Dr. Minoru Toriumi


Tokyo Univ. of Science


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Minoru Toriumi received his ph. D. in Chemistry from Tokyo Institute of Technology in 1984. He has studied the photoresists materials at Hitachi Central Research Laboratory, Daikin Industries, Ltd. and Osaka University. He presides over Laboratory for Interdisciplinary Science and Technology to study resist materials and applications of the free electron laser at Tokyo University of Science.
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