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Dr. Han-Hao (Elliot) Cheng

Senior Process Engineer
Australian National Fabrication Facility


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Area of Expertise: Directed Self Assembly, Nanofabrication, Two photon nanolithography, Electron Beam Lithography, Nanoscale electronics, Metrology
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Summary
I am a professional officer at ANFF-Q, an institute funded by the Australian federal government for enabling nano/microelectronic and scientific research programs under the funding scheme of NCRIS (2007-2015).
I have been developing advanced lithography processes in micro/nanoelectronics for 10 years. In the past I have worked on directed self assembly of 8 nm half pitch structures for Intel Corp., and have assisted Intel, Sematech, Dow Chemical on developing novel lithography materials.
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