• Advanced Lithography 2014
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SPIE Advanced Lithography 23 - 27 February 2014
San Jose Convention Center and San Jose Marriott
San Jose, California, United States

Advanced Lithography | Proceedings

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Proceedings on CD
Choose this option if you are interested in searching editor-reviewed papers from multiple conferences and a broad topical area. You can search for specific areas of interest. CD are available within 8 weeks of the meeting. PC, Macintosh, and Unix compatible.

Printed proceedings
If you are only interested in editor-reviewed papers from a single conference or want an archive of the conference that includes your paper, choose the printed book, available 6 weeks after the conference.



Proceedings on CD

Advanced Lithography 2013
(Includes Vols. 8679-8685)
Order No. CDS505 Est. pub. April 2013
Meeting attendee: $135
Nonattendee member price: $480
Nonattendee, nonmember price: $635




Printed proceedings

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