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Large-field-of-view, multi-perspective Talbot microscopy
A novel low-cost scanning microscope enables robust, scalable imaging for microfluidic systems and photonic integrated circuits.
Plasma etch of block copolymers for lithography
Pattern formation down to 5nm critical dimensions is made possible using an enhanced understanding of the interactions between plasma and block copolymers.
15 April 2016
Nanoimprint lithography and nanodefect management for semiconductor fabrication
Nanoimprint technology combined with defect management could significantly reduce the cost of lithography for fabricating semiconductor devices.
7 April 2016
Two-photon nanolithography for patterning ionic liquid-polymer composites
The lithographic capabilities of a photoresist-based material facilitate direct 3D manufacturing of electrically conductive and transparent nanostructures.
4 April 2016
Efficient high-resolution surface patterning for 2D and 3D parts
Direct laser interference patterning can be used to fabricate periodic structures directly on polymers, ceramics, metals, and coatings at micrometer and nanometer scales.
29 March 2016
Nanosphere photolithography for sub-100nm features
Conventional microprocessing materials and tools are used in a novel high-throughput fabrication technique.
15 March 2016
More Technical Articles...
Harry Levinson plenary presentation: Evolution in the Concentration of Activities in Lithography
Darius Kuciauskas: Two-photon excitation for tracking PV defects and increasing solar efficiency
Michael Liehr: Industry and university collaboration is key element in AIM Photonics
NPI volunteers urge photonics support from Congressional members
18 April 2016
Trade Secret Bill Boosts Protection
NREL theory establishes a path to high-performance 2-D semiconductor devices
SV150: As Silicon Valley grows, so do concerns about region's earnings and sales
Inertial Sensor Technology to Replace GPS in Military Systems
Quantum dots enhance light-to-current conversion in layered semiconductors
More News Headlines...
SPIE Advanced Lithography 2016 news and photos
More SPIE News & Press Releases...