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Dr. Thomas Pistor

Dr. Thomas Pistor

Panoramic Technology Inc
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SPIE Involvement: Author
Publications   Most recent | Show all (22)
Evaluating printability of buried native extreme ultraviolet mask phase defects through a modeling and simulation approach (Journal Paper)
Evaluating printability of buried native extreme ultraviolet mask phase defects through a modeling and simulation approach  (Journal Paper)
Authors: Mihir Upadhyaya, Vibhu Jindal, Adarsh Basavalingappa, et al.
Published: 01 Apr 2015
Investigating deprotection-induced shrinkage and retro-grade sidewalls in NTD resists (Conference Proceedings)
Investigating deprotection-induced shrinkage and retro-grade sidewalls in NTD resists  (Conference Proceedings)
Authors: Thomas Pistor, Chenchen Wang, Yan Wang, et al.
Published: 18 Mar 2015
Evaluating printability of buried native EUV mask phase defects through a modeling and simulation approach (Conference Proceedings)
Evaluating printability of buried native EUV mask phase defects through a modeling and simulation approach  (Conference Proceedings)
Authors: Mihir Upadhyaya, Vibhu Jindal, Adarsh Basavalingappa, et al.
Published: 16 Mar 2015
Photoresist shrinkage effects at EUV (Conference Proceedings)
Photoresist shrinkage effects at EUV  (Conference Proceedings)
Authors: Thomas Pistor, Thomas Wallow, Christopher Anderson, et al.
Published: 08 Apr 2011
Impact of substrate surface scratches on the laser damage resistance of multilayer coatings (Conference Proceedings)
Impact of substrate surface scratches on the laser damage resistance of multilayer coatings  (Conference Proceedings)
Authors: S. Roger Qiu, Justin Wolfe, Anthony Monterrosa, et al.
Published: 06 Dec 2010

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