Mr. Takayuki Uchiyama

General Manager
EIDEC


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Summary
Research and development of advanced lithography
Experience includes the production engineering of Lithography process and the development of i-line, KrF, ArF and ArF immersion lithography
The chairman of lithography team in Japan of ITRS from 2009 to 2012.
A pioneer in terms of ArF immersion lithography and SMO (source mask co-optimization)
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