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Dr. Thomas Pistor

Dr. Thomas Pistor

Panoramic Technology Inc
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SPIE Involvement: Author
Publications   Most recent | Show all (19)
Photoresist shrinkage effects at EUV (Conference Proceedings)
Photoresist shrinkage effects at EUV  (Conference Proceedings)
Authors: Thomas Pistor, Thomas Wallow, Christopher Anderson, et al.
Published: 08 Apr 2011
Impact of substrate surface scratches on the laser damage resistance of multilayer coatings (Conference Proceedings)
Impact of substrate surface scratches on the laser damage resistance of multilayer coatings  (Conference Proceedings)
Authors: S. Roger Qiu, Justin Wolfe, Anthony Monterrosa, et al.
Published: 06 Dec 2010
Modeling of light intensification by conical pits within multilayer high reflector coatings (Conference Proceedings)
Modeling of light intensification by conical pits within multilayer high reflector coatings  (Conference Proceedings)
Authors: S. Roger Qiu, Justin Wolfe, Anthony Monterrosa, et al.
Published: 31 Dec 2009
Electric-field enhancement by nodular defects in multilayer coatings irradiated at normal and 45° incidence (Conference Proceedings)
Electric-field enhancement by nodular defects in multilayer coatings irradiated at normal and 45° incidence  (Conference Proceedings)
Authors: Christopher Stolz, Francois Genin, Thomas Pistor
Published: 10 Jun 2004
Bias optimization through simulation for contact array pattern (Conference Proceedings)
Bias optimization through simulation for contact array pattern  (Conference Proceedings)
Authors: Thomas Pistor, Ksenia Berger
Published: 17 Dec 2003

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