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SPIE Advanced Lithography 12 - 16 February 2012
San Jose Convention Center and San Jose Marriott
San Jose, California, USA

Advanced Lithography | Proceedings


Proceedings on CD-ROM
Full-text papers on CD-ROM from all 6 Proceedings volumes. PC, Macintosh, and Unix compatible.
(Includes Vols. 8322-8328),
Order No. CDS468 • Est. pub. April 2012
Meeting attendee: $135
Nonattendee member price: $535
Nonattendee nonmember price: $700


Printed Proceedings
Editor-reviewed papers from individual conferences are printed within six weeks of the meeting.

Editor(s): Patrick P. Naulleau
Member price: $130.00 Nonmember price: $170.00
Editor(s): William M. Tong
Member price: $125.00 Nonmember price: $165.00
Editor(s): Alexander Starikov
Member price: $135.00 Nonmember price: $180.00
Editor(s): Mark H. Somervell
Member price: $120.00 Nonmember price: $160.00
Editor(s): Will Conley
Member price: $125.00 Nonmember price: $165.00
Editor(s): Mark E. Mason
Member price: $70.00 Nonmember price: $90.00
Editor(s): Ying Zhang
Member price: $53.00 Nonmember price: $70.00
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