Conferences & Exhibitions Calendar
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SPIE Advanced Lithography 12 - 16 February 2012
San Jose Convention Center and San Jose Marriott
San Jose, California, USA

Exhibitor Product Announcements

Product announcements will be posted as they are received.

7 February 2012: LAS-BT Lens Alignment System

Opto-Alignment Technology, Inc.

Opto-Alignment Technology has been building sub micron accuracy lens centration and tilt measurement systems since 1992. The new LAS-BT Laser Alignment and Assembly Station is a compact, non-contact, bench-top instrument that will improve the quality of assembly and inspection of your precision multi-element lens assemblies and doublet cementing.

Packed with high performance features:
The “LAS-BT” is designed for fast setup and ease of use. The visible diode laser beam measures tilt smaller then 5 arc seconds by reflecting from any radii of curvature from ±2 mm to infinity, and provides centration accuracy of less than 5 microns. The compact optical sensing head moves easily on a firm, vertical column using an economic manual Z-drive, utilizable on any lens surface, spherical to cylindrical. Perfect for cementing doublets, mounting glass and crystal optical components, or potting sub-assemblies and assembling compact lens systems. Vacuum adoptable brass mounting base and chucks are available to accommodate lenses from 2 mm to 100 mm diameter, and the system handles coated and uncoated lenses with equal ease.

OAT also offers Ultra Precision systems for 0.2 um centration, and Z-axis operation over 1.5m on the “LAS-UP” model. The “LAS-LS” Lithography model is for diameters over 600mm and can measure 2 arc second deviations.

Read more about the Laser Alignment Station at www.optoalignment.com or visit Steve Bohuczky, Director of Sales and Business Development at Booth 318 and testdrive the LAS-BT.

Find out more or contact Opto-Alignment Technology, Inc.

29 December 2011: 3D Laser Scanning Microscope: VK-X200

KEYENCE Corporation

Perform Profile and Roughness Measurements on Nearly Any Material – VK-X Series 3D Laser Scanning MIcroscope

The new KEYENCE VK-X Series 3D Laser Scanning Microscopes combine the capabilities of SEMs and non-contact roughness gauges with the simplicity of an optical microscope. This newly released system now boasts an unprecedented 0.5 nanometer Z-axis resolution with a magnification range spanning 200x – 24,000x. The usability and ease-of-use have been further improved with the addition of the AI-Scan function, allowing users to image and measure a target with just a click of the mouse.

With high-resolution color imaging and nanometer-level profile measurement functions, the VK-X Series Laser Scanning Microscopes have been designed to overcome the inadequacies of conventional imaging and profiling technologies. A short-wavelength laser scans across a target to provide non-contact profile, roughness and thickness measurements, even on targets with highly-angular surfaces. By combining the laser with an industry-leading, 16-bit photomultiplier, the VK-X can obtain an image and measurement on nearly any type of material, as well as thickness measurements on transparent films and coatings.

In order to simplify the operation of the VK-X, the AI-Scan function was developed to automate the scanning process. Users can simply place their sample on the stage, and by clicking a single button, the system will automatically adjust the sensitivity of the photomultiplier, set the upper and lower limits of the scan range and re-scan the target as needed to make sure all of the necessary information was captured. By using this function, even inexperienced users can quickly and easily obtain accurate measurement data and high-resolution images.

Additional features include a new WIDE-Scan function that is 8x faster than conventional laser scanning microscopes, while also improving the quality of the captured image. A high-speed auto-focus algorithm has been incorporated into the system, and images can be captured at up to 21.6 megapixels. All of the measurement functions from our previous VK Series product line have been extended to the VK-X, including the ability to measure the thickness or profile/roughness of transparent materials.

Find out more or contact KEYENCE Corporation

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