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SPIE Micro/Nanolithography Publications

Digital Library
Current Subscriber Access:  Technical Papers and Journal Articles
Subscription Information:  Individual | Institutional

Conference Proceedings
Advanced Lithography 2010 | 2011 | 2012 | 2013
BACUS Symposium on Photomask Technology 20092010 | 2011 | 2012
Photomask and Next-Generation Lithography Mask Technology
     2008 | 2009 | 2010
MOEMS-MEMS: Part of Photonics West 20102011 | 2012 | 2013

 

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Featured Title

Author(s): Hong Xiao
Introduction to Semiconductor Manufacturing Technology, Second Edition
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Author(s): Burn J. Lin
Optical Lithography: Here Is Why
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New and forthcoming books from SPIE Press

Chemistry and Lithography
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Advanced Processes for 193-nm Immersion Lithography
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Author(s): Alfred K. K. Wong
Optical Imaging in Projection Microlithography
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Author(s): Harry J. Levinson
Principles of Lithography, Third Edition
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Author(s): Chris A. Mack
Field Guide to Optical Lithography
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