• Advanced Lithography 2015
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San Jose Marriott and San Jose Convention Center
San Jose, California, United States
22 - 26 February 2015
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Advanced Lithography | Proceedings

Choose your proceedings. 

Proceedings on CD
Choose this option if you are interested in searching editor-reviewed papers from multiple conferences and a broad topical area. You can search for specific areas of interest. CD are available within 8 weeks of the meeting. PC, Mac, and Unix compatible.

Printed proceedings
If you are only interested in editor-reviewed papers from a single conference or want an archive of the conference that includes your paper, choose the printed book, available 8 weeks after the conference.


Proceedings on CD

Advanced Lithography 2014
(Includes Vols. 9048-9054)
Order No. CDS541 Est. pub. April 2014
Meeting attendee: $155
Nonattendee member price: $385
Nonattendee, nonmember price: $515


Printed proceedings

Editor(s): Obert R. Wood II; Eric M. Panning
Member price: $135.00 Nonmember price: $180.00
Editor(s): Douglas J. Resnick
Member price: $120.00 Nonmember price: $160.00
Editor(s): Jason P. Cain
Member price: $130.00 Nonmember price: $170.00
Editor(s): Thomas I. Wallow
Member price: $105.00 Nonmember price: $140.00
Editor(s): Kafai Lai
Member price: $120.00 Nonmember price: $160.00
Editor(s): John L. Sturtevant
Member price: $60.00 Nonmember price: $80.00
Editor(s): Gottlieb S. Oehrlein
Member price: $53.00 Nonmember price: $70.00
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