Schenk, Harald

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Prof. Harald Schenk

Director Fraunhofer IPMS
Fraunhofer-Institut für Photonische Mikrosysteme
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Area of Expertise: MEMS, optical MEMS, MOEMS, micro machining, light modulators, actuators
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Summary
Application focused Research and Development of MEMS and MEMS based systems including design, simulation, process integration and pilot fabrication. Special Know-how and experience in micro scanning mirrors (e. g. for projection, metrology and imaging) light modulators (e. g. for lithography, adaptive optics), electrostatic micro and nano actuators, MEMS process technology incl. CMOS integration, MEMS reliability and product qualification, project management.
More than 140 publications and more than 20 patents/patent applications.
Professor for Micro- and Nanosystems at Brandenburg Technical University, Cottbus. Director of Fraunhofer IPMS, Dresden. Co-founder of HiperScan (NIR micro spectrometers and spectroscopic solutions)
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