Chew, Basil

Mr. Basil Chew

Research Engineer
King Abdullah Univ of Science and Technology


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Area of Expertise: Photolithography, RET
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Summary
King Abdullah University of Science and Technology, Saudi Arabia
Fab start-up and commissioning
Advanced materials, biotechnology, electronics and photonics, MEMS/NENS.
Heidelberg mask laser writer, Crestec e-beam writer, ASML, EVG contact aligner, TEL ACT8, SUSS coat/dev, SSEC mask processors, JST spinners

Qimonda - senior litho engineer
70nm litho gate process. SPC, CPK, proximity effects, lens aberrations, pattern placement errors, lens heating, zone alignment, mask pixeration (CDC), Prolith simulations.
ASML 1450F, TEL Lithius, Cymer XLA165

TSMC - senior litho, etch, integration, device engineer
Product tapeout, wafer flow setup, process optimization, yield + reliability improvement, electrical compliance
ASML PAS5500, TEL ACT8, LAM TCP9400, AMAT Centura DPS
Logic, 4T/6T SRAM, eFlash, mixed-mode

Micron - senior litho engineer
Advanced Technology Department
Process transfer and development
OAI, PSM, OPC, SRAF, lens aberrations, process window optimization and simulations (Prolith/Solid-C)
Canon ES3, EX5, i5, TEL Mark/ACT, KLA Archer10, Hitachi S9220
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