Settens, Charles M.

Dr. Charles M. Settens

Graduate Research Assistant
Massachusetts Institute of Technology


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Area of Expertise: X-ray Metrology, SAXS, XRD, Small angle X-ray Scattering, XRR, FinFET
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Summary
My PhD research centers on metrology of nanostructures from various semiconductor materials with X-ray probes, particularly small angle X-ray scattering (SAXS), high resolution X-ray diffractometry (HRXRD) and reflectometry (XRR), as well as supplemental characterization techniques such as, atomic force microscopy (AFM), scanning electron microscopy (SEM) and transmission electron microscopy (TEM).
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