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Publication Charges for the Journal of Micro/Nanolithography, MEMS, and MOEMS

Publication charges for the Journal of Micro/Nanolithography, MEMS, and MOEMS are $100 per published page and can be paid online. Select the total number of pages on your final proof from the dropdown menu below, and amount owed will be calculated automatically. Upon completion of checkout, you will receive a receipt of payment that can be printed for your records.

Authors who choose to pay publication charges in full receive the benefit of Gold open access.


If you require an invoice:

If you are not prepared to pay directly by credit card, you may request an invoice from our accounting department by completing the Publication Charge Form with your relevant paper and billing information. An invoice will be generated for you within 2-3 business days.

If you have already received an invoice from our accounting department, please do not pay here; instead, you can enter your order number and pay on your existing invoice at spie.org/payment. Contact our accounting department at jnl-acct@spie.org with any questions.