Special Forums & Events | Advanced Lithography

Kazuo Ushida, President, Precision Equipment Co., Nikon Corp., presents "The Future of Optical Lithography"
Eric Chen, Managing Director, Silver Lake Partners, presents "Investing in Technology Industries in the Reset Economy"
Sam Sivakumar, Director of Lithography, Portland Technology Group, Intel Corp., presents "Lithography of the Future: A Technical and Economic Challenge"

2009 Best Paper Announcement
2009 C. Grant Willson Best Paper Announcement, sponsored by AZ Electronic Materials and Rohm and Haas Electronic Materials
Optical Microlithography Best Student Paper Award, sponsored by Cymer
Nanotechnology in Microlithography Panel Discussion: Self-Assembling Molecules for Semiconductor Patterning and Nanoelectronics
BACUS Technical Group Panel Discussion: EUV Source $10M. EUV Scanner $100M. Defect Free EUV Photomask, Priceless! For some there's NIL, for everyone else, there's EUV
Panel Discussion: New Metrology in the Present Economy
Panel Discussion: The Trial of EUV and DPT ArF for the 22nm 1/2 Pitch Node
National Institute for Standards and Technology Panel Discussion: Strategies for Increasing the Value of Metrology and Inspection, sponsored by NIST
Panel Discussion: The Role of Reference Metrology in Nanotechnology Progress
Poster Receptions

Special Forums and Events