Scholze, Frank

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Dr. Frank Scholze

Head of Group "EUV Radiometry"
Physikalisch-Technische Bundesanstalt


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Area of Expertise: EUV radiometry, X-ray detectors, EUV scatterometry, EUV reflectometry, multilayer mirrors
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Summary
born 30.09.1961 Berlin,
1982-1987 Physics studies at TU Dresden, graduated with a work on x-ray fluorescence analysis,
1987-1991 working on x-ray detectors at the Centre for scientific instrumentation of the Academy of Sciences,
since 1991 with the X-ray radiometry laboratory of PTB at BESSY
1997 PhD at TU Berlin, internal quantum yield of silicon in the soft X-ray spectral range
working on EUV and soft x-ray detector calibration and optical components characterization,
development of measurement methods for the characterization of components for EUV Lithography
and x-ray scattering methods for the characterization of structured surfaces.
Head of the working group for EUV radiometry.
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