Searchable CD-ROMs with multiple conferences. Available within eight weeks of the meeting.
Full-text papers from all 6 Proceedings volumes. PC, Macintosh, and Unix compatible.
Advanced Lithography 2010
(Includes Vols. 7636-7641),
Order No. CDS379 • Est. pub. April 2010
Meeting attendee: $135
Nonattendee member price: $505
Nonattendee nonmember price: $660
