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Micro/Nano Lithography

Vivek Singh: The research pipeline in the lithography industry

Advancing Moore's Law depends on an ongoing R&D process that continues regardless of economic ups and downs.
16 May 2012, SPIE Newsroom. DOI: 10.1117/2.3201205.11

Vivek Singh is an Intel Fellow, Technology and Manufacturing Group Director, Computational Lithography for Intel Corporation.

He is responsible for all of Intel's CAD and modeling tool development in full chip OPC, lithography verification, rigorous lithography modeling, next-generation lithography selection, inverse lithography technologies and double patterning. He also represents Intel on several external Design for Manufacturability (DFM) forums, and has chaired the DFM Conference at SPIE Advanced Lithography. Singh holds 13 patents and won the Intel Achievement Award in 2007. He is a Fellow of SPIE.

Singh graduated with a Bachelors in ChemE from the Indian Institute of Technology in Delhi in 1989. He earned a Master's in ChemE in 1990, a PhD EE minor in 1993, and a PhD in ChemE in 1993, all from Stanford University.