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SPIE Advanced Lithography 2007 on SPIE.TV

These webcasts have expired.

The plenary presentations and a special panel session at this year's SPIE Advanced Lithography conference were captured for webcast and are now available to view anytime-at no charge to you-with the support of CYMER, sponsor of the video coverage.


Nanoscale Patterning Challenges for CMOS Density Scaling

Johannes M.C. (Hans) Stork, Senior Vice President and Chief Technology Officer, Texas Instruments Inc.


Collaborative Innovation: IBM's Immersion Lithography Strategy for 65 nm and 45 nm Half-pitch Nodes & Beyond

George A. Gomba, IBM Distinguished Engineer and Director of Lithography Technology Development, IBM Corp.

Lithography Beyond 32 nm: A Role for Imprint?

Mark Melliar-Smith, CEO, Molecular Imprints, Inc.



Panel Discussion - Virtual Lithography: The Next Generation?

Chairs: Mircea V. Dusa, ASML MaskTools and Nigel R. Farrar, CYMER


In this panel discussion, nine experts discuss the outlook for automated algorithms, engineering analysis and simulation driving next-generation lithography. Panelists include: Andy Neureuther, Univ of California, Berkeley; Alfred Wong, Magma Design Systems; Neal Callan, Brion Technologies, Inc.; Scott Mansfield, IBM Microelectronics Div.; Tatsuhiko Higashiki, Toshiba; Cyrus Tabery, Advanced Micro Devices; Kurt Ronse, IMEC; Steve Renwick, Nikon Precision; and Koichiro Tsujita, Canon.


Video coverage sponsored by CYMER

SPIE.TV