 2010 will offer attendees access to more than 2300 technical presentations, 500 exhibiting companies and 50 professional development courses and workshops all in one place. The five-day conference and exhibition will take place April 5-9 at the Orlando World Center Marriott Resort and Convention Center in Orlando.
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SPIE has handpicked some of the top minds from academia and industry to lead over 50 courses covering IR sensing and systems, lasers, robotics, homeland security, sensor data and more.
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EUV was supposed to have replaced conventional optical lithography by now. But optical lithography is still driving the semiconductor engine; during the recent SPIE Advanced Lithography conference and other events, EE Times posed these questions to lithography experts and executives.
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In April the photonics community will be headed for Orlando, but not for Disney. The attraction rather is SPIE's Defense, Security and Sensing Conference and Exhibition.
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The SPIE Photonics West conference at San Francisco's Moscone Center is the annual flagship event where industry leaders in laser and photonics technologies unveil their newest innovations.
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In addition to other recent video from SPIE's Photonics West 2010, we talked to Vytran about much more than fusion splicing, Toshiba showed us images of their tiny camera flying into space on a chair carried by a balloon, and our videographers in Tulsa, Oklahoma, put together a summary "Highlights Show" that will hopefully summarize the flavor of Photonics West 2010.
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This year's plenary sessions of the SPIE Advanced Lithography Symposium exposed the complexities of patterning ICs in high-volume manufacturing (HVM) at the 22nm node and beyond.
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Podcasts from interviews conducted with semiconductor experts at SPIE Advanced Lithography cover double-patterning, CMOS, photoresist matching, and more.
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At SPIE's Photonics West 2010, representatives from StellarNet, Stanford Photonics, and Newport spoke to Laser Focus World about their latest technologies.
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The constant shrinking of IC features, defined by Moore's Law, has provided great economic benefit. Those gathered at the recent SPIE Advanced Lithography Conference are dedicated to this pursuit -- but their future is not clear.
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Well over a dozen papers at this year's Photonics West meeting in San Francisco boasted improvements in harmonic generation to produce visible laser beams, most of them in the green spectral range.
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Photonics Media publishes photos from the 2009 Prism Awards for Photonics Innovation banquet held at SPIE Photonics West in San Francisco last January.
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Photonics West 2010 was held in a new venue this year, moving from the San Jose Convention Center where it had been held for years to the Moscone Center in San Francisco.
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The SPIE advanced lithography symposia reminded me of baseball spring training. The pervasive "collaboration speak" in lithography circles has transformed the various camps into ersatz teams.
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As a follow-up to last week's SPIE Advanced Lithography conference in San Jose, Vivek Bakshi provides an update and his own perspective on the readiness of EUV lithography.
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Barclays Capital's C.J. Muse came away from SPIE with the message that litho demand is strong, with a "heightened focus on EUV" due to increased costs associated with double patterning.
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Several discussions and presentations at last week's SPIE Advanced Lithography Conference deserve special note -- from work with e-beam EUV mask inspection, to nanoimprint achievements (11nm!), an EUV tool platform roadmap, mask productivity and cost issues at 22nm, and more on SMO and tunable DOEs
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