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Hot Topics in Advanced Lithography Webcast Series - EUV


EUV Lithography - View archived webcast

Chair - Vivek Bakshi, Senior Member Technical Staff, EUV Strategy, Lithography Division, SEMATECH, Inc. (Austin, TX)

Talk: EUV Source Technology

Vivek Bakshi is a senior member of the Lithography Division technical staff at SEMATECH. He received a MSc in Physics from the Indiian Institute of Technology in Kanpur, India, in 1985 and PhD in Physics from the University of Idaho in 1988. He has published a multi-author book with SPIE and has co-authored more than 90 technical publications, including refereed and trade journal articles.

Presenter - Michael Lercel, Director, SEMATECH Lithography (on assignment from IBM) (Austin, TX)

Talk: ITRS litho roadmap and recent patterning results

Michael Lercel is the director of the lithography division of SEMATECH and comes as an assignee from IBM Microelectronics, where he most recently worked as manager of Lithography Research and at the company's Semiconductor R&D Center in Hopewell Junction, NY and Yorktown Heights, NY. Lercel has also worked on Next Generation Lithography masks at the IBM Advanced Mask Facility.

Presenter - Ben Eynon, Associate Director, SEMATECH Lithography Division (on assignment from Samsung) (Austin, TX)

Talk: Addressing mask challenges in EUV Lithography

Ben Eynon is associate director of the lithography division of SEMATECH while on assignment from Samsung. With 20 years of experience in the industry, his career has included senior technology roles within KLA-Tencor, Photronics, DuPont Photomasks, Texas Instruments and Motorola. He has authored a book and published 29 technical papers and articles.

You Will Learn:
Three approaches to resolution improvement in semiconductor manufacturing
· The latest advances in EUV lithography, including sources and masks
· How immersion techniques are making ever higher NAs possible
· Technical and budgetary issues in using double patterning to influence k1

Who Should View:
Researchers and engineers in semiconductor manufacturing
· Managers of lithography teams
· Purchasers of leading-edge lithographic machinery

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