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Micro/Nano Lithography

Sensors for biochemical detection and energy conversion: a video interview with Reza Ghodssi

Reza Ghodssi discusses the MEMS Sensors and Actuator Lab at the University of Maryland, microfabrication technologies, and chitosan.

7 August 2007, SPIE Newsroom. DOI:

Reza Ghodssi is an Associate Professor and the Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) and the Institute for Systems Research (ISR) at the University of Maryland (UMD).

Materials technology and process integration are the key enabling tools for novel advances in MEMS and Microsystems for future nano-scale devices and applications. In this interview, Dr. Reza Ghodssi discusses the MSAL lab, the challenges in developing microfabrication technologies, and the role of MEMS in biochemical detection.

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