The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the future needs of the electronics, micro-opto-electro-mechanical (MEMS and MOEMS), and photonics industries. The scope is broad, to facilitate synergy and interest between the communities served by the journal.
