Lobert, Jürgen M.

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Dr. Jürgen M. Lobert

Director of AMC Technology
Entegris Inc


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Area of Expertise: contamination control, AMC filters, analytical instrumentation, atmospheric chemistry, R&D
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Summary
Jürgen Lobert is the Director of AMC Technology at Entegris, Inc., responsible for two laboratories for world-wide, commercial AMC services and AMC filter research & development. Since joining Entegris’ predecessor Extraction Systems Inc in 2003, Jürgen has been involved in developing analytical methods for detecting airborne molecular contamination (AMC) in lithography cleanroom environments. As a publisher of many peer-reviewed journals and a scientist in the field of atmospheric chemistry as well an active member of SEMI working groups on gases, facilities and liquids and the ITRS Yield Enhancement Group, Jürgen contributes to the understanding of contamination, its reactions and control.
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