Hitachi High-Technologies Corporation has developed the SU8000, a new type of Field Emission Scanning Electron Microscope (FE-SEM) that features a newly developed top detector.
Hitachi SEMs contribute to research and development in the fields of medicine, biotechnology, and advanced nanotechnology materials. The company's line-up of easy to use SEMs provides these industries with the ability to image samples for topographical observations and analyses.
The new SU8000 features a top detector along with a semi-in-lens type of objective lens. This technology is a further advance on the popular upper backscattered electron detector used in the S-5500. By combining the top detector with the conventional upper detector technology, Hitachi has now developed a new signal detection system for optimum contrast visualization of signals, generated from the sample. These signals include secondary electrons, low-angle backscattered electrons and high-angle backscattered electrons, which are acquired for observation of surface structures.
This top detector can detect high-angle backscattered electrons at low accelerating voltages. This imaging component includes channeling and compositional contrast of the sample's top surface. With Hitachi's beam deceleration technology and the use of the top detector, high-resolution observations can be performed at ultra-low landing voltages.