Mehta, Sohan S.

Mr. Sohan S. Mehta

Principal Member of Technical Staff ( PMTS)
GLOBALFOUNDRIES Inc.


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Area of Expertise: Lithography process design interaction, EUV, Multiple patterning ( LELE,LELELE, SADP), Defectivity analysis and improvement, Thick film PSPI process, Immersion lithography and NTD
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Summary
Sohan Mehta is currently PMTS in the advanced lithography group at the GLOBALFOUNDRIES Inc. Malta, NY, USA. He earned his MS degree in Applied Optics from the Indian Institute of Technology(IIT) Delhi, India in 1997.He has published over 40 papers ( lithography field) in prestigious conferences and journals including invited papers.Sohan has filed 8 US patents and 2 trade secrets in advanced lithography. He is serving as a reviewer for several journals in lithography area. Sohan has been working in lithography process development for 20 years which includes experience with Micron DRAM Singapore,IME (research institute) Singapore, IBM East Fishkill and Globalfoundries Malta,NY.
His current focus is NTD process development, process- design interaction, multiple patterning, defectivity improvements and thick film PSPI process.
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