Microelectronics, MEMS, and Nanotechnology 2007 (AU07) offered attendees the opportunity for in-depth communication with researchers and developers in areas such as smart materials, smart structures, smart micro/nano- electronics devices and systems, micro- and nano- technology with special emphasis on packaging and integration of MEMS and NEMS for diverse application areas as well as biomedical applications such as bio-surveillance systems.
This symposium attracted 341 submissions from 27 countries - with extensive emphasis on micro and nanofabrication technologies.
Topics ranged:
Microelectronics: Design, Technology,& Packaging
Smart Structures, Devices, and Systems
Device & Process Technologies for Microelectronics, MEMS, Photonics & Nanotechnology
Photonics: Design, Technology, & Packaging
Complex Systems
Thank you to everyone who helped make SPIE Microelectronics, MEMS, and Nanotechnology 2007 a great success.
