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6 November 2009: myCD
Abeam Technologies
myCD software is used to analyze an SEM image, extract contours, and find information regarding linewidth of critical dimensions.
The analysis is based on an understanding of physical principles involved in the formation of the SEM signal. Some parameters such as beam voltage and materials should be known to the operator as the input data along with the SEM image.
The results are CDs at the top and bottom of features, LER, LWR, side wall angle.
Find out more or contact Abeam Technologies