Brunner, Timothy A.

Dr. Timothy A. Brunner

Fellow
GLOBALFOUNDRIES Inc
Fellow Member

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Area of Expertise: microlithography, optical lithography, process control, IC production lithography
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Summary
For the past 35 years, I have been working in the area of lithographic patterning for IC production - a most fascinating, interdisciplinary area. Some particular interests include advanced image formation, simulation, process control, metrology methods and data analysis.
I have a B.A. from Carleton College in 1975 and a doctorate from MIT in 1980, both in physics. Before joining GLOBALFOUNDRIES in 2015, I worked for IBM, Perkin-Elmer Corporation and Xerox PARC.
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