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    26 February - 2 March 2017
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    Advanced Lithography | Proceedings

    Advanced Lithography 2011
    Full-text papers on CD-ROM from all 6 Proceedings volumes. PC, Macintosh, and Unix compatible.
    (Includes Vols. 7969-7974),
    Order No. CDS426 • Est. pub. April 2011
    Meeting attendee: $135
    Nonattendee member price: $475
    Nonattendee nonmember price: $620

    Printed Proceedings: Editor-reviewed papers from individual conferences are printed within six weeks of the meeting.

    Important Dates

    Abstracts Due
    Late submissions may be considered. Please send your submission to Pat Wight, SPIE Conference Program Coordinator.

    Author Notification
    24 October 2016

    Manuscripts Due
    30 January 2017


    Canon


    Browse Defense, Security, and Sensing 2011 papers


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