Create an account | Sign in about us | contact us | help | shopping cart
Conferences & Exhibitions Calendar
Advanced Lithography 2012
Invitation from the Chairs
Participants
Entire Program
Conferences
Courses
Award Announcements
Plenary, Technical, Special Events
Exhibition
Exhibitor Services
Author/Presenter Information
Chair/Committee Information
Hotel + Travel
Registration
Proceedings
Policies + Information
Print PageEmail Page
SPIE Advanced Lithography 12 - 16 February 2012
San Jose Convention Center and San Jose Marriott
San Jose, California, USA

Advanced Lithography | Proceedings


Proceedings on CD-ROM
Full-text papers on CD-ROM from all 6 Proceedings volumes. PC, Macintosh, and Unix compatible.
(Includes Vols. 8322-8328),
Order No. CDS468 • Est. pub. April 2012
Meeting attendee: $135
Nonattendee member price: $535
Nonattendee nonmember price: $700


Printed Proceedings
Editor-reviewed papers from individual conferences are printed within six weeks of the meeting.

Extreme Ultraviolet (EUV) Lithography III
Editor(s): Patrick P. Naulleau
Member price: $130.00 Nonmember price: $170.00
Alternative Lithographic Technologies IV
Editor(s): William M. Tong
Member price: $125.00 Nonmember price: $165.00
Metrology, Inspection, and Process Control for Microlithography XXVI
Editor(s): Alexander Starikov
Member price: $135.00 Nonmember price: $180.00
Advances in Resist Materials and Processing Technology XXIX
Editor(s): Mark H. Somervell
Member price: $120.00 Nonmember price: $160.00
Optical Microlithography XXV
Editor(s): Will Conley
Member price: $125.00 Nonmember price: $165.00
Design for Manufacturability through Design-Process Integration VI
Editor(s): Mark E. Mason
Member price: $70.00 Nonmember price: $90.00
Advanced Etch Technology for Nanopatterning
Editor(s): Ying Zhang
Member price: $53.00 Nonmember price: $70.00
Back to top
Search Program
To refine your search, check all that apply
 Oral & Poster Presentations
 Special Forums & Events
 Courses
 Exhibitors & Products
View My Schedule