Liu, Shiyuan

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Prof. Shiyuan Liu

Professor
Huazhong Univ of Science and Technology
Regular Member

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Area of Expertise: Optical Lithography, Optical Metrology, Nanometrology and Instrumentation, Nanomanufacturing
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Summary
Professor Shiyuan Liu received his PhD in Mechanical Engineering from Huazhong University of Science and Technology in 1998, and worked as a Visiting Scholar at University of Manchester, UK, from 2000 to 2001. Then he served as a Director of Control Engineering Department at National Lithography Tool Research and Development Center in Shanghai from 2002 to 2005. He became a Professor of Mechanical Engineering at Huazhong University of Science and Technology in 2005, and now leads his Nanoscale and Optical Metrology Group, doing research on the metrology and instrumentation for nanomanufacturing. He also works in the area of optical lithography including wavefront aberration metrology and computational lithography technology. He is a member of SPIE, OSA, AVS, IEEE, and CSMNT (Chinese Society of Micro/Nano Technology). He holds 30 patents and has authored or co-authored more than 100 technical papers. Please visit http://www2.hust.edu.cn/nom for more detailed information.
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