Due Dates & Contacts | Advanced Lithography

Due Dates and SPIE Contacts

Abstract Due Date: 12 September 2011

Author Notification: 26 October 2011

Manuscript Due Date: 16 January 2012

For questions about your presentation or the meeting, contact the Conference Program Coordinator listed below.

For questions about your manuscript, contact the Proceedings Coordinator listed below. The MySPIE.org Manuscript Submission Site will open 19 December 2011.

Vol. No.	Title	Manuscript Due Date	Program Coordinator	Proceedings Coordinator
8322	Extreme Ultraviolet (EUV) Lithography III	16-Jan-12	Pat Wight	Jenny Woods
8323	Alternative Lithographic Technologies IV	16-Jan-12	Pat Wight	Joel Shields
8324	Metrology, Inspection, and Process Control for Microlithography XXVI	16-Jan-12	Pat Wight	Kristina Nelson
8325	Advances in Resist Materials and Processing Technology XXIX	16-Jan-12	Pat Wight	Pat Wight
8326	Optical Microlithography XXV	16-Jan-12	Pat Wight	Andrea Heimer
8327	Design for Manufacturability through Design-Process Integration VI	16-Jan-12	Pat Wight	Joel Shields
8328	Advanced Etch Technology for Nanopatterning	16-Jan-12	Pat Wight	Joel Shields

Due Dates and SPIE Contacts

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