David Markle, Periodic Structures Inc., Los Gatos, CA, USA, is the 2013 recipient of the Frits Zernike Award for Microlithography in recognition of his pivotal role in the development of numerous lithography tools, including the Perkin-Elmer Micralign and Micrascan tools, and the Ultratech Stepper. His insights and engineering talents have helped to guide both mechanical and optical designs of lithography tools for the last 40 years.
